JPH058675Y2 - - Google Patents

Info

Publication number
JPH058675Y2
JPH058675Y2 JP1985036812U JP3681285U JPH058675Y2 JP H058675 Y2 JPH058675 Y2 JP H058675Y2 JP 1985036812 U JP1985036812 U JP 1985036812U JP 3681285 U JP3681285 U JP 3681285U JP H058675 Y2 JPH058675 Y2 JP H058675Y2
Authority
JP
Japan
Prior art keywords
cleaning
air
pair
tank
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985036812U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61153340U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985036812U priority Critical patent/JPH058675Y2/ja
Publication of JPS61153340U publication Critical patent/JPS61153340U/ja
Application granted granted Critical
Publication of JPH058675Y2 publication Critical patent/JPH058675Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP1985036812U 1985-03-13 1985-03-13 Expired - Lifetime JPH058675Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985036812U JPH058675Y2 (enExample) 1985-03-13 1985-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985036812U JPH058675Y2 (enExample) 1985-03-13 1985-03-13

Publications (2)

Publication Number Publication Date
JPS61153340U JPS61153340U (enExample) 1986-09-22
JPH058675Y2 true JPH058675Y2 (enExample) 1993-03-04

Family

ID=30542345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985036812U Expired - Lifetime JPH058675Y2 (enExample) 1985-03-13 1985-03-13

Country Status (1)

Country Link
JP (1) JPH058675Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2665343B2 (ja) * 1988-02-16 1997-10-22 株式会社日立製作所 印刷回路板の洗浄方法
JP2531910Y2 (ja) * 1992-03-31 1997-04-09 株式会社スガイ 物品把持装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285461A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Continuous treating apparatus for plate form objects
JPS57201028A (en) * 1981-06-05 1982-12-09 Toshiba Corp Wafer conveying device
JPS58134441A (ja) * 1982-02-04 1983-08-10 Fujitsu Ltd ウエハ処理装置
JPS6014244A (ja) * 1983-07-06 1985-01-24 Fujitsu Ltd マスク洗浄装置

Also Published As

Publication number Publication date
JPS61153340U (enExample) 1986-09-22

Similar Documents

Publication Publication Date Title
EP0886301B1 (en) Cleaning and drying method for objects to be processed
JP3739073B2 (ja) 基板洗浄処理方法及び基板洗浄処理装置
KR100407868B1 (ko) 세정장치
JP3341727B2 (ja) ウエット装置
JPH058675Y2 (enExample)
JP2000068243A (ja) ウェーハ洗浄装置
JPH01120828A (ja) 半導体ウエハの自動洗浄装置
JP3560011B2 (ja) 基板保持具
JP2921781B2 (ja) 洗浄装置及び洗浄方法
JP2000007149A (ja) 搬送ロボットのハンド
JP3592077B2 (ja) 基板処理装置
JP3177706B2 (ja) 洗浄装置及び洗浄方法
JP3013120B2 (ja) 洗浄・乾燥装置
JPH11253894A (ja) 基板処理装置
JPH04259222A (ja) 洗浄装置
JPH02205024A (ja) 半導体装置の製造装置
JP3341206B2 (ja) 洗浄処理装置及び洗浄処理方法
JPH06260412A (ja) シャワー型枚葉式現像装置
JPH1116871A (ja) 基板処理装置
JP3232585B2 (ja) 半導体洗浄装置
JP2024158415A (ja) 基板処理装置および基板処理方法
JPH04334579A (ja) 洗浄装置
JPH07122531A (ja) 基板処理液収容装置およびそれを備えた基板処理装置
JP3600746B2 (ja) 基板処理装置
KR100379998B1 (ko) 박판 처리 장치