JPS61153340U - - Google Patents

Info

Publication number
JPS61153340U
JPS61153340U JP3681285U JP3681285U JPS61153340U JP S61153340 U JPS61153340 U JP S61153340U JP 3681285 U JP3681285 U JP 3681285U JP 3681285 U JP3681285 U JP 3681285U JP S61153340 U JPS61153340 U JP S61153340U
Authority
JP
Japan
Prior art keywords
air
type substrate
substrate processing
utility
air knife
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3681285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058675Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985036812U priority Critical patent/JPH058675Y2/ja
Publication of JPS61153340U publication Critical patent/JPS61153340U/ja
Application granted granted Critical
Publication of JPH058675Y2 publication Critical patent/JPH058675Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP1985036812U 1985-03-13 1985-03-13 Expired - Lifetime JPH058675Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985036812U JPH058675Y2 (enExample) 1985-03-13 1985-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985036812U JPH058675Y2 (enExample) 1985-03-13 1985-03-13

Publications (2)

Publication Number Publication Date
JPS61153340U true JPS61153340U (enExample) 1986-09-22
JPH058675Y2 JPH058675Y2 (enExample) 1993-03-04

Family

ID=30542345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985036812U Expired - Lifetime JPH058675Y2 (enExample) 1985-03-13 1985-03-13

Country Status (1)

Country Link
JP (1) JPH058675Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207181A (ja) * 1988-02-16 1989-08-21 Hitachi Ltd 印刷回路板の洗浄方法
JPH0579941U (ja) * 1992-03-31 1993-10-29 株式会社スガイ 物品把持装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285461A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Continuous treating apparatus for plate form objects
JPS57201028A (en) * 1981-06-05 1982-12-09 Toshiba Corp Wafer conveying device
JPS58134441A (ja) * 1982-02-04 1983-08-10 Fujitsu Ltd ウエハ処理装置
JPS6014244A (ja) * 1983-07-06 1985-01-24 Fujitsu Ltd マスク洗浄装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285461A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Continuous treating apparatus for plate form objects
JPS57201028A (en) * 1981-06-05 1982-12-09 Toshiba Corp Wafer conveying device
JPS58134441A (ja) * 1982-02-04 1983-08-10 Fujitsu Ltd ウエハ処理装置
JPS6014244A (ja) * 1983-07-06 1985-01-24 Fujitsu Ltd マスク洗浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207181A (ja) * 1988-02-16 1989-08-21 Hitachi Ltd 印刷回路板の洗浄方法
JPH0579941U (ja) * 1992-03-31 1993-10-29 株式会社スガイ 物品把持装置

Also Published As

Publication number Publication date
JPH058675Y2 (enExample) 1993-03-04

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