JPH058674Y2 - - Google Patents

Info

Publication number
JPH058674Y2
JPH058674Y2 JP1985077558U JP7755885U JPH058674Y2 JP H058674 Y2 JPH058674 Y2 JP H058674Y2 JP 1985077558 U JP1985077558 U JP 1985077558U JP 7755885 U JP7755885 U JP 7755885U JP H058674 Y2 JPH058674 Y2 JP H058674Y2
Authority
JP
Japan
Prior art keywords
rotor
vacuum chamber
shielding case
rotational force
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985077558U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61195048U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985077558U priority Critical patent/JPH058674Y2/ja
Publication of JPS61195048U publication Critical patent/JPS61195048U/ja
Application granted granted Critical
Publication of JPH058674Y2 publication Critical patent/JPH058674Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Control Of Electric Motors In General (AREA)
JP1985077558U 1985-05-24 1985-05-24 Expired - Lifetime JPH058674Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985077558U JPH058674Y2 (cs) 1985-05-24 1985-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985077558U JPH058674Y2 (cs) 1985-05-24 1985-05-24

Publications (2)

Publication Number Publication Date
JPS61195048U JPS61195048U (cs) 1986-12-04
JPH058674Y2 true JPH058674Y2 (cs) 1993-03-04

Family

ID=30620732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985077558U Expired - Lifetime JPH058674Y2 (cs) 1985-05-24 1985-05-24

Country Status (1)

Country Link
JP (1) JPH058674Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2521351Y2 (ja) * 1989-09-01 1996-12-25 日本真空技術 株式会社 真空用回転導入装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741374A (en) * 1980-08-25 1982-03-08 Hitachi Ltd Sample mounting and dismounting device in plasma etching device or resembling device

Also Published As

Publication number Publication date
JPS61195048U (cs) 1986-12-04

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