JPH0575263B2 - - Google Patents
Info
- Publication number
- JPH0575263B2 JPH0575263B2 JP61214778A JP21477886A JPH0575263B2 JP H0575263 B2 JPH0575263 B2 JP H0575263B2 JP 61214778 A JP61214778 A JP 61214778A JP 21477886 A JP21477886 A JP 21477886A JP H0575263 B2 JPH0575263 B2 JP H0575263B2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- light
- film thickness
- resist master
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 36
- 238000007689 inspection Methods 0.000 claims description 27
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000005259 measurement Methods 0.000 claims description 15
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000002950 deficient Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21477886A JPS6370152A (ja) | 1986-09-11 | 1986-09-11 | 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21477886A JPS6370152A (ja) | 1986-09-11 | 1986-09-11 | 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6370152A JPS6370152A (ja) | 1988-03-30 |
JPH0575263B2 true JPH0575263B2 (zh) | 1993-10-20 |
Family
ID=16661377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21477886A Granted JPS6370152A (ja) | 1986-09-11 | 1986-09-11 | 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6370152A (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5400548B2 (ja) * | 2009-09-30 | 2014-01-29 | 株式会社日立ハイテクノロジーズ | レジスト膜面ムラ検査装置及び検査方法並びにdtm製造ライン |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5026556A (zh) * | 1973-07-06 | 1975-03-19 | ||
JPS56126747A (en) * | 1980-03-12 | 1981-10-05 | Hitachi Ltd | Inspecting method for flaw, alien substance and the like on surface of sample and device therefor |
JPS61201107A (ja) * | 1985-03-05 | 1986-09-05 | Toshiba Corp | 透明な膜の表面検査方法 |
-
1986
- 1986-09-11 JP JP21477886A patent/JPS6370152A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5026556A (zh) * | 1973-07-06 | 1975-03-19 | ||
JPS56126747A (en) * | 1980-03-12 | 1981-10-05 | Hitachi Ltd | Inspecting method for flaw, alien substance and the like on surface of sample and device therefor |
JPS61201107A (ja) * | 1985-03-05 | 1986-09-05 | Toshiba Corp | 透明な膜の表面検査方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6370152A (ja) | 1988-03-30 |
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