JPS6370152A - 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置 - Google Patents

光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置

Info

Publication number
JPS6370152A
JPS6370152A JP21477886A JP21477886A JPS6370152A JP S6370152 A JPS6370152 A JP S6370152A JP 21477886 A JP21477886 A JP 21477886A JP 21477886 A JP21477886 A JP 21477886A JP S6370152 A JPS6370152 A JP S6370152A
Authority
JP
Japan
Prior art keywords
film thickness
resist
light
detector
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21477886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575263B2 (zh
Inventor
Kazumi Kuriyama
栗山　和巳
Yutaka Takasu
高洲　豊
Shigeru Kono
滋 河野
Chiharu Koshio
千春 小塩
Kazuhiko Osada
和彦 長田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Video Corp
Pioneer Corp
Original Assignee
Pioneer Video Corp
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Video Corp, Pioneer Electronic Corp filed Critical Pioneer Video Corp
Priority to JP21477886A priority Critical patent/JPS6370152A/ja
Publication of JPS6370152A publication Critical patent/JPS6370152A/ja
Publication of JPH0575263B2 publication Critical patent/JPH0575263B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP21477886A 1986-09-11 1986-09-11 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置 Granted JPS6370152A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21477886A JPS6370152A (ja) 1986-09-11 1986-09-11 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21477886A JPS6370152A (ja) 1986-09-11 1986-09-11 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS6370152A true JPS6370152A (ja) 1988-03-30
JPH0575263B2 JPH0575263B2 (zh) 1993-10-20

Family

ID=16661377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21477886A Granted JPS6370152A (ja) 1986-09-11 1986-09-11 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS6370152A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075426A (ja) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp レジスト膜面ムラ検査装置及び検査方法並びにｄｔｍ製造ライン

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026556A (zh) * 1973-07-06 1975-03-19
JPS56126747A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
JPS61201107A (ja) * 1985-03-05 1986-09-05 Toshiba Corp 透明な膜の表面検査方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026556A (zh) * 1973-07-06 1975-03-19
JPS56126747A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
JPS61201107A (ja) * 1985-03-05 1986-09-05 Toshiba Corp 透明な膜の表面検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075426A (ja) * 2009-09-30 2011-04-14 Hitachi High-Technologies Corp レジスト膜面ムラ検査装置及び検査方法並びにｄｔｍ製造ライン

Also Published As

Publication number Publication date
JPH0575263B2 (zh) 1993-10-20

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