JPH0573348B2 - - Google Patents

Info

Publication number
JPH0573348B2
JPH0573348B2 JP63078011A JP7801188A JPH0573348B2 JP H0573348 B2 JPH0573348 B2 JP H0573348B2 JP 63078011 A JP63078011 A JP 63078011A JP 7801188 A JP7801188 A JP 7801188A JP H0573348 B2 JPH0573348 B2 JP H0573348B2
Authority
JP
Japan
Prior art keywords
film
insulating film
sio
etching
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63078011A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6432650A (en
Inventor
Takamitsu Kamyama
Yoshifumi Kawamoto
Sadayuki Okudaira
Tokuo Kure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7801188A priority Critical patent/JPS6432650A/ja
Publication of JPS6432650A publication Critical patent/JPS6432650A/ja
Publication of JPH0573348B2 publication Critical patent/JPH0573348B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7801188A 1988-04-01 1988-04-01 Manufacture of semiconductor device Granted JPS6432650A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7801188A JPS6432650A (en) 1988-04-01 1988-04-01 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7801188A JPS6432650A (en) 1988-04-01 1988-04-01 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS6432650A JPS6432650A (en) 1989-02-02
JPH0573348B2 true JPH0573348B2 (enrdf_load_stackoverflow) 1993-10-14

Family

ID=13649849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7801188A Granted JPS6432650A (en) 1988-04-01 1988-04-01 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6432650A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444482A (en) * 1977-09-14 1979-04-07 Matsushita Electric Ind Co Ltd Mos type semiconductor device and its manufacture

Also Published As

Publication number Publication date
JPS6432650A (en) 1989-02-02

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