JPH0568863B2 - - Google Patents

Info

Publication number
JPH0568863B2
JPH0568863B2 JP1128810A JP12881089A JPH0568863B2 JP H0568863 B2 JPH0568863 B2 JP H0568863B2 JP 1128810 A JP1128810 A JP 1128810A JP 12881089 A JP12881089 A JP 12881089A JP H0568863 B2 JPH0568863 B2 JP H0568863B2
Authority
JP
Japan
Prior art keywords
oxide film
gate
layer
region
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1128810A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0296378A (ja
Inventor
Shinji Shimizu
Kazuhiro Komori
Yasunobu Osa
Jun Sugiura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1128810A priority Critical patent/JPH0296378A/ja
Publication of JPH0296378A publication Critical patent/JPH0296378A/ja
Publication of JPH0568863B2 publication Critical patent/JPH0568863B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H10B41/42—Simultaneous manufacture of periphery and memory cells
    • H10B41/49—Simultaneous manufacture of periphery and memory cells comprising different types of peripheral transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP1128810A 1989-05-24 1989-05-24 半導体集積回路装置 Granted JPH0296378A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1128810A JPH0296378A (ja) 1989-05-24 1989-05-24 半導体集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1128810A JPH0296378A (ja) 1989-05-24 1989-05-24 半導体集積回路装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2276080A Division JPS56120166A (en) 1980-02-27 1980-02-27 Semiconductor ic device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPH0296378A JPH0296378A (ja) 1990-04-09
JPH0568863B2 true JPH0568863B2 (enrdf_load_stackoverflow) 1993-09-29

Family

ID=14993980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1128810A Granted JPH0296378A (ja) 1989-05-24 1989-05-24 半導体集積回路装置

Country Status (1)

Country Link
JP (1) JPH0296378A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5691217A (en) * 1996-01-03 1997-11-25 Micron Technology, Inc. Semiconductor processing method of forming a pair of field effect transistors having different thickness gate dielectric layers
WO2004023385A1 (ja) * 2002-08-29 2004-03-18 Renesas Technology Corp. 半導体処理装置及びｉｃカード

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827666B2 (ja) * 1975-03-12 1983-06-10 株式会社日立製作所 ハンドウタイシユウセキカイロ
JPS53120383A (en) * 1977-03-30 1978-10-20 Fujitsu Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPH0296378A (ja) 1990-04-09

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