JPH0566979B2 - - Google Patents

Info

Publication number
JPH0566979B2
JPH0566979B2 JP61162997A JP16299786A JPH0566979B2 JP H0566979 B2 JPH0566979 B2 JP H0566979B2 JP 61162997 A JP61162997 A JP 61162997A JP 16299786 A JP16299786 A JP 16299786A JP H0566979 B2 JPH0566979 B2 JP H0566979B2
Authority
JP
Japan
Prior art keywords
pressure
pressure sensor
pedestal
sensor chip
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61162997A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6318231A (ja
Inventor
Yoshito Takehana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimon KK
Original Assignee
Shimon KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimon KK filed Critical Shimon KK
Priority to JP16299786A priority Critical patent/JPS6318231A/ja
Publication of JPS6318231A publication Critical patent/JPS6318231A/ja
Publication of JPH0566979B2 publication Critical patent/JPH0566979B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP16299786A 1986-07-10 1986-07-10 半導体圧力センサ Granted JPS6318231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16299786A JPS6318231A (ja) 1986-07-10 1986-07-10 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16299786A JPS6318231A (ja) 1986-07-10 1986-07-10 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS6318231A JPS6318231A (ja) 1988-01-26
JPH0566979B2 true JPH0566979B2 (instruction) 1993-09-22

Family

ID=15765235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16299786A Granted JPS6318231A (ja) 1986-07-10 1986-07-10 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS6318231A (instruction)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2622722B2 (ja) * 1988-06-27 1997-06-18 新電元工業株式会社 圧力検出装置
US5333505A (en) * 1992-01-13 1994-08-02 Mitsubishi Denki Kabushiki Kaisha Semiconductor pressure sensor for use at high temperature and pressure and method of manufacturing same
JP4281221B2 (ja) * 2000-06-29 2009-06-17 株式会社デンソー 圧力センサ
JP5200947B2 (ja) * 2009-01-14 2013-06-05 株式会社デンソー センサ装置の製造方法およびセンサ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52143786A (en) * 1976-05-26 1977-11-30 Toshiba Corp Semiconductor pressure, differential pressure transmitter

Also Published As

Publication number Publication date
JPS6318231A (ja) 1988-01-26

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