JPH0561966B2 - - Google Patents

Info

Publication number
JPH0561966B2
JPH0561966B2 JP60291941A JP29194185A JPH0561966B2 JP H0561966 B2 JPH0561966 B2 JP H0561966B2 JP 60291941 A JP60291941 A JP 60291941A JP 29194185 A JP29194185 A JP 29194185A JP H0561966 B2 JPH0561966 B2 JP H0561966B2
Authority
JP
Japan
Prior art keywords
copper
soda lime
silanes
compound
agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60291941A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62152515A (ja
Inventor
Koichi Kitahara
Takashi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Priority to JP60291941A priority Critical patent/JPS62152515A/ja
Publication of JPS62152515A publication Critical patent/JPS62152515A/ja
Publication of JPH0561966B2 publication Critical patent/JPH0561966B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP60291941A 1985-12-26 1985-12-26 シラン類の除去方法 Granted JPS62152515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60291941A JPS62152515A (ja) 1985-12-26 1985-12-26 シラン類の除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60291941A JPS62152515A (ja) 1985-12-26 1985-12-26 シラン類の除去方法

Publications (2)

Publication Number Publication Date
JPS62152515A JPS62152515A (ja) 1987-07-07
JPH0561966B2 true JPH0561966B2 (enrdf_load_stackoverflow) 1993-09-07

Family

ID=17775438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60291941A Granted JPS62152515A (ja) 1985-12-26 1985-12-26 シラン類の除去方法

Country Status (1)

Country Link
JP (1) JPS62152515A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5182088A (en) * 1990-09-07 1993-01-26 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Removal of gaseous hydrides
JP3347478B2 (ja) * 1994-06-13 2002-11-20 日本パイオニクス株式会社 排ガスの浄化方法
JP5498660B2 (ja) * 2008-03-03 2014-05-21 大陽日酸株式会社 シランの除害剤及び除害方法

Also Published As

Publication number Publication date
JPS62152515A (ja) 1987-07-07

Similar Documents

Publication Publication Date Title
US5670445A (en) Cleaning agent of harmful gas and cleaning method
JP2001338910A (ja) ハロゲン系ガスの除害剤、除害方法及びその用途
JP2581642B2 (ja) エッチング排ガス除害剤及び排ガス処理方法
JPH0561966B2 (enrdf_load_stackoverflow)
JP2691927B2 (ja) 有害成分の除去方法
KR20010061933A (ko) 유해가스 정화제 및 정화방법
JP3701741B2 (ja) 有害ガスの浄化剤
JP3260825B2 (ja) 有害ガスの浄化方法
JPH067903B2 (ja) シラン類の除去方法
JPH0457368B2 (enrdf_load_stackoverflow)
JPS6190726A (ja) 除去剤
JP2700412B2 (ja) 水素化物ガスの精製方法
JP2702461B2 (ja) 排ガスの浄化方法
JPS621439A (ja) 有害成分の除去方法
KR100684201B1 (ko) 불소 포함 배기가스의 처리방법 및 이의 방법을 사용하기위한 흡착 컬럼 장치
JPH0687943B2 (ja) 排ガスの浄化方法
JPH074506B2 (ja) 排ガスの浄化方法
JPH07284631A (ja) 有害ガスの浄化剤
JPH08206445A (ja) 排ガスの浄化方法
JP3362918B2 (ja) 排ガスの浄化方法
JP3154340B2 (ja) 水素化ゲルマニウムの精製方法
JP2008119628A (ja) 有害ガスの浄化剤及び浄化方法
JP2608394B2 (ja) 除去剤
JPH0424093B2 (enrdf_load_stackoverflow)
JP2002326017A (ja) 有害ガスの浄化方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees