JPH0548936B2 - - Google Patents

Info

Publication number
JPH0548936B2
JPH0548936B2 JP62247175A JP24717587A JPH0548936B2 JP H0548936 B2 JPH0548936 B2 JP H0548936B2 JP 62247175 A JP62247175 A JP 62247175A JP 24717587 A JP24717587 A JP 24717587A JP H0548936 B2 JPH0548936 B2 JP H0548936B2
Authority
JP
Japan
Prior art keywords
type
polycrystalline silicon
groove
oxide film
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62247175A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6489365A (en
Inventor
Susumu Ooi
Masahiko Nakamae
Hiroshi Shiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62247175A priority Critical patent/JPS6489365A/ja
Priority to EP88116120A priority patent/EP0310087B1/en
Priority to US07/250,670 priority patent/US4963957A/en
Priority to DE3889610T priority patent/DE3889610T2/de
Publication of JPS6489365A publication Critical patent/JPS6489365A/ja
Publication of JPH0548936B2 publication Critical patent/JPH0548936B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66234—Bipolar junction transistors [BJT]
    • H01L29/66272—Silicon vertical transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H01L21/743—Making of internal connections, substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41708—Emitter or collector electrodes for bipolar transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42304—Base electrodes for bipolar transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP62247175A 1987-09-29 1987-09-29 Semiconductor device Granted JPS6489365A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62247175A JPS6489365A (en) 1987-09-29 1987-09-29 Semiconductor device
EP88116120A EP0310087B1 (en) 1987-09-29 1988-09-29 Semiconductor device having bipolar transistor with trench
US07/250,670 US4963957A (en) 1987-09-29 1988-09-29 Semiconductor device having bipolar transistor with trench
DE3889610T DE3889610T2 (de) 1987-09-29 1988-09-29 Halbleiteranordnung mit einem Trench-Bipolartransistor.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62247175A JPS6489365A (en) 1987-09-29 1987-09-29 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS6489365A JPS6489365A (en) 1989-04-03
JPH0548936B2 true JPH0548936B2 (US07935154-20110503-C00018.png) 1993-07-22

Family

ID=17159555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62247175A Granted JPS6489365A (en) 1987-09-29 1987-09-29 Semiconductor device

Country Status (4)

Country Link
US (1) US4963957A (US07935154-20110503-C00018.png)
EP (1) EP0310087B1 (US07935154-20110503-C00018.png)
JP (1) JPS6489365A (US07935154-20110503-C00018.png)
DE (1) DE3889610T2 (US07935154-20110503-C00018.png)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8800157A (nl) * 1988-01-25 1989-08-16 Philips Nv Halfgeleiderinrichting en werkwijze ter vervaardiging daarvan.
US5008210A (en) * 1989-02-07 1991-04-16 Hewlett-Packard Company Process of making a bipolar transistor with a trench-isolated emitter
US5109263A (en) * 1989-07-28 1992-04-28 Hitachi, Ltd. Semiconductor device with optimal distance between emitter and trench isolation
JPH04373133A (ja) * 1991-06-24 1992-12-25 Hitachi Ltd 半導体装置
US5194926A (en) * 1991-10-03 1993-03-16 Motorola Inc. Semiconductor device having an inverse-T bipolar transistor
US5311055A (en) * 1991-11-22 1994-05-10 The United States Of America As Represented By The Secretary Of The Navy Trenched bipolar transistor structures
US5345102A (en) * 1992-02-28 1994-09-06 Nec Corporation Bipolar transistor having collector electrode penetrating emitter and base regions
JP2971246B2 (ja) * 1992-04-15 1999-11-02 株式会社東芝 ヘテロバイポーラトランジスタの製造方法
KR960016229B1 (ko) * 1993-09-13 1996-12-07 삼성전자 주식회사 반도체소자의 콘택구조 및 그 제조방법
JPH07106412A (ja) * 1993-10-07 1995-04-21 Toshiba Corp 半導体装置およびその製造方法
US5426059A (en) * 1994-05-26 1995-06-20 Queyssac; Daniel G. Method of making vertically stacked bipolar semiconductor structure
GB2296377A (en) * 1994-12-20 1996-06-26 Korea Electronics Telecomm Pillar bipolar transistors
KR0171000B1 (ko) * 1995-12-15 1999-02-01 양승택 자동 정의된 베이스 전극을 갖는 바이폴라 트랜지스터 구조 및 그 제조방법
US5969402A (en) * 1997-07-18 1999-10-19 Advanced Micro Devices, Inc. Reduction of depletion spreading sideways utilizing slots
US5912501A (en) * 1997-07-18 1999-06-15 Advanced Micro Devices, Inc. Elimination of radius of curvature effects of p-n junction avalanche breakdown using slots
JP3466102B2 (ja) * 1999-03-12 2003-11-10 沖電気工業株式会社 半導体装置及び半導体装置の製造方法
JP2001244416A (ja) 2000-02-29 2001-09-07 Hitachi Ltd 信号処理用半導体集積回路
FR2807567A1 (fr) * 2000-04-10 2001-10-12 St Microelectronics Sa Procede de realisation d'un transistor bipolaire
JP4955222B2 (ja) 2005-05-20 2012-06-20 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
KR100818892B1 (ko) * 2007-03-19 2008-04-03 동부일렉트로닉스 주식회사 바이폴라 트랜지스터 및 그 제조 방법
US9673084B2 (en) * 2014-12-04 2017-06-06 Globalfoundries Singapore Pte. Ltd. Isolation scheme for high voltage device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1534896A (en) * 1975-05-19 1978-12-06 Itt Direct metal contact to buried layer
JPH06101470B2 (ja) * 1984-02-03 1994-12-12 アドバンスト・マイクロ・ディバイシズ・インコ−ポレ−テッド スロット内に形成されたバイポーラトランジスタからなる能動要素を有する集積回路装置
JPS60241261A (ja) * 1984-05-16 1985-11-30 Hitachi Ltd 半導体装置およびその製造方法
JPS61127169A (ja) * 1984-11-24 1986-06-14 Sony Corp 半導体装置及びその製造方法
JPH0719838B2 (ja) * 1985-07-19 1995-03-06 松下電器産業株式会社 半導体装置およびその製造方法
US4887144A (en) * 1985-07-26 1989-12-12 Texas Instruments Incorporated Topside substrate contact in a trenched semiconductor structure and method of fabrication
US4764801A (en) * 1985-10-08 1988-08-16 Motorola Inc. Poly-sidewall contact transistors
US4910575A (en) * 1986-06-16 1990-03-20 Matsushita Electric Industrial Co., Ltd. Semiconductor integrated circuit and its manufacturing method

Also Published As

Publication number Publication date
DE3889610T2 (de) 1994-09-01
EP0310087B1 (en) 1994-05-18
EP0310087A2 (en) 1989-04-05
JPS6489365A (en) 1989-04-03
EP0310087A3 (en) 1989-12-13
DE3889610D1 (de) 1994-06-23
US4963957A (en) 1990-10-16

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