JPH0546283Y2 - - Google Patents

Info

Publication number
JPH0546283Y2
JPH0546283Y2 JP1986160967U JP16096786U JPH0546283Y2 JP H0546283 Y2 JPH0546283 Y2 JP H0546283Y2 JP 1986160967 U JP1986160967 U JP 1986160967U JP 16096786 U JP16096786 U JP 16096786U JP H0546283 Y2 JPH0546283 Y2 JP H0546283Y2
Authority
JP
Japan
Prior art keywords
filter
vacuum
semiconductor chip
bonding
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986160967U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6365252U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986160967U priority Critical patent/JPH0546283Y2/ja
Publication of JPS6365252U publication Critical patent/JPS6365252U/ja
Application granted granted Critical
Publication of JPH0546283Y2 publication Critical patent/JPH0546283Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
JP1986160967U 1986-10-20 1986-10-20 Expired - Lifetime JPH0546283Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986160967U JPH0546283Y2 (enExample) 1986-10-20 1986-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986160967U JPH0546283Y2 (enExample) 1986-10-20 1986-10-20

Publications (2)

Publication Number Publication Date
JPS6365252U JPS6365252U (enExample) 1988-04-30
JPH0546283Y2 true JPH0546283Y2 (enExample) 1993-12-03

Family

ID=31086849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986160967U Expired - Lifetime JPH0546283Y2 (enExample) 1986-10-20 1986-10-20

Country Status (1)

Country Link
JP (1) JPH0546283Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109477A (en) * 1977-03-07 1978-09-25 Toshiba Corp Mounting method of semiconductor element
JPS6026100Y2 (ja) * 1980-04-30 1985-08-06 日本電気株式会社 接着治具

Also Published As

Publication number Publication date
JPS6365252U (enExample) 1988-04-30

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