JPS6365252U - - Google Patents
Info
- Publication number
- JPS6365252U JPS6365252U JP16096786U JP16096786U JPS6365252U JP S6365252 U JPS6365252 U JP S6365252U JP 16096786 U JP16096786 U JP 16096786U JP 16096786 U JP16096786 U JP 16096786U JP S6365252 U JPS6365252 U JP S6365252U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- side wall
- chamber
- chamber side
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986160967U JPH0546283Y2 (enExample) | 1986-10-20 | 1986-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986160967U JPH0546283Y2 (enExample) | 1986-10-20 | 1986-10-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6365252U true JPS6365252U (enExample) | 1988-04-30 |
| JPH0546283Y2 JPH0546283Y2 (enExample) | 1993-12-03 |
Family
ID=31086849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986160967U Expired - Lifetime JPH0546283Y2 (enExample) | 1986-10-20 | 1986-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0546283Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109477A (en) * | 1977-03-07 | 1978-09-25 | Toshiba Corp | Mounting method of semiconductor element |
| JPS56162644U (enExample) * | 1980-04-30 | 1981-12-03 |
-
1986
- 1986-10-20 JP JP1986160967U patent/JPH0546283Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109477A (en) * | 1977-03-07 | 1978-09-25 | Toshiba Corp | Mounting method of semiconductor element |
| JPS56162644U (enExample) * | 1980-04-30 | 1981-12-03 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546283Y2 (enExample) | 1993-12-03 |