JPH01129832U - - Google Patents
Info
- Publication number
- JPH01129832U JPH01129832U JP2460388U JP2460388U JPH01129832U JP H01129832 U JPH01129832 U JP H01129832U JP 2460388 U JP2460388 U JP 2460388U JP 2460388 U JP2460388 U JP 2460388U JP H01129832 U JPH01129832 U JP H01129832U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fixing
- main body
- holes
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2460388U JPH01129832U (enExample) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2460388U JPH01129832U (enExample) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129832U true JPH01129832U (enExample) | 1989-09-04 |
Family
ID=31244589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2460388U Pending JPH01129832U (enExample) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129832U (enExample) |
-
1988
- 1988-02-26 JP JP2460388U patent/JPH01129832U/ja active Pending