JPH0542362B2 - - Google Patents
Info
- Publication number
- JPH0542362B2 JPH0542362B2 JP60103890A JP10389085A JPH0542362B2 JP H0542362 B2 JPH0542362 B2 JP H0542362B2 JP 60103890 A JP60103890 A JP 60103890A JP 10389085 A JP10389085 A JP 10389085A JP H0542362 B2 JPH0542362 B2 JP H0542362B2
- Authority
- JP
- Japan
- Prior art keywords
- powder
- nitriding
- rotary kiln
- rate
- granules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10389085A JPS61266305A (ja) | 1985-05-17 | 1985-05-17 | 回転窯による窒化珪素の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10389085A JPS61266305A (ja) | 1985-05-17 | 1985-05-17 | 回転窯による窒化珪素の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61266305A JPS61266305A (ja) | 1986-11-26 |
JPH0542362B2 true JPH0542362B2 (enrdf_load_stackoverflow) | 1993-06-28 |
Family
ID=14366019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10389085A Granted JPS61266305A (ja) | 1985-05-17 | 1985-05-17 | 回転窯による窒化珪素の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61266305A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06102524B2 (ja) * | 1990-01-31 | 1994-12-14 | 信越化学工業株式会社 | 窒化ケイ素粉末の製造方法 |
JP4572382B2 (ja) * | 2004-12-06 | 2010-11-04 | 独立行政法人 日本原子力研究開発機構 | 単結晶窒化ケイ素ナノシートとその製造方法 |
DE102008062177A1 (de) | 2008-12-13 | 2010-07-08 | Alzchem Trostberg Gmbh | Verfahren zur Herstellung von hochreinem Siliciumnitrid |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS584902B2 (ja) * | 1978-10-06 | 1983-01-28 | 株式会社安川電機 | 自動乾のり製造装置の「す」外し装置 |
JPS5562804A (en) * | 1979-10-09 | 1980-05-12 | Sumitomo Electric Ind Ltd | Production of nitride |
JPS6197110A (ja) * | 1984-10-18 | 1986-05-15 | Osaka Titanium Seizo Kk | 高α相率窒化けい素の製造方法 |
-
1985
- 1985-05-17 JP JP10389085A patent/JPS61266305A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61266305A (ja) | 1986-11-26 |
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