JPS61266305A - 回転窯による窒化珪素の製造方法 - Google Patents
回転窯による窒化珪素の製造方法Info
- Publication number
- JPS61266305A JPS61266305A JP10389085A JP10389085A JPS61266305A JP S61266305 A JPS61266305 A JP S61266305A JP 10389085 A JP10389085 A JP 10389085A JP 10389085 A JP10389085 A JP 10389085A JP S61266305 A JPS61266305 A JP S61266305A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- nitriding
- rotary kiln
- granules
- rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10389085A JPS61266305A (ja) | 1985-05-17 | 1985-05-17 | 回転窯による窒化珪素の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10389085A JPS61266305A (ja) | 1985-05-17 | 1985-05-17 | 回転窯による窒化珪素の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61266305A true JPS61266305A (ja) | 1986-11-26 |
JPH0542362B2 JPH0542362B2 (enrdf_load_stackoverflow) | 1993-06-28 |
Family
ID=14366019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10389085A Granted JPS61266305A (ja) | 1985-05-17 | 1985-05-17 | 回転窯による窒化珪素の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61266305A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5232677A (en) * | 1990-01-31 | 1993-08-03 | Shin-Etsu Chemical Co., Ltd. | Preparation of silicon nitride powder by partially nitriding in a fluidized bed and then completing nitridation in a moving bed |
JP2006160548A (ja) * | 2004-12-06 | 2006-06-22 | Japan Atomic Energy Agency | 単結晶窒化ケイ素ナノシートとその製造方法 |
JP2012511490A (ja) * | 2008-12-13 | 2012-05-24 | アルツケム・トロストベルク・ゲーエムベーハー | 高純度窒化ケイ素の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5550882A (en) * | 1978-10-06 | 1980-04-14 | Yaskawa Electric Mfg Co Ltd | Screen-removing device in automatic dried-laver manufacturing machine |
JPS5562804A (en) * | 1979-10-09 | 1980-05-12 | Sumitomo Electric Ind Ltd | Production of nitride |
JPS6197110A (ja) * | 1984-10-18 | 1986-05-15 | Osaka Titanium Seizo Kk | 高α相率窒化けい素の製造方法 |
-
1985
- 1985-05-17 JP JP10389085A patent/JPS61266305A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5550882A (en) * | 1978-10-06 | 1980-04-14 | Yaskawa Electric Mfg Co Ltd | Screen-removing device in automatic dried-laver manufacturing machine |
JPS5562804A (en) * | 1979-10-09 | 1980-05-12 | Sumitomo Electric Ind Ltd | Production of nitride |
JPS6197110A (ja) * | 1984-10-18 | 1986-05-15 | Osaka Titanium Seizo Kk | 高α相率窒化けい素の製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5232677A (en) * | 1990-01-31 | 1993-08-03 | Shin-Etsu Chemical Co., Ltd. | Preparation of silicon nitride powder by partially nitriding in a fluidized bed and then completing nitridation in a moving bed |
JP2006160548A (ja) * | 2004-12-06 | 2006-06-22 | Japan Atomic Energy Agency | 単結晶窒化ケイ素ナノシートとその製造方法 |
JP2012511490A (ja) * | 2008-12-13 | 2012-05-24 | アルツケム・トロストベルク・ゲーエムベーハー | 高純度窒化ケイ素の製造方法 |
US8697023B2 (en) | 2008-12-13 | 2014-04-15 | Alzchem Trostberg Gmbh | Method for producing high-purity silicon nitride |
Also Published As
Publication number | Publication date |
---|---|
JPH0542362B2 (enrdf_load_stackoverflow) | 1993-06-28 |
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