JPH0541552Y2 - - Google Patents
Info
- Publication number
- JPH0541552Y2 JPH0541552Y2 JP15179286U JP15179286U JPH0541552Y2 JP H0541552 Y2 JPH0541552 Y2 JP H0541552Y2 JP 15179286 U JP15179286 U JP 15179286U JP 15179286 U JP15179286 U JP 15179286U JP H0541552 Y2 JPH0541552 Y2 JP H0541552Y2
- Authority
- JP
- Japan
- Prior art keywords
- door
- opening
- cassette
- rotating shaft
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 26
- 230000003749 cleanliness Effects 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15179286U JPH0541552Y2 (enEXAMPLES) | 1986-10-02 | 1986-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15179286U JPH0541552Y2 (enEXAMPLES) | 1986-10-02 | 1986-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6357738U JPS6357738U (enEXAMPLES) | 1988-04-18 |
| JPH0541552Y2 true JPH0541552Y2 (enEXAMPLES) | 1993-10-20 |
Family
ID=31069185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15179286U Expired - Lifetime JPH0541552Y2 (enEXAMPLES) | 1986-10-02 | 1986-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0541552Y2 (enEXAMPLES) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3069575B2 (ja) * | 1990-03-09 | 2000-07-24 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
| JP6693229B2 (ja) * | 2016-03-30 | 2020-05-13 | ブラザー工業株式会社 | ワーク交換装置、ワーク交換方法及びコンピュータプログラム |
-
1986
- 1986-10-02 JP JP15179286U patent/JPH0541552Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6357738U (enEXAMPLES) | 1988-04-18 |
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