JPH0541527B2 - - Google Patents

Info

Publication number
JPH0541527B2
JPH0541527B2 JP5883687A JP5883687A JPH0541527B2 JP H0541527 B2 JPH0541527 B2 JP H0541527B2 JP 5883687 A JP5883687 A JP 5883687A JP 5883687 A JP5883687 A JP 5883687A JP H0541527 B2 JPH0541527 B2 JP H0541527B2
Authority
JP
Japan
Prior art keywords
fluid
section
gas
resistance
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5883687A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63225028A (ja
Inventor
Hiromitsu Tokisue
Nobuo Tsumaki
Toshifumi Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62058836A priority Critical patent/JPS63225028A/ja
Priority to US07/155,808 priority patent/US4874273A/en
Publication of JPS63225028A publication Critical patent/JPS63225028A/ja
Publication of JPH0541527B2 publication Critical patent/JPH0541527B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62058836A 1987-03-16 1987-03-16 搬送装置 Granted JPS63225028A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62058836A JPS63225028A (ja) 1987-03-16 1987-03-16 搬送装置
US07/155,808 US4874273A (en) 1987-03-16 1988-02-16 Apparatus for holding and/or conveying articles by fluid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62058836A JPS63225028A (ja) 1987-03-16 1987-03-16 搬送装置

Publications (2)

Publication Number Publication Date
JPS63225028A JPS63225028A (ja) 1988-09-20
JPH0541527B2 true JPH0541527B2 (sv) 1993-06-23

Family

ID=13095737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62058836A Granted JPS63225028A (ja) 1987-03-16 1987-03-16 搬送装置

Country Status (1)

Country Link
JP (1) JPS63225028A (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261145A (ja) * 2001-03-02 2002-09-13 Kanayama Seiki Co Ltd ウェーハ取出・収納装置

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3923405A1 (de) * 1989-07-14 1991-01-24 Wacker Chemitronic Vorrichtung zum transportieren und positionieren von scheibenfoermigen werkstuecken, insbesondere halbleiterscheiben, und verfahren zur nasschemischen oberflaechenbehandlung derselben
JP4275769B2 (ja) 1998-06-19 2009-06-10 株式会社渡辺商行 基体の移載装置
JP4274601B2 (ja) * 1998-07-08 2009-06-10 昌之 都田 基体の移載装置及びその操作方法
JP2000072251A (ja) * 1998-08-31 2000-03-07 Watanabe Shoko:Kk 浮上搬送装置および浮上搬送システム
JP2000072250A (ja) * 1998-08-31 2000-03-07 Watanabe Shoko:Kk 浮上搬送装置用の気体噴出構造および噴出孔形成方法
TWI327128B (en) * 2003-07-08 2010-07-11 Daifuku Kk Plate-shaped work piece transporting apparatus
TWI295658B (en) * 2003-08-21 2008-04-11 Daifuku Kk Transporting apparatus
JP2005089043A (ja) * 2003-09-16 2005-04-07 Hitachi Zosen Corp 空気浮上式ベルトコンベヤ
JP2005340399A (ja) * 2004-05-26 2005-12-08 Hitachi Zosen Corp ガラス基板の作業台装置
JP4830339B2 (ja) * 2005-04-27 2011-12-07 株式会社Ｉｈｉ 搬送装置
KR100706534B1 (ko) 2006-02-14 2007-04-13 (주)넥스트인스트루먼트 디스플레이 패널용 반송장치
JP2008039408A (ja) * 2006-08-01 2008-02-21 Justem:Kk 厚み多点測定方法及びその装置
JP2011098430A (ja) * 2009-11-09 2011-05-19 Sharp Corp 位置決め装置
EP2355145A1 (en) * 2010-02-10 2011-08-10 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Pressure assisted self targeting assembly
JP2010173857A (ja) * 2010-03-16 2010-08-12 Watanabe Shoko:Kk 浮上搬送装置
JP2011219209A (ja) * 2010-04-07 2011-11-04 Ihi Corp 浮上搬送装置、方向転換装置、及び浮上ユニット
JP5755169B2 (ja) * 2012-03-19 2015-07-29 古河電気工業株式会社 搬送装置
KR101187006B1 (ko) * 2012-04-24 2012-09-28 이재성 대면적 패널용 반송플레이트
JP2015146886A (ja) * 2014-02-06 2015-08-20 沓間水産株式会社 配膳システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51106985A (ja) * 1971-01-13 1976-09-22 Motsuchi Ando Meriiuezaa Mashi Eakonbea

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51106985A (ja) * 1971-01-13 1976-09-22 Motsuchi Ando Meriiuezaa Mashi Eakonbea

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261145A (ja) * 2001-03-02 2002-09-13 Kanayama Seiki Co Ltd ウェーハ取出・収納装置

Also Published As

Publication number Publication date
JPS63225028A (ja) 1988-09-20

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