JPH0541527B2 - - Google Patents
Info
- Publication number
- JPH0541527B2 JPH0541527B2 JP5883687A JP5883687A JPH0541527B2 JP H0541527 B2 JPH0541527 B2 JP H0541527B2 JP 5883687 A JP5883687 A JP 5883687A JP 5883687 A JP5883687 A JP 5883687A JP H0541527 B2 JPH0541527 B2 JP H0541527B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- section
- gas
- resistance
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 69
- 238000001514 detection method Methods 0.000 claims description 9
- 230000009471 action Effects 0.000 description 47
- 238000007667 floating Methods 0.000 description 41
- 239000000428 dust Substances 0.000 description 31
- 230000000694 effects Effects 0.000 description 13
- 230000007246 mechanism Effects 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 238000005452 bending Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000005339 levitation Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62058836A JPS63225028A (ja) | 1987-03-16 | 1987-03-16 | 搬送装置 |
| US07/155,808 US4874273A (en) | 1987-03-16 | 1988-02-16 | Apparatus for holding and/or conveying articles by fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62058836A JPS63225028A (ja) | 1987-03-16 | 1987-03-16 | 搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63225028A JPS63225028A (ja) | 1988-09-20 |
| JPH0541527B2 true JPH0541527B2 (ko) | 1993-06-23 |
Family
ID=13095737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62058836A Granted JPS63225028A (ja) | 1987-03-16 | 1987-03-16 | 搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63225028A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002261145A (ja) * | 2001-03-02 | 2002-09-13 | Kanayama Seiki Co Ltd | ウェーハ取出・収納装置 |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3923405A1 (de) * | 1989-07-14 | 1991-01-24 | Wacker Chemitronic | Vorrichtung zum transportieren und positionieren von scheibenfoermigen werkstuecken, insbesondere halbleiterscheiben, und verfahren zur nasschemischen oberflaechenbehandlung derselben |
| JP4275769B2 (ja) | 1998-06-19 | 2009-06-10 | 株式会社渡辺商行 | 基体の移載装置 |
| JP4274601B2 (ja) * | 1998-07-08 | 2009-06-10 | 昌之 都田 | 基体の移載装置及びその操作方法 |
| JP2000072250A (ja) * | 1998-08-31 | 2000-03-07 | Watanabe Shoko:Kk | 浮上搬送装置用の気体噴出構造および噴出孔形成方法 |
| JP2000072251A (ja) * | 1998-08-31 | 2000-03-07 | Watanabe Shoko:Kk | 浮上搬送装置および浮上搬送システム |
| TWI327128B (en) * | 2003-07-08 | 2010-07-11 | Daifuku Kk | Plate-shaped work piece transporting apparatus |
| TWI295658B (en) * | 2003-08-21 | 2008-04-11 | Daifuku Kk | Transporting apparatus |
| JP2005089043A (ja) * | 2003-09-16 | 2005-04-07 | Hitachi Zosen Corp | 空気浮上式ベルトコンベヤ |
| JP2005340399A (ja) * | 2004-05-26 | 2005-12-08 | Hitachi Zosen Corp | ガラス基板の作業台装置 |
| JP4830339B2 (ja) * | 2005-04-27 | 2011-12-07 | 株式会社Ｉｈｉ | 搬送装置 |
| KR100706534B1 (ko) | 2006-02-14 | 2007-04-13 | (주)넥스트인스트루먼트 | 디스플레이 패널용 반송장치 |
| JP2008039408A (ja) * | 2006-08-01 | 2008-02-21 | Justem:Kk | 厚み多点測定方法及びその装置 |
| JP2011098430A (ja) * | 2009-11-09 | 2011-05-19 | Sharp Corp | 位置決め装置 |
| EP2355145A1 (en) * | 2010-02-10 | 2011-08-10 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Pressure assisted self targeting assembly |
| JP2010173857A (ja) * | 2010-03-16 | 2010-08-12 | Watanabe Shoko:Kk | 浮上搬送装置 |
| JP2011219209A (ja) * | 2010-04-07 | 2011-11-04 | Ihi Corp | 浮上搬送装置、方向転換装置、及び浮上ユニット |
| JP5755169B2 (ja) * | 2012-03-19 | 2015-07-29 | 古河電気工業株式会社 | 搬送装置 |
| KR101187006B1 (ko) * | 2012-04-24 | 2012-09-28 | 이재성 | 대면적 패널용 반송플레이트 |
| JP2015146886A (ja) * | 2014-02-06 | 2015-08-20 | 沓間水産株式会社 | 配膳システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51106985A (ja) * | 1971-01-13 | 1976-09-22 | Motsuchi Ando Meriiuezaa Mashi | Eakonbea |
-
1987
- 1987-03-16 JP JP62058836A patent/JPS63225028A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51106985A (ja) * | 1971-01-13 | 1976-09-22 | Motsuchi Ando Meriiuezaa Mashi | Eakonbea |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002261145A (ja) * | 2001-03-02 | 2002-09-13 | Kanayama Seiki Co Ltd | ウェーハ取出・収納装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63225028A (ja) | 1988-09-20 |
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