JPH0531301B2 - - Google Patents

Info

Publication number
JPH0531301B2
JPH0531301B2 JP58083045A JP8304583A JPH0531301B2 JP H0531301 B2 JPH0531301 B2 JP H0531301B2 JP 58083045 A JP58083045 A JP 58083045A JP 8304583 A JP8304583 A JP 8304583A JP H0531301 B2 JPH0531301 B2 JP H0531301B2
Authority
JP
Japan
Prior art keywords
layer
film
forming
opening
organic polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58083045A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59208748A (ja
Inventor
Hideaki Takahashi
Ginjiro Kanbara
Kenji Mitsui
Tooru Ookuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP8304583A priority Critical patent/JPS59208748A/ja
Publication of JPS59208748A publication Critical patent/JPS59208748A/ja
Publication of JPH0531301B2 publication Critical patent/JPH0531301B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP8304583A 1983-05-12 1983-05-12 半導体装置の製造方法 Granted JPS59208748A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8304583A JPS59208748A (ja) 1983-05-12 1983-05-12 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8304583A JPS59208748A (ja) 1983-05-12 1983-05-12 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59208748A JPS59208748A (ja) 1984-11-27
JPH0531301B2 true JPH0531301B2 (enExample) 1993-05-12

Family

ID=13791227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8304583A Granted JPS59208748A (ja) 1983-05-12 1983-05-12 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59208748A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100712487B1 (ko) * 2000-09-29 2007-04-27 삼성전자주식회사 접촉 저항을 줄일 수 있는 비아홀 플러그 및 그 형성 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4367119A (en) * 1980-08-18 1983-01-04 International Business Machines Corporation Planar multi-level metal process with built-in etch stop

Also Published As

Publication number Publication date
JPS59208748A (ja) 1984-11-27

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