JPH0528498B2 - - Google Patents
Info
- Publication number
- JPH0528498B2 JPH0528498B2 JP27966685A JP27966685A JPH0528498B2 JP H0528498 B2 JPH0528498 B2 JP H0528498B2 JP 27966685 A JP27966685 A JP 27966685A JP 27966685 A JP27966685 A JP 27966685A JP H0528498 B2 JPH0528498 B2 JP H0528498B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- reversing
- holding device
- input side
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000011084 recovery Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27966685A JPS62140957A (ja) | 1985-12-11 | 1985-12-11 | カセツトの移替装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27966685A JPS62140957A (ja) | 1985-12-11 | 1985-12-11 | カセツトの移替装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62140957A JPS62140957A (ja) | 1987-06-24 |
JPH0528498B2 true JPH0528498B2 (enrdf_load_stackoverflow) | 1993-04-26 |
Family
ID=17614167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27966685A Granted JPS62140957A (ja) | 1985-12-11 | 1985-12-11 | カセツトの移替装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62140957A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5293179A (en) * | 1990-11-20 | 1994-03-08 | Canon Kabushiki Kaisha | Work convey method and apparatus |
-
1985
- 1985-12-11 JP JP27966685A patent/JPS62140957A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62140957A (ja) | 1987-06-24 |
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