JPS62140957A - カセツトの移替装置 - Google Patents

カセツトの移替装置

Info

Publication number
JPS62140957A
JPS62140957A JP27966685A JP27966685A JPS62140957A JP S62140957 A JPS62140957 A JP S62140957A JP 27966685 A JP27966685 A JP 27966685A JP 27966685 A JP27966685 A JP 27966685A JP S62140957 A JPS62140957 A JP S62140957A
Authority
JP
Japan
Prior art keywords
cassette
side reversing
holding device
reversing device
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27966685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528498B2 (enrdf_load_stackoverflow
Inventor
Tatsuya Ikeda
辰弥 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP27966685A priority Critical patent/JPS62140957A/ja
Publication of JPS62140957A publication Critical patent/JPS62140957A/ja
Publication of JPH0528498B2 publication Critical patent/JPH0528498B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Registering Or Overturning Sheets (AREA)
JP27966685A 1985-12-11 1985-12-11 カセツトの移替装置 Granted JPS62140957A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27966685A JPS62140957A (ja) 1985-12-11 1985-12-11 カセツトの移替装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27966685A JPS62140957A (ja) 1985-12-11 1985-12-11 カセツトの移替装置

Publications (2)

Publication Number Publication Date
JPS62140957A true JPS62140957A (ja) 1987-06-24
JPH0528498B2 JPH0528498B2 (enrdf_load_stackoverflow) 1993-04-26

Family

ID=17614167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27966685A Granted JPS62140957A (ja) 1985-12-11 1985-12-11 カセツトの移替装置

Country Status (1)

Country Link
JP (1) JPS62140957A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293179A (en) * 1990-11-20 1994-03-08 Canon Kabushiki Kaisha Work convey method and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293179A (en) * 1990-11-20 1994-03-08 Canon Kabushiki Kaisha Work convey method and apparatus

Also Published As

Publication number Publication date
JPH0528498B2 (enrdf_load_stackoverflow) 1993-04-26

Similar Documents

Publication Publication Date Title
JPH0355983B2 (enrdf_load_stackoverflow)
US3272350A (en) Method and apparatus for semiconductor wafer handling
TWI262165B (en) Device and method for transporting wafer-shaped articles
WO1987006566A1 (en) Automatic wafer loading method and apparatus
JPH03125453A (ja) 半導体ウエハ移送装置
JPH0159352B2 (enrdf_load_stackoverflow)
JPS62140957A (ja) カセツトの移替装置
JP3446158B2 (ja) 基板搬送処理装置
JPS62136428A (ja) 角形マスク基板移送機構
JP6051197B2 (ja) マルチプルアームを備えた搬送ロボット
JPS6233437A (ja) 半導体ウエハの整列装置
CN221792724U (zh) 一种用于半导体工艺设备的双臂传送机器人
JP2651859B2 (ja) 半導体ウエハー処理装置
JPS5830124A (ja) 気相成長装置用ウエハ−立替装置
TW531482B (en) Single-piece type conveyor for semiconductor wafer and liquid-crystal substrate and robot
JP2001031212A (ja) 自動倉庫
JP3024005B2 (ja) 搬送方法及び搬送装置
JPH04361551A (ja) 半導体ウエハの搬送装置
JPH02184045A (ja) 並べ換え方法及び並べ換え装置
JPS61228647A (ja) ウエハ並べ換え装置
JPS61247047A (ja) 円板状部材の整列装置
JPS61198644A (ja) ウエハの移し替え方法
JPH0424915A (ja) 搬送装置
JPS63122234A (ja) ウエハ移し替え装置
JPS62188335A (ja) 半導体ウエハの移し替え装置