JPH0527059B2 - - Google Patents

Info

Publication number
JPH0527059B2
JPH0527059B2 JP58223933A JP22393383A JPH0527059B2 JP H0527059 B2 JPH0527059 B2 JP H0527059B2 JP 58223933 A JP58223933 A JP 58223933A JP 22393383 A JP22393383 A JP 22393383A JP H0527059 B2 JPH0527059 B2 JP H0527059B2
Authority
JP
Japan
Prior art keywords
level
measured
output signal
light
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58223933A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60114749A (ja
Inventor
Hideyuki Matsubara
Toshio Hashimoto
Kenichi Konno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP22393383A priority Critical patent/JPS60114749A/ja
Publication of JPS60114749A publication Critical patent/JPS60114749A/ja
Publication of JPH0527059B2 publication Critical patent/JPH0527059B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP22393383A 1983-11-28 1983-11-28 表面欠陥計測装置 Granted JPS60114749A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22393383A JPS60114749A (ja) 1983-11-28 1983-11-28 表面欠陥計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22393383A JPS60114749A (ja) 1983-11-28 1983-11-28 表面欠陥計測装置

Publications (2)

Publication Number Publication Date
JPS60114749A JPS60114749A (ja) 1985-06-21
JPH0527059B2 true JPH0527059B2 (enrdf_load_stackoverflow) 1993-04-20

Family

ID=16805979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22393383A Granted JPS60114749A (ja) 1983-11-28 1983-11-28 表面欠陥計測装置

Country Status (1)

Country Link
JP (1) JPS60114749A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713340A (en) * 1980-06-27 1982-01-23 Hitachi Ltd Inspection apparatus for surface defect
JPS5862543A (ja) * 1981-10-09 1983-04-14 Nippon Kogaku Kk <Nikon> 欠陥検査装置

Also Published As

Publication number Publication date
JPS60114749A (ja) 1985-06-21

Similar Documents

Publication Publication Date Title
JPS603537A (ja) ゴム・プラスチック用引張試験機
FR2529342A1 (fr) Procede et dispositif de controle sonique de pieces
JPH0527059B2 (enrdf_load_stackoverflow)
JP2008164532A (ja) 表面検査装置および表面検査方法
JPH0527060B2 (enrdf_load_stackoverflow)
JP2564310B2 (ja) 外観検査装置
JPH071233B2 (ja) 表面欠陥計測装置
JP3168480B2 (ja) 異物検査方法、および異物検査装置
CN114047190A (zh) 一种表面缺陷的检测装置及检测方法
JP3249925B2 (ja) 線条体の表面欠陥検査装置
JPS5944578B2 (ja) 透明な被検査物の欠陥検出方法
RU2035721C1 (ru) Способ контроля прозрачности плоских светопропускающих материалов
JP2000111484A (ja) ウェーハ欠陥検査装置
JPH08193955A (ja) 板ガラスの欠点検査方法
JPH0682393A (ja) 被覆欠陥検出装置および方法
JPS6344151A (ja) 外観検査装置
JPS62235511A (ja) 表面状態検査装置
KR20060009674A (ko) 반도체 웨이퍼 표면 검사장치 및 방법
JPH08271213A (ja) エッジ検出器
JPS6028240A (ja) 半導体の電気的特性を測定する装置
JPH0314123B2 (enrdf_load_stackoverflow)
JPH0326447Y2 (enrdf_load_stackoverflow)
JPH0587677A (ja) ビームスプリツタ自動検査システム
JPH0333001Y2 (enrdf_load_stackoverflow)
JPS6071933A (ja) レンズ欠陥検査装置