JPS60114749A - 表面欠陥計測装置 - Google Patents

表面欠陥計測装置

Info

Publication number
JPS60114749A
JPS60114749A JP22393383A JP22393383A JPS60114749A JP S60114749 A JPS60114749 A JP S60114749A JP 22393383 A JP22393383 A JP 22393383A JP 22393383 A JP22393383 A JP 22393383A JP S60114749 A JPS60114749 A JP S60114749A
Authority
JP
Japan
Prior art keywords
level
measured
output signal
light
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22393383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527059B2 (enrdf_load_stackoverflow
Inventor
Hideyuki Matsubara
秀之 松原
Toshio Hashimoto
橋本　利夫
Kenichi Konno
今野　憲一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP22393383A priority Critical patent/JPS60114749A/ja
Publication of JPS60114749A publication Critical patent/JPS60114749A/ja
Publication of JPH0527059B2 publication Critical patent/JPH0527059B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP22393383A 1983-11-28 1983-11-28 表面欠陥計測装置 Granted JPS60114749A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22393383A JPS60114749A (ja) 1983-11-28 1983-11-28 表面欠陥計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22393383A JPS60114749A (ja) 1983-11-28 1983-11-28 表面欠陥計測装置

Publications (2)

Publication Number Publication Date
JPS60114749A true JPS60114749A (ja) 1985-06-21
JPH0527059B2 JPH0527059B2 (enrdf_load_stackoverflow) 1993-04-20

Family

ID=16805979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22393383A Granted JPS60114749A (ja) 1983-11-28 1983-11-28 表面欠陥計測装置

Country Status (1)

Country Link
JP (1) JPS60114749A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713340A (en) * 1980-06-27 1982-01-23 Hitachi Ltd Inspection apparatus for surface defect
JPS5862543A (ja) * 1981-10-09 1983-04-14 Nippon Kogaku Kk <Nikon> 欠陥検査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713340A (en) * 1980-06-27 1982-01-23 Hitachi Ltd Inspection apparatus for surface defect
JPS5862543A (ja) * 1981-10-09 1983-04-14 Nippon Kogaku Kk <Nikon> 欠陥検査装置

Also Published As

Publication number Publication date
JPH0527059B2 (enrdf_load_stackoverflow) 1993-04-20

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