JPH0333000Y2 - - Google Patents
Info
- Publication number
- JPH0333000Y2 JPH0333000Y2 JP7843584U JP7843584U JPH0333000Y2 JP H0333000 Y2 JPH0333000 Y2 JP H0333000Y2 JP 7843584 U JP7843584 U JP 7843584U JP 7843584 U JP7843584 U JP 7843584U JP H0333000 Y2 JPH0333000 Y2 JP H0333000Y2
- Authority
- JP
- Japan
- Prior art keywords
- data
- measurement data
- scanning point
- workpiece
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 55
- 230000007547 defect Effects 0.000 claims description 41
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 230000002950 deficient Effects 0.000 claims description 12
- 230000015654 memory Effects 0.000 description 20
- 238000010586 diagram Methods 0.000 description 10
- 230000001186 cumulative effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7843584U JPS60189841U (ja) | 1984-05-28 | 1984-05-28 | 表面欠陥計測装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7843584U JPS60189841U (ja) | 1984-05-28 | 1984-05-28 | 表面欠陥計測装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60189841U JPS60189841U (ja) | 1985-12-16 |
| JPH0333000Y2 true JPH0333000Y2 (enrdf_load_stackoverflow) | 1991-07-12 |
Family
ID=30622412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7843584U Granted JPS60189841U (ja) | 1984-05-28 | 1984-05-28 | 表面欠陥計測装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60189841U (enrdf_load_stackoverflow) |
-
1984
- 1984-05-28 JP JP7843584U patent/JPS60189841U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60189841U (ja) | 1985-12-16 |
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