JPH0314123B2 - - Google Patents
Info
- Publication number
- JPH0314123B2 JPH0314123B2 JP15616183A JP15616183A JPH0314123B2 JP H0314123 B2 JPH0314123 B2 JP H0314123B2 JP 15616183 A JP15616183 A JP 15616183A JP 15616183 A JP15616183 A JP 15616183A JP H0314123 B2 JPH0314123 B2 JP H0314123B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- level
- measured
- photoelectric conversion
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005540 biological transmission Effects 0.000 claims description 31
- 230000007547 defect Effects 0.000 claims description 30
- 238000006243 chemical reaction Methods 0.000 claims description 21
- 238000005259 measurement Methods 0.000 claims description 9
- 230000002950 deficient Effects 0.000 claims description 7
- 238000012935 Averaging Methods 0.000 description 11
- 239000000428 dust Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15616183A JPS6047908A (ja) | 1983-08-26 | 1983-08-26 | 表面欠陥計測装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15616183A JPS6047908A (ja) | 1983-08-26 | 1983-08-26 | 表面欠陥計測装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6047908A JPS6047908A (ja) | 1985-03-15 |
| JPH0314123B2 true JPH0314123B2 (enrdf_load_stackoverflow) | 1991-02-26 |
Family
ID=15621678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15616183A Granted JPS6047908A (ja) | 1983-08-26 | 1983-08-26 | 表面欠陥計測装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6047908A (enrdf_load_stackoverflow) |
-
1983
- 1983-08-26 JP JP15616183A patent/JPS6047908A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6047908A (ja) | 1985-03-15 |
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