JPH05226269A - 半導体ウエーハにチタンケイ化物を蒸着させるための化学蒸着技術 - Google Patents
半導体ウエーハにチタンケイ化物を蒸着させるための化学蒸着技術Info
- Publication number
- JPH05226269A JPH05226269A JP4298848A JP29884892A JPH05226269A JP H05226269 A JPH05226269 A JP H05226269A JP 4298848 A JP4298848 A JP 4298848A JP 29884892 A JP29884892 A JP 29884892A JP H05226269 A JPH05226269 A JP H05226269A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- chemical vapor
- deposition method
- silane
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 53
- 238000005229 chemical vapour deposition Methods 0.000 title claims description 52
- 239000004065 semiconductor Substances 0.000 title claims description 11
- 229910021341 titanium silicide Inorganic materials 0.000 title description 2
- 238000007740 vapor deposition Methods 0.000 title description 2
- 239000010936 titanium Substances 0.000 claims abstract description 51
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 32
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910000077 silane Inorganic materials 0.000 claims abstract description 27
- 239000012159 carrier gas Substances 0.000 claims abstract description 23
- 229910052756 noble gas Inorganic materials 0.000 claims abstract description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 239000002243 precursor Substances 0.000 claims description 33
- 229910008484 TiSi Inorganic materials 0.000 claims description 30
- 239000007789 gas Substances 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 238000000137 annealing Methods 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 25
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- 229910021332 silicide Inorganic materials 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- IRIIKYVSZMJVNX-UHFFFAOYSA-N 2,4,6-tris(2-methylaziridin-1-yl)-1,3,5-triazine Chemical compound CC1CN1C1=NC(N2C(C2)C)=NC(N2C(C2)C)=N1 IRIIKYVSZMJVNX-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76855—After-treatment introducing at least one additional element into the layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/147—Silicides
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Abstract
に形成する。 【構成】 ウエーハ50を反応器の中に設け、選択した
量のガス状のTi(NR2)4前駆体、ガス状のシラン及
び少なくとも1種の貴ガスを含むキャリアガスをその中
に好ましくは約50〜2000sccmの割合で注入
し、Ti(NR2)4(ここで、RはHと炭素含有基とか
らなる群から選択する)のシランに対する体積比が1:
300から1:10となる量のTi(NR2)4前駆体及
びシランを供給し、TiSix及びTiNの混合物から
成る膜を上記ウエーハに蒸着させるに効果的な選択され
た圧力、好ましくは約150〜100トルと温度、好ま
しくは約100〜500℃に上記反応器を維持して、上
記前駆体とシランとを反応させる。
Description
処理における接触技術に関し、より詳細には、コンタク
トオープニング(contact opening)の中にケイ化物の
層を設けて接触抵抗を減少させる技術に関する。
基板の中に形成されかつ隔離されたアクティブ・デバイ
ス領域に電気的な接触を形成することが必要である。ア
クティブ・デバイス領域は、高い導電性を有するパスす
なわち線によって接続され、これらパスすなわち線は、
基板の表面を覆う絶縁材料の上に形成される。導電性の
パスとアクティブ・デバイス領域との間の電気的な接続
を行うために、絶縁体に開口を設け、導電性の膜が所望
の領域に接触できるようにする。そのような開口は一般
に、コンタクトオープニング又は単に「コンタクト」と
呼ばれている。
ミクロンに近づくに従って、通常のプロセスパラメータ
は、アクティブ領域すなわちエリアと導電層との間の大
きな抵抗に耐えられなくなっている。そのような接触抵
抗を減少させるための主要な方法は、導電性の膜を施し
て導電性のランナを形成する前に、アクティブ領域の上
に金属ケイ化物を形成することである。形成される一般
的な金属ケイ化物材料はTiSixであり、多くの場合
においてxは「2」である。TiSix材料は、コンタ
クトオープニングの中のアクティブ領域に接触するウエ
ーハの上にチタンの薄層を最初に施すことにより形成さ
れる。その後、ウエーハを高温で焼きなます。これによ
り、チタンがアクティブ領域のケイ素と反応し、TiS
ixを形成する。そのようなプロセスは、チタン金属が
ケイ素のアクティブ領域に接触する箇所でのみTiSi
xが形成されるので、自己整合すなわちセルフ・アライ
ニングと呼ばれる。施されたチタン膜は、絶縁性でかつ
実質的に無反応性の総てのSiO2層の上に延在する。
ウエーハ10が図示されており、この半導体ウエーハ1
0はバルク基板12を備え、該バルク基板はこのバルク
基板に形成されたアクティブ領域14を有している。多
くの場合においてはBPSGの形態のSiO2である絶
縁材料から成る上側層16が、基板12の上に設けら
れ、かつ適宜にエッチングアクティブ領域14に対する
コンタクトオープニング18を形成している。チタンの
薄層20が、絶縁層16の上に施されてアクティブ領域
14に接触している。高温のアニールの工程をアルゴン
等の不活性雰囲気中で行い、チタン金属に接触するアク
ティブ領域14を反応させてTiSixを形成し、これ
により、図示のTiSix領域22を形成する。領域1
4に接触していない層20の残りの部分は、下側のSi
O2絶縁層16とは実質的に反応せず、従ってチタン金
属元素の状態のままである。
ケイ化物領域22の上に施される。TiSixに対する
タングステンの接着力は小さい。この問題を解消するた
めに、一般にはTiNから形成される中間層が、ケイ化
物領域22とタングステンの上側層との間に介挿され
る。TiNは、金属タングステン層に対する「糊付け
(glue)層」と一般に呼ばれている。そのような層は、
窒素が支配的である雰囲気中でチタン層20と共にウエ
ーハをアニールすることにより形成される。そのような
条件の下では、アクティブ領域14の上にある層20の
下側の部分がケイ素と反応してTiSixを形成し、一
方接触領域14の上のチタン層の上側の部分並びに絶縁
材料16の上の層20の残りの部分は雰囲気中の窒素と
反応してTiNを形成する。この時点から、形成される
べきランナの支配的な導電材料が施される。形成される
ケイ化物領域22は高い導電性を有し、ケイ化物領域2
2が存在しない場合に比較して、ランナとアクティブ領
域14との間に低い電気抵抗を与える。上述の如きケイ
化物特にチタンケイ化物の形成は、「Silicon Processi
ng For TheVLSI Era, Vol.2-Process Integration」の
143−150ページにWolf外により述べられてい
る。
ンタクトオープニングがより深くかつ狭くなるに連れ
て、接触壁は垂直になり、大部分の金属堆積技術は、ア
クティブ領域14との適正な接触を形成する必要な工程
をカバーしきれなくなっている。そのような状態を図2
に示す。図2においては、基板12aのアクティブ領域
14aは、図1のアクティブ領域14よりもかなり小さ
く示されている。これに対応して、アクティブ領域14
aに対するかなり狭いコンタクトオープニング18aが
設けられ、これにより回路密度を極力大きくしている。
明らかなように、コンタクトオープニング18aのその
幅に対する深さの比は、図1のコンタクトオープニング
18の幅に対する深さの比よりも大きい。このような狭
くかつ高いアスペクト比(縦横比)のコンタクトオープ
ニング18aは、図示のように、層20aが領域14a
と十分に接触することができないようにする。従って、
望ましいTiSix及び電気的な接触が形成されない。
欠点を解消し、アクティブ領域14及び14aの上にT
iSixの領域を確実に形成することが望まれる。
器の中で半導体ウエーハの上に合致するTiSix相を
形成するための化学蒸着法において、ウエーハを反応器
の中に設ける段階と、選択した量のガス状のチタン有機
金属前駆体、ガス状のシラン及びキャリアガスを前記反
応器の中に注入する段階と、前記前駆体及びシランを反
応させ、TiSixから成る膜を前記ウエーハに蒸着さ
せるに効果的な選択された圧力及び選択された温度に前
記反応器を維持する段階とを備えることを特徴とする方
法を提供する。
ハの上に合致するTiSix相を形成するための化学蒸
着法において、ウエーハを反応器の中に設ける段階と、
選択した量のガス状のTi(NR2)4前駆体、ガス状の
シラン及びキャリアガスを前記反応器の中に注入し、前
記RをHと炭素含有基(radical)とから成る群から選
択し、Ti(NR2)4のシランに対する体積比が1:3
00から1:10となる量のTi(NR2)4前駆体及び
シランを供給し、前記キャリアガスの量を約50scc
mから約2000sccmとし、前記キャリアガスを少
なくとも1つの貴ガスから構成する段階と、前記前駆体
及びシランを反応させ、TiSix及びTiNの混合物
から成る膜を前記ウエーハに蒸着させるに効果的な選択
された圧力及び選択された温度に前記反応器を維持し、
前記記選択された温度を約100°Cから約500°C
とし、また前記選択された圧力を約150ミリトルから
約100トルとする段階とを備えることを特徴する化学
蒸着法も提供する。
実施例を説明する。
体ウエーハの上になじみやすいTiSix層を形成する
ための化学蒸着(CVD)方法が開示される。本方法
は、(a)ウエーハをCVD反応器の中に設ける段階
と、(b)選択した量のガス状チタン有機金属の前駆
体、ガス状シラン(SiH4)及びキャリアガスを反応
器に注入する段階と、(c)上記前駆体及びシランを反
応させウエーハ上にTiSixから成る蒸着膜を形成す
るために効果的な選択された圧力及び選択された温度に
上記反応器を維持する段階とを備える。
(NR2)4から本質的になり、ここにおいて、Rは、水
素(H)と、炭素を含む基とから成る群から選択され
る。その例としては、Ti(N(CH3)2)4及びTi
(N(C2H5)2)4がある。テトラジメチルアミド・チ
タンの略称であるTMATと一般に呼称されるTi(N
(CH3)2)4は、最も好ましいチタン有機金属前駆体
であると理解されている。
結合している有機金属前駆体の例である。そのような状
況において、前駆体の一部を転化してチタン窒化物を形
成し、これにより、蒸着された膜をチタン窒化物相及び
TiSi2相のほぼ均質な混合物とする。そのような状
況においては、蒸着された膜が、約80%のTiSix
及び20%のチタン窒化物を含むことが予期される。チ
タン窒化物は公知の拡散バリア材料であるので、そのよ
うな膜は、接触抵抗を減少させまた良好な拡散バリア特
性を維持するという両方の意味でより明確な利点をもた
らす。従って、別個のバリア層を必要とせず、従って時
間及び材料を節約できることが予想される。
+ TiSiyN1-y + 有機副生物 上式中、xは多くの場合において2であり、yは0から
1である。有機副生物は、キャリアガス及び未反応ガス
と共にほとんど排出され、蒸着された膜の問題となる程
の割合を構成しないものと予想される。
チタン有機金属前駆体のシランに対する体積比が1:3
00から1:10となるように選択されるのが好まし
く、約1:80であるのが最も好ましい。
の上の気体の分布を制御し、ウエーハ上に蒸着される膜
の良好な均一性を維持する。好ましいキャリアガスは、
ヘリウムあるいはアルゴン等の貴ガスであり、そのよう
なガスの好ましい流量は、約50sccm(1分間当た
りの標準状態における立方センチメートル)から約2,
000sccmである。
100トルであるのが好ましく、400ミリトルが最も
好ましい。そのような条件は一般に、低圧化学蒸着(L
PCVD)と呼ばれている。選択される温度は、約10
0°Cから約500°Cであるのが好ましく、400°
Cであるのが最も好ましい。
には、チタン有機金属前駆体の好ましい流量は約2sc
cmから約50sccmであり、SiH4の好ましい流
量は約100sccmから約2000sccmである。
約5sccmのチタン有機金属前駆体の流量、及び約4
00sccmのSiH4の流量が最も好ましい。上述の
如き条件におけるヘリウムあるいはアルゴンの流量は1
50sccmであるのが好ましく、温度及び圧力は40
0°C及び400ミリトルにそれぞれ維持される。その
ような条件においては、所望の膜は概算で、1分間当た
り約50オングストロームから約100オングストロー
ムの割合で蒸着される。蒸着された膜の好ましい厚み
は、約200オングストロームから約1000オングス
トロームである。
ハ50を示している。ウエーハ50はバルク基板52を
備えており、該バルク基板にはアクティブ領域54が形
成されている。BPSGが支配的である絶縁層56が設
けられ、かつエッチングされてコンタクトオープニング
58を形成している。上述の技術によって、TiSix
の層60が輪郭に合致して設けられ、領域54と極めて
良好に接触している。チタン有機金属前駆体がNに結合
している場合には、領域60もTiN型の相を備える。
膜をアニールし、アクティブ領域54からケイ素を膜に
導入し、これにより、より良好な相互接続を行わせて接
触抵抗を低下させるのが望ましい。そのようなアニール
を行うための好ましい雰囲気は、N2又はNH3等の窒素
を含む雰囲気である。その後導電層を施してエッチング
を行うことができる。
ウエーハの概略的な断面図である。
別のウエーハの概略的な断面図である。
略的な断面図である。
Claims (28)
- 【請求項1】 化学蒸着反応器の中で半導体ウエーハの
上に合致するTiSix相を形成するための化学蒸着法
において、 ウエーハを反応器の中に設ける段階と、 選択した量のガス状のチタン有機金属前駆体、ガス状の
シラン及びキャリアガスを前記反応器の中に注入する段
階と、 前記前駆体及びシランを反応させ、TiSixから成る
膜を前記ウエーハに蒸着させるに効果的な選択された圧
力及び選択された温度に前記反応器を維持する段階とを
備える化学蒸着法。 - 【請求項2】 請求項1の化学蒸着法において、チタン
有機金属前駆体のシランに対する容積比が1:300か
ら1:10になるように、前記気体の量を選択すること
を特徴とする化学蒸着法。 - 【請求項3】 請求項2の化学蒸着法において、チタン
有機金属前駆体のシランに対する容積比が1:80にな
るように、前記気体の量を選択することを特徴とする化
学蒸着法。 - 【請求項4】 請求項1の化学蒸着法において、前記選
択された温度が約100°Cから約500°Cであり、
また前記選択された圧力が約150ミリトルから約10
0トルであることを特徴とする化学蒸着法。 - 【請求項5】 請求項4の化学蒸着法において、前記選
択された温度が約400°Cであり、また前記選択され
た圧力が約400ミリトルであることを特徴とする化学
蒸着法。 - 【請求項6】 請求項1の化学蒸着法において、前記キ
ャリアガスが、少なくとも1つの貴ガスを含み、前記キ
ャリアガスの量が約50sccmから約2000scc
mであることを特徴とする化学蒸着法。 - 【請求項7】 請求項1の化学蒸着法において、前記気
体の量は、チタン有機金属前駆体のシランに対する体積
比が1:300から1:10になるように選択され、前
記キャリアガスは、約50sccmから約2000sc
cmの流量で供給され、 前記選択された温度が約100°Cから約500°Cで
あり、前記選択された圧力が約150ミリトルから約1
00トルであることを特徴とする化学蒸着法。 - 【請求項8】 請求項1の化学蒸着法において、前記反
応器の中の気体が反応し、前記ウエーハにTiSix及
びTiNの混合物から成る膜を蒸着させることを特徴と
する化学蒸着法。 - 【請求項9】 請求項1の化学蒸着法において、前記蒸
着されたTiSixの膜をアニールして前記ウエーハか
らケイ素を取り込み、これにより接触抵抗を低下させる
段階を更に備えることを特徴とする化学蒸着法。 - 【請求項10】 請求項9の化学蒸着法において、前記
アニールを、N2又はNH3を支配的に含む雰囲気中で実
行することを特徴とする化学蒸着法。 - 【請求項11】 請求項1の化学蒸着法において、前記
チタン有機金属前駆体がTi(NR2)4から本質的にな
り、Rが、Hと炭素含有基とから成る群から選択される
ことを特徴とする化学蒸着法。 - 【請求項12】 請求項11の化学蒸着法において、チ
タン有機金属前駆体のシランに対する体積比が1:30
0から1:10になるように、前記気体の量を選択する
ことを特徴とする化学蒸着法。 - 【請求項13】 請求項11の化学蒸着法において、前
記選択された温度が約400°Cであり、また前記選択
された圧力が約400ミリトルであることを特徴とする
化学蒸着法。 - 【請求項14】 請求項11の化学蒸着法において、チ
タン有機金属前駆体のシランに対する体積比が1:30
0から1:10になるように、前記気体の量が選択さ
れ、前記選択された温度が約400°Cであり、また前
記選択された圧力が約400ミリトルであることを特徴
とする化学蒸着法。 - 【請求項15】 請求項11の化学蒸着法において、前
記キャリアガスが、少なくとも1つの貴ガスを含み、前
記キャリアガスの量が約50sccmから約2000s
ccmであることを特徴とする化学蒸着法。 - 【請求項16】 請求項11の化学蒸着法において、前
記チタン有機金属前駆体がTi(N(C2H5)2)4から
成ることを特徴とする化学蒸着法。 - 【請求項17】 請求項11の化学蒸着法において、前
記蒸着されたTiSixの膜をアニールして前記ウエー
ハからケイ素を取り込み、これにより接触抵抗を低下さ
せる段階を更に備えることを特徴とする化学蒸着法。 - 【請求項18】 請求項1の化学蒸着法において、前記
チタン有機金属前駆体がTi(N(CH3)2)4から成
ることを特徴とする化学蒸着法。 - 【請求項19】 請求項18の化学蒸着法において、チ
タン有機金属前駆体のシランに対する容積比が1:30
0から1:10になるように、前記気体の量を選択する
ことを特徴とする化学蒸着法。 - 【請求項20】 請求項18の化学蒸着法において、前
記選択された温度が約400°Cであり、また前記選択
された圧力が約400ミリトルであることを特徴とする
化学蒸着法。 - 【請求項21】 請求項18の化学蒸着法において、チ
タン有機金属前駆体のシランに対する体積比が1:30
0から1:10になるように、前記気体の量が選択さ
れ、前記選択された温度が約400°Cであり、また前
記選択された圧力が約400ミリトルであることを特徴
とする化学蒸着法。 - 【請求項22】 請求項18の化学蒸着法において、前
記キャリアガスが、少なくとも1つの貴ガスを含み、前
記キャリアガスの量が約50sccmから約2000s
ccmであることを特徴とする化学蒸着法。 - 【請求項23】 請求項18の化学蒸着法において、前
記蒸着されたTiSixの膜をアニールして前記ウエー
ハからケイ素を取り込み、これにより接触抵抗を低下さ
せる段階を更に備えることを特徴とする化学蒸着法。 - 【請求項24】 化学蒸着反応器の中で半導体ウエーハ
の上に合致するTiSix相を形成するための化学蒸着
法において、 ウエーハを反応器の中に設ける段階と、 選択した量のガス状のTi(NR2)4前駆体、ガス状の
シラン及びキャリアガスを前記反応器の中に注入し、前
記RをHと炭素含有基とから成る群から選択し、Ti
(NR2)4のシランに対する体積比が1:300から
1:10となる量のTi(NR2)4前駆体及びシランを
供給し、前記キャリアガスの量を約50sccmから約
2000sccmとし、前記キャリアガスを少なくとも
1つの貴ガスを含む段階と、 前記前駆体及びシランを反応させ、TiSix及びTi
Nの混合物から成る膜を前記ウエーハに蒸着させるに効
果的な選択された圧力及び選択された温度に前記反応器
を維持し、前記記選択された温度を約100°Cから約
500°Cとし、また前記選択された圧力を約150ミ
リトルから約100トルとする段階とを備える化学蒸着
法。 - 【請求項25】 請求項24の化学蒸着法において、T
i(NR2)4前駆体のシランに対する体積比が1:80
になるように前記気体の量を選択し、前記キャリアガス
の量が約50sccmから約2000sccmとするこ
とを特徴とする化学蒸着法。 - 【請求項26】 請求項24の化学蒸着法において、前
記蒸着されたTiSixの膜をアニールして前記ウエー
ハからケイ素を取り込み、これにより接触抵抗を低下さ
せる段階を更に備えることを特徴とする化学蒸着法。 - 【請求項27】 請求項24の化学蒸着法において、前
記Ti(NR2)4前駆体がTi(N(CH3)2)4から
本質的に成ることを特徴とする化学蒸着法。 - 【請求項28】 請求項27の化学蒸着法において、T
i(NR2)4前駆体のシランに対する体積比が1:80
になるように前記気体の量を選択し、前記キャリアガス
の量が約50sccmから約2000sccmとするこ
とを特徴とする化学蒸着法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US789585 | 1991-11-08 | ||
US07/789,585 US5278100A (en) | 1991-11-08 | 1991-11-08 | Chemical vapor deposition technique for depositing titanium silicide on semiconductor wafers |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05226269A true JPH05226269A (ja) | 1993-09-03 |
JPH0773102B2 JPH0773102B2 (ja) | 1995-08-02 |
Family
ID=25148080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4298848A Expired - Fee Related JPH0773102B2 (ja) | 1991-11-08 | 1992-11-09 | 半導体ウエーハにチタンケイ化物を蒸着させるための化学蒸着技術 |
Country Status (3)
Country | Link |
---|---|
US (1) | US5278100A (ja) |
JP (1) | JPH0773102B2 (ja) |
DE (1) | DE4237587C2 (ja) |
Families Citing this family (523)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5384289A (en) * | 1993-06-17 | 1995-01-24 | Micron Semiconductor, Inc. | Reductive elimination chemical vapor deposition processes utilizing organometallic precursor compounds in semiconductor wafer processing |
CA2198243C (en) | 1994-08-22 | 2007-06-26 | Cesar Z. Lina | Wound drainage equipment |
EP0732731A3 (en) * | 1995-03-13 | 1997-10-08 | Applied Materials Inc | Treatment of a layer of titanium nitride to improve resistance to high temperatures |
GB9523253D0 (en) * | 1995-11-14 | 1996-01-17 | Mediscus Prod Ltd | Portable wound treatment apparatus |
US5846881A (en) * | 1995-12-28 | 1998-12-08 | Micron Technology, Inc. | Low cost DRAM metallization |
US5730835A (en) * | 1996-01-31 | 1998-03-24 | Micron Technology, Inc. | Facet etch for improved step coverage of integrated circuit contacts |
US5728619A (en) * | 1996-03-20 | 1998-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Selective reactive Ion etch (RIE) method for forming a narrow line-width high aspect ratio via through an integrated circuit layer |
US5760434A (en) * | 1996-05-07 | 1998-06-02 | Micron Technology, Inc. | Increased interior volume for integrated memory cell |
US6313035B1 (en) * | 1996-05-31 | 2001-11-06 | Micron Technology, Inc. | Chemical vapor deposition using organometallic precursors |
US5856236A (en) | 1996-06-14 | 1999-01-05 | Micron Technology, Inc. | Method of depositing a smooth conformal aluminum film on a refractory metal nitride layer |
US5916634A (en) * | 1996-10-01 | 1999-06-29 | Sandia Corporation | Chemical vapor deposition of W-Si-N and W-B-N |
KR19980060611A (ko) * | 1996-12-31 | 1998-10-07 | 김영환 | 티타늄 실리사이드 제조방법 |
KR100229439B1 (ko) * | 1997-01-15 | 1999-11-01 | 정명식 | 반도체 소자용 확산방지막 제조 방법 |
US5702972A (en) * | 1997-01-27 | 1997-12-30 | Taiwan Semiconductor Manufacturing Company Ltd. | Method of fabricating MOSFET devices |
US5911113A (en) | 1997-03-18 | 1999-06-08 | Applied Materials, Inc. | Silicon-doped titanium wetting layer for aluminum plug |
US7759538B2 (en) * | 1997-05-27 | 2010-07-20 | Wilhelm Fleischmann | Process and device for application of active substances to a wound surface |
DE19722075C1 (de) * | 1997-05-27 | 1998-10-01 | Wilhelm Dr Med Fleischmann | Vorrichtung zur Applikation von Wirkstoffen an einer Wundoberfläche |
US5929526A (en) * | 1997-06-05 | 1999-07-27 | Micron Technology, Inc. | Removal of metal cusp for improved contact fill |
US7214202B1 (en) | 1997-07-28 | 2007-05-08 | Kci Licensing, Inc. | Therapeutic apparatus for treating ulcers |
US5976976A (en) | 1997-08-21 | 1999-11-02 | Micron Technology, Inc. | Method of forming titanium silicide and titanium by chemical vapor deposition |
US7273054B2 (en) * | 1997-09-12 | 2007-09-25 | Kci Licensing, Inc. | Surgical drape and head for wound treatment |
GB9719520D0 (en) * | 1997-09-12 | 1997-11-19 | Kci Medical Ltd | Surgical drape and suction heads for wound treatment |
US6143362A (en) * | 1998-02-25 | 2000-11-07 | Micron Technology, Inc. | Chemical vapor deposition of titanium |
US6284316B1 (en) | 1998-02-25 | 2001-09-04 | Micron Technology, Inc. | Chemical vapor deposition of titanium |
US6846739B1 (en) * | 1998-02-27 | 2005-01-25 | Micron Technology, Inc. | MOCVD process using ozone as a reactant to deposit a metal oxide barrier layer |
US7858518B2 (en) | 1998-04-07 | 2010-12-28 | Micron Technology, Inc. | Method for forming a selective contact and local interconnect in situ |
US6121134A (en) | 1998-04-21 | 2000-09-19 | Micron Technology, Inc. | High aspect ratio metallization structures and processes for fabricating the same |
US6320261B1 (en) | 1998-04-21 | 2001-11-20 | Micron Technology, Inc. | High aspect ratio metallization structures for shallow junction devices, and methods of forming the same |
US6071562A (en) * | 1998-05-07 | 2000-06-06 | Lsi Logic Corporation | Process for depositing titanium nitride films |
US6458109B1 (en) * | 1998-08-07 | 2002-10-01 | Hill-Rom Services, Inc. | Wound treatment apparatus |
US6210813B1 (en) | 1998-09-02 | 2001-04-03 | Micron Technology, Inc. | Forming metal silicide resistant to subsequent thermal processing |
US6602796B2 (en) | 1998-09-03 | 2003-08-05 | Micron Technology, Inc. | Chemical vapor deposition for smooth metal films |
GB9822341D0 (en) | 1998-10-13 | 1998-12-09 | Kci Medical Ltd | Negative pressure therapy using wall suction |
US6423626B1 (en) | 1998-11-02 | 2002-07-23 | Micron Technology, Inc. | Removal of metal cusp for improved contact fill |
US6767334B1 (en) | 1998-12-23 | 2004-07-27 | Kci Licensing, Inc. | Method and apparatus for wound treatment |
US20070190751A1 (en) * | 1999-03-29 | 2007-08-16 | Marr Kenneth W | Semiconductor fuses and methods for fabricating and programming the same |
US20070014837A1 (en) * | 1999-04-02 | 2007-01-18 | Kci Licensing, Inc. | System and method for use of agent in combination with subatmospheric pressure tissue treatment |
ES2270824T3 (es) | 1999-04-02 | 2007-04-16 | Kci Licensing, Inc. | Sistema de cierre asistido por vacio con provision de calentamiento y enfriamiento. |
BR0009511A (pt) | 1999-04-02 | 2004-06-08 | Kinetic Concepts Inc | Combinação terapêutica destinada a promover cura de feridas em mamas |
US20070021697A1 (en) * | 2004-07-26 | 2007-01-25 | Kci Licensing, Inc. | System and method for use of agent in combination with subatmospheric tissue treatment |
US7947033B2 (en) * | 1999-04-06 | 2011-05-24 | Kci Licensing Inc. | Systems and methods for detection of wound fluid blood and application of phototherapy in conjunction with reduced pressure wound treatment system |
US7799004B2 (en) * | 2001-03-05 | 2010-09-21 | Kci Licensing, Inc. | Negative pressure wound treatment apparatus and infection identification system and method |
US6994702B1 (en) | 1999-04-06 | 2006-02-07 | Kci Licensing, Inc. | Vacuum assisted closure pad with adaptation for phototherapy |
US6856821B2 (en) * | 2000-05-26 | 2005-02-15 | Kci Licensing, Inc. | System for combined transcutaneous blood gas monitoring and vacuum assisted wound closure |
US6695823B1 (en) * | 1999-04-09 | 2004-02-24 | Kci Licensing, Inc. | Wound therapy device |
US6323534B1 (en) | 1999-04-16 | 2001-11-27 | Micron Technology, Inc. | Fuse for use in a semiconductor device |
GB9909301D0 (en) | 1999-04-22 | 1999-06-16 | Kci Medical Ltd | Wound treatment apparatus employing reduced pressure |
US6335282B1 (en) * | 1999-08-26 | 2002-01-01 | Micron Technology, Inc. | Method of forming a titanium comprising layer and method of forming a conductive silicide contact |
GB9926538D0 (en) | 1999-11-09 | 2000-01-12 | Kci Medical Ltd | Multi-lumen connector |
US6764462B2 (en) | 2000-11-29 | 2004-07-20 | Hill-Rom Services Inc. | Wound treatment apparatus |
US6824533B2 (en) * | 2000-11-29 | 2004-11-30 | Hill-Rom Services, Inc. | Wound treatment apparatus |
GB0011202D0 (en) | 2000-05-09 | 2000-06-28 | Kci Licensing Inc | Abdominal wound dressing |
ATE407647T1 (de) | 2000-05-22 | 2008-09-15 | Arthur C Coffey | Wundverband mit sis-schicht und vakuumkammer |
US6520982B1 (en) * | 2000-06-08 | 2003-02-18 | Kci Licensing, Inc. | Localized liquid therapy and thermotherapy device |
US6685681B2 (en) * | 2000-11-29 | 2004-02-03 | Hill-Rom Services, Inc. | Vacuum therapy and cleansing dressing for wounds |
US6855135B2 (en) * | 2000-11-29 | 2005-02-15 | Hill-Rom Services, Inc. | Vacuum therapy and cleansing dressing for wounds |
US6613656B2 (en) * | 2001-02-13 | 2003-09-02 | Micron Technology, Inc. | Sequential pulse deposition |
US6514214B2 (en) * | 2001-02-13 | 2003-02-04 | Scimed Life Systems, Inc. | Intravascular temperature sensor |
US7700819B2 (en) * | 2001-02-16 | 2010-04-20 | Kci Licensing, Inc. | Biocompatible wound dressing |
US7666192B2 (en) | 2001-02-16 | 2010-02-23 | Kci Licensing, Inc. | Skin grafting devices and methods |
US7763769B2 (en) * | 2001-02-16 | 2010-07-27 | Kci Licensing, Inc. | Biocompatible wound dressing |
DE10120451A1 (de) * | 2001-04-26 | 2002-10-31 | Ina Schaeffler Kg | Elektromotorisch verdrehbare Welle |
US7645269B2 (en) * | 2001-04-30 | 2010-01-12 | Kci Licensing, Inc. | Gradient wound treatment system and method |
US7004915B2 (en) | 2001-08-24 | 2006-02-28 | Kci Licensing, Inc. | Negative pressure assisted tissue treatment system |
US20030042614A1 (en) * | 2001-08-30 | 2003-03-06 | Ammar Deraa | Metal silicide adhesion layer for contact structures |
US6858904B2 (en) | 2001-08-30 | 2005-02-22 | Micron Technology, Inc. | High aspect ratio contact structure with reduced silicon consumption |
WO2003030966A1 (en) * | 2001-10-11 | 2003-04-17 | Hill-Rom Services, Inc. | Waste container for negative pressure therapy |
US6648862B2 (en) | 2001-11-20 | 2003-11-18 | Spheric Products, Ltd. | Personally portable vacuum desiccator |
EP1478313B2 (en) * | 2001-12-26 | 2018-03-07 | KCI Medical Resources | Vented vacuum bandage |
CA2468307A1 (en) | 2001-12-26 | 2003-07-17 | Hill-Rom Services, Inc. | Vacuum bandage packing |
WO2003057307A1 (en) * | 2001-12-26 | 2003-07-17 | Hill-Rom Services, Inc. | Wound vacuum therapy dressing kit |
US7346135B1 (en) | 2002-02-13 | 2008-03-18 | Marvell International, Ltd. | Compensation for residual frequency offset, phase noise and sampling phase offset in wireless networks |
US6586285B1 (en) | 2002-03-06 | 2003-07-01 | Micron Technology, Inc. | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers |
US6730355B2 (en) | 2002-03-06 | 2004-05-04 | Micron Technology, Inc. | Chemical vapor deposition method of forming a material over at least two substrates |
US6767823B2 (en) | 2002-03-06 | 2004-07-27 | Micron Technology, Inc. | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers |
US6991653B2 (en) * | 2002-03-21 | 2006-01-31 | Sdgi Holdings, Inc. | Vertebral body and disc space replacement devices |
EP1496822B1 (en) | 2002-04-10 | 2018-08-29 | KCI Medical Resources | Access openings in vacuum bandage |
EP3181178B1 (en) | 2002-08-21 | 2019-01-30 | KCI Medical Resources | Wound packing for preventing wound closure |
US7381211B2 (en) * | 2002-08-21 | 2008-06-03 | Kci Licensing, Inc. | Medical closure screen device and method |
US7410495B2 (en) * | 2002-08-21 | 2008-08-12 | Kci Licensing, Inc. | Medical closure clip system and method |
US7351250B2 (en) | 2002-08-21 | 2008-04-01 | Kci Licensing, Inc. | Circumferential medical closure device and method |
US7413570B2 (en) * | 2002-08-21 | 2008-08-19 | Kci Licensing, Inc. | Medical closure screen installation systems and methods |
US8062331B2 (en) * | 2002-08-21 | 2011-11-22 | Kci Licensing, Inc. | Internal and external medical closure screen systems and methods |
US7413571B2 (en) * | 2002-08-21 | 2008-08-19 | Kci Licensing, Inc. | Flexible medical closure screen and method |
US20040038458A1 (en) * | 2002-08-23 | 2004-02-26 | Marr Kenneth W. | Semiconductor fuses, semiconductor devices containing the same, and methods of making and using the same |
DE60232380D1 (ja) | 2002-11-07 | 2009-06-25 | Rolf Weidenhagen | |
US10363344B2 (en) | 2002-12-31 | 2019-07-30 | Kci Licensing, Inc. | Externally-applied patient interface system and method with a controlled region for implanted or buried bio-reactor |
US7976519B2 (en) | 2002-12-31 | 2011-07-12 | Kci Licensing, Inc. | Externally-applied patient interface system and method |
US7169151B1 (en) | 2003-04-10 | 2007-01-30 | Kci Licensing, Inc. | Bone regeneration device for long bones, and method of use |
US20100210986A1 (en) * | 2003-07-22 | 2010-08-19 | Sanders T Blane | Negative pressure wound treatment dressings and systems |
AU2004258980B2 (en) * | 2003-07-22 | 2010-09-09 | Solventum Intellectual Properties Company | Negative pressure wound treatment dressing |
US20050065484A1 (en) * | 2003-09-10 | 2005-03-24 | Watson Richard L. | Wound healing apparatus with bioabsorbable material and suction tubes |
GB0325129D0 (en) | 2003-10-28 | 2003-12-03 | Smith & Nephew | Apparatus in situ |
GB2408207A (en) | 2003-11-24 | 2005-05-25 | Johnson & Johnson Medical Ltd | Wound dressing for the controlled release of therapeutic agents comprising also an inhibitor of a protease enzyme & a linker group cleavable by such an enzyme |
US7164200B2 (en) * | 2004-02-27 | 2007-01-16 | Agere Systems Inc. | Techniques for reducing bowing in power transistor devices |
US7790945B1 (en) | 2004-04-05 | 2010-09-07 | Kci Licensing, Inc. | Wound dressing with absorption and suction capabilities |
CA2574927A1 (en) * | 2004-07-26 | 2006-02-09 | Kci Licensing, Inc. | Method for coating substrate with antimicrobial agent and product formed thereby |
US7824384B2 (en) * | 2004-08-10 | 2010-11-02 | Kci Licensing, Inc. | Chest tube drainage system |
UA91241C2 (ru) | 2005-12-06 | 2010-07-12 | Кейсиай ЛАЙСЕНСИНГ, ИНК. | Устройство для обработки раны (варианты), устройство для стаза и изоляции, способ обеспечения стаза и изоляции раны |
US7981668B2 (en) * | 2006-01-18 | 2011-07-19 | Kci Licensing Inc. | System and method for applying reduced pressure to cell culture |
BRPI0706847A2 (pt) * | 2006-01-23 | 2011-04-12 | Kci Licensing Inc | sistema de tratamento de ferida, sistema de tratamento de ferida para limpar cirurgicamente e curar um sìtio de ferida, sistema de tratamento ultra-sÈnico de ferida para tratar um sìtio de ferida, método para o tratamento de uma ferida, bandagem de ferida de múltiplos propósitos e bandagem de limpeza de ferida de múltiplos propósitos |
US8235939B2 (en) * | 2006-02-06 | 2012-08-07 | Kci Licensing, Inc. | System and method for purging a reduced pressure apparatus during the administration of reduced pressure treatment |
BRPI0706893B8 (pt) * | 2006-02-06 | 2021-06-22 | Kci Licensing Inc | adaptador de pressão reduzida rotativo para conectar uma fonte de pressão reduzida a uma almofada porosa. |
US9456860B2 (en) * | 2006-03-14 | 2016-10-04 | Kci Licensing, Inc. | Bioresorbable foaming tissue dressing |
US20080033324A1 (en) * | 2006-03-14 | 2008-02-07 | Cornet Douglas A | System for administering reduced pressure treatment having a manifold with a primary flow passage and a blockage prevention member |
US8267918B2 (en) * | 2006-03-14 | 2012-09-18 | Kci Licensing, Inc. | System and method for percutaneously administering reduced pressure treatment using a flowable manifold |
US8002313B2 (en) | 2006-04-25 | 2011-08-23 | Kci Licensing, Inc. | Inline swivel connection for multi-lumen tubing |
US20070276195A1 (en) * | 2006-05-12 | 2007-11-29 | Kci Licensing, Inc. | Systems and methods for wound area management |
US20070276309A1 (en) * | 2006-05-12 | 2007-11-29 | Kci Licensing, Inc. | Systems and methods for wound area management |
US7699831B2 (en) * | 2006-06-02 | 2010-04-20 | Surgical Design Solutions, Llc | Assemblies, systems, and methods for vacuum assisted internal drainage during wound healing |
US8079991B2 (en) | 2006-06-02 | 2011-12-20 | Kci Licensing Inc. | Wound suction peg apparatus |
US8551075B2 (en) | 2006-06-02 | 2013-10-08 | Kci Medical Resources | Assemblies, systems, and methods for vacuum assisted internal drainage during wound healing |
WO2007142688A1 (en) | 2006-06-02 | 2007-12-13 | Bengtson Bradley P | Assemblies, systems, and methods for vacuum assisted internal drainage during wound healing |
GB2439928A (en) | 2006-07-13 | 2008-01-16 | Ethicon Inc | Hydrogel wound dressings exhibiting reduced fiber losses |
US7876546B2 (en) | 2006-09-19 | 2011-01-25 | Kci Licensing Inc. | Component module for a reduced pressure treatment system |
US8000777B2 (en) * | 2006-09-19 | 2011-08-16 | Kci Licensing, Inc. | System and method for tracking healing progress of tissue |
KR101231281B1 (ko) | 2006-09-19 | 2013-02-07 | 케이씨아이 라이센싱 인코포레이티드 | 막힘 해소 및 듀얼-존 압력 보호 능력을 가지는 감압 치료 시스템 |
US8061360B2 (en) | 2006-09-19 | 2011-11-22 | Kci Licensing, Inc. | System and method for locating fluid leaks at a drape of a reduced pressure delivery system |
US8725528B2 (en) * | 2006-09-19 | 2014-05-13 | Kci Licensing, Inc. | System and method for managing history of patient and wound therapy treatment |
JP5059114B2 (ja) * | 2006-09-19 | 2012-10-24 | ケーシーアイ ライセンシング インコーポレイテッド | 実質的に水平な、あるいは実質的に鉛直な支持構造に医療装置を固定するための吊下機構 |
US8366690B2 (en) | 2006-09-19 | 2013-02-05 | Kci Licensing, Inc. | System and method for determining a fill status of a canister of fluid in a reduced pressure treatment system |
US7491541B2 (en) * | 2006-09-21 | 2009-02-17 | Kci Licensing, Inc. | Method for quantitation of collagen in tissue |
CA2776011C (en) | 2006-10-13 | 2017-01-10 | Kci Licensing, Inc. | Reduced pressure delivery system having a manually-activated pump for providing treatment to low-severity wounds |
US8287507B2 (en) * | 2006-10-13 | 2012-10-16 | Kci Licensing, Inc. | Reduced pressure indicator for a reduced pressure source |
SG175690A1 (en) | 2006-11-09 | 2011-11-28 | Kci Licensing Inc | Porous bioresorbable dressing conformable to a wound and methods of making same |
MX348111B (es) * | 2007-02-09 | 2017-05-26 | Kci Licensing Inc | Sistema y método para aplicar presión reducida en un sitio de tejido. |
BRPI0806221A2 (pt) | 2007-02-09 | 2011-09-06 | Kci Licensing Inc | aparelho para gerenciar a pressão reduzida em um sìtio de tecido e método para gerenciar a pressão reduzida em um sìtio do tecido |
EP3335680A1 (en) | 2007-02-09 | 2018-06-20 | KCI Licensing, Inc. | A breathable interface system for topical reduced pressure |
CA2674025C (en) * | 2007-02-09 | 2016-06-21 | Kci Licensing, Inc. | Apparatus and method for administering reduced pressure treatment to a tissue site |
US8267908B2 (en) * | 2007-02-09 | 2012-09-18 | Kci Licensing, Inc. | Delivery tube, system, and method for storing liquid from a tissue site |
EP3120878B1 (en) | 2007-02-20 | 2020-07-22 | KCI Licensing, Inc. | System for distingushing leaks from a disengaged canister condition in a reduced pressure treatment system |
US10117977B2 (en) | 2007-03-14 | 2018-11-06 | The Board Of Trustees Of The Leland Stanford Junior University | Devices and methods for application of reduced pressure therapy |
JP4874852B2 (ja) * | 2007-04-09 | 2012-02-15 | Hoya株式会社 | マクロレンズ系 |
AU2008251426B2 (en) * | 2007-05-10 | 2013-10-10 | Solventum Intellectual Properties Company | Reduced pressure wound dressing having a wound contact surface with columnar protrusions |
BRPI0811668A2 (pt) | 2007-06-29 | 2015-02-10 | Kci Licensing Inc | "método de ativação da atividade osteogênica ou condrogênica em um sítio em um indivíduo com necessidade do mesmo, método de tratamento de uma deficiência de osso ou de cartilagem em um indivíduo, uso de um aparelho de pressão reduzida, composição para tratamento de uma deficiência de osso ou de cartilagem e uso de um aparelho de pressão reduzida e de uma estrutura de suporte biocompatível" |
CA2697040C (en) | 2007-08-21 | 2016-10-25 | Richard Paul Mormino | Reduced-pressure system and method employing a gasket |
JP5511670B2 (ja) | 2007-10-11 | 2014-06-04 | スピレイカー・インコーポレイテッド | 縫合された切開の陰圧創傷治療装置および使用方法 |
CA2701298A1 (en) | 2007-11-05 | 2009-05-14 | Kci Licensing Inc. | Identification of tissue for debridement |
US8808259B2 (en) * | 2007-11-21 | 2014-08-19 | T.J. Smith & Nephew Limited | Suction device and dressing |
GB2455962A (en) | 2007-12-24 | 2009-07-01 | Ethicon Inc | Reinforced adhesive backing sheet, for plaster |
US8377017B2 (en) | 2008-01-03 | 2013-02-19 | Kci Licensing, Inc. | Low-profile reduced pressure treatment system |
US9782300B2 (en) * | 2008-02-01 | 2017-10-10 | Kci Licensing, Inc. | Fiber-microsphere bioresorbable composite scaffold for wound healing |
WO2009103031A1 (en) | 2008-02-14 | 2009-08-20 | Spiracur Inc. | Devices and methods for treatment of damaged tissue |
JP5243560B2 (ja) * | 2008-02-27 | 2013-07-24 | ケーシーアイ ライセンシング インコーポレイテッド | 組織部位における創傷を治療するシステムおよび方法 |
AU2009222109B2 (en) * | 2008-02-29 | 2013-02-21 | Solventum Intellectual Properties Company | A system and method for collecting exudates |
US8449508B2 (en) * | 2008-03-05 | 2013-05-28 | Kci Licensing, Inc. | Dressing and method for applying reduced pressure to and collecting and storing fluid from a tissue site |
CN101959479B (zh) | 2008-03-05 | 2014-08-20 | 凯希特许有限公司 | 用于将减压施加到组织部位并收集和存储组织部位的流体的敷料和方法 |
RU2010138980A (ru) | 2008-03-13 | 2012-04-20 | КейСиАй Лайсензинг Инк. (US) | Система и способ подачи пониженного давления |
AU2009223262B2 (en) | 2008-03-13 | 2014-09-04 | Kci Licensing, Inc. | Pressure switches, transmitters, systems, and methods for monitoring a pressure at a tissue site |
TW200950824A (en) * | 2008-04-30 | 2009-12-16 | Kci Licensing Inc | Use of nucleic acids with reduced pressure therapy |
EP2280743B1 (en) | 2008-05-02 | 2015-09-16 | KCI Licensing, Inc. | Manually-actuated reduced pressure pump having regulated pressure capabilities |
CA2723952C (en) * | 2008-05-13 | 2014-07-08 | Jonathan Kagan | Catheter/filament style device and methods for treatment of wounds beneath the surface of the skin |
EP2666488B1 (en) | 2008-05-30 | 2015-10-07 | KCI Licensing, Inc. | Anisotropic drapes |
KR101170266B1 (ko) | 2008-05-30 | 2012-08-01 | 케이씨아이 라이센싱 인코포레이티드 | 감압으로 선형적인 상처를 폐쇄하는 볼스터 및 시스템 |
KR20110025811A (ko) | 2008-06-04 | 2011-03-11 | 케이씨아이 라이센싱 인코포레이티드 | 감압 상처 치료의 감염 검출 |
KR101259281B1 (ko) * | 2008-06-04 | 2013-05-06 | 케이씨아이 라이센싱 인코포레이티드 | 다수의 배향 필터를 가진 감압용 액체 집진 캐니스터 |
US9211486B2 (en) | 2008-06-04 | 2015-12-15 | Kci Licensing, Inc. | Reduced-pressure, liquid-collection canister with multi-orientation filter |
CA2726997C (en) | 2008-06-25 | 2014-04-15 | Kci Licensing, Inc. | Absorbable, reduced-pressure manifolds and systems |
CN103655040A (zh) | 2008-06-26 | 2014-03-26 | 凯希特许有限公司 | 使用减压治疗刺激软骨形成的系统 |
EP2977068B1 (en) | 2008-07-11 | 2017-10-11 | KCI Licensing, Inc. | Manually-actuated, reduced-pressure systems for treating wounds |
CA2937100C (en) | 2008-08-08 | 2019-07-02 | Kci Licensing, Inc. | Reduced-pressure treatment systems with reservoir control |
JP5500603B2 (ja) * | 2008-09-18 | 2014-05-21 | ケーシーアイ ライセンシング インコーポレイテッド | 減圧を皮下組織に送達するシステムおよび方法 |
RU2011107113A (ru) * | 2008-09-18 | 2012-10-27 | КейСиАй Лайсензинг, Инк. (US) | Ламинарные повязки, системы и способы приложения пониженного давления к участку ткани |
JP5318957B2 (ja) | 2008-09-18 | 2013-10-16 | ケーシーアイ ライセンシング インコーポレイテッド | 治療送達システムおよび方法 |
AU2009298912A1 (en) | 2008-10-03 | 2010-04-08 | Kci Licensing, Inc. | System and method for using micro-electro-mechanical systems (MEMS) to heal wounds |
US8158844B2 (en) * | 2008-10-08 | 2012-04-17 | Kci Licensing, Inc. | Limited-access, reduced-pressure systems and methods |
USD614284S1 (en) | 2008-10-10 | 2010-04-20 | Kci Licensing, Inc. | Reduced-pressure unit with a cantilevered arm |
JP5016143B2 (ja) | 2008-10-29 | 2012-09-05 | ケーシーアイ ライセンシング インコーポレイテッド | モジュール型の減圧式創傷閉鎖システムおよび方法 |
KR20110087271A (ko) | 2008-10-29 | 2011-08-02 | 케이씨아이 라이센싱 인코포레이티드 | 의료용 캐니스터 연결장치 |
RU2011114000A (ru) | 2008-11-07 | 2012-12-20 | КейСиАй ЛАЙСЕНЗИНГ, ИНК. | Повязки и системы терапии раны пониженным давлением |
JP5778035B2 (ja) | 2008-11-14 | 2015-09-16 | ケーシーアイ ライセンシング インコーポレイテッド | 組織部位からの流体を溜めるための流体嚢、システム、及び方法 |
JP5620917B2 (ja) * | 2008-11-18 | 2014-11-05 | ケーシーアイライセンシング インコーポレイテッド | 減圧用複合型マニホルド |
WO2010059730A2 (en) * | 2008-11-19 | 2010-05-27 | Kci Licensing, Inc. | Dynamic, reduced-pressure treatment systems and methods |
EP2821095B1 (en) | 2008-11-25 | 2017-08-09 | KCI Licensing, Inc. | Device for delivery of reduced pressure to body surfaces |
US8529528B2 (en) | 2008-12-24 | 2013-09-10 | Kci Licensing, Inc. | Reduced-pressure wound treatment systems and methods employing microstrain-inducing manifolds |
AU2009330157B2 (en) * | 2008-12-24 | 2015-06-25 | Solventum Intellectual Properties Company | Membranes, systems, and methods for applying reduced pressure to a subcutaneous tissue site |
US8486032B2 (en) | 2008-12-24 | 2013-07-16 | Kci Licensing, Inc. | Reduced-pressure treatment systems and methods employing debridement mechanisms |
US8708984B2 (en) | 2008-12-24 | 2014-04-29 | Kci Licensing, Inc. | Reduced-pressure wound treatment systems and methods employing manifold structures |
MX2011007082A (es) | 2008-12-30 | 2011-07-28 | Kci Licensing Inc | Aumento de presion reducida de procedimientos de microfractura para reparacion de cartilago. |
US8491540B2 (en) | 2008-12-30 | 2013-07-23 | Kci Licensing, Inc. | Apparatuses, systems, and methods for managing liquid flow associated with a tissue site using the presence of reduced pressure |
US8864728B2 (en) | 2008-12-31 | 2014-10-21 | Kci Licensing, Inc. | Multi-conduit manifolds, systems, and methods for applying reduced pressure to a subcutaneous tissue site |
CN103520783B (zh) * | 2008-12-31 | 2016-02-24 | 凯希特许有限公司 | 向组织提供流体流的系统 |
MX2011007079A (es) | 2008-12-31 | 2011-07-28 | Kci Licensing Inc | Sistema para proporcionar un flujo de fluido a tejidos neurales. |
KR20110102931A (ko) * | 2008-12-31 | 2011-09-19 | 케이씨아이 라이센싱 인코포레이티드 | 피하 조직 부위에 감압을 시행하는 매니폴드, 시스템 및 방법 |
EP2370144B1 (en) | 2008-12-31 | 2014-09-24 | KCI Licensing, Inc. | Systems for inducing fluid flow to stimulate tissue growth |
US8795245B2 (en) | 2008-12-31 | 2014-08-05 | Kci Licensing, Inc. | Sleeves, manifolds, systems, and methods for applying reduced pressure to a subcutaneous tissue site |
WO2010080907A1 (en) | 2009-01-07 | 2010-07-15 | Spiracur Inc. | Reduced pressure therapy of the sacral region |
US10792404B2 (en) | 2009-04-10 | 2020-10-06 | Kci Licensing, Inc. | Methods and devices for applying closed incision negative pressure wound therapy |
US8444614B2 (en) | 2009-04-10 | 2013-05-21 | Spiracur, Inc. | Methods and devices for applying closed incision negative pressure wound therapy |
US8663132B2 (en) * | 2009-04-14 | 2014-03-04 | Kci Licensing, Inc. | Reduced-pressure treatment systems and methods employing a variable cover |
US9421309B2 (en) | 2009-06-02 | 2016-08-23 | Kci Licensing, Inc. | Reduced-pressure treatment systems and methods employing hydrogel reservoir members |
US8469936B2 (en) | 2009-07-15 | 2013-06-25 | Kci Licensing, Inc. | Reduced-pressure dressings, systems, and methods employing desolidifying barrier layers |
US8690844B2 (en) | 2009-08-27 | 2014-04-08 | Kci Licensing, Inc. | Re-epithelialization wound dressings and systems |
US20110054420A1 (en) | 2009-08-27 | 2011-03-03 | Christopher Brian Locke | Reduced-pressure wound dressings and systems for re-epithelialization and granulation |
US20110066123A1 (en) | 2009-09-15 | 2011-03-17 | Aidan Marcus Tout | Medical dressings, systems, and methods employing sealants |
US20110144674A1 (en) * | 2009-10-16 | 2011-06-16 | Keith Patrick Heaton | Debridement cutting heads, methods, and systems employing reduced pressure |
US8529526B2 (en) * | 2009-10-20 | 2013-09-10 | Kci Licensing, Inc. | Dressing reduced-pressure indicators, systems, and methods |
EP2509622B1 (en) * | 2009-12-09 | 2014-08-20 | KCI Licensing, Inc. | Inhibiting bacterial infection and biofilm formation |
US9011393B2 (en) * | 2009-12-18 | 2015-04-21 | Kci Licensing, Inc. | Systems, methods, and devices for restoring lymphatic flow associated with a subcutaneous defect in a patients body |
US8377018B2 (en) * | 2009-12-23 | 2013-02-19 | Kci Licensing, Inc. | Reduced-pressure, multi-orientation, liquid-collection canister |
CN102711901B (zh) * | 2010-01-20 | 2015-01-21 | 凯希特许有限公司 | 具有亲水性泡沫伤口插入物的用于流体滴注和/或负压伤口疗法的防漏绷带系统和方法 |
EP2525955B1 (en) | 2010-01-20 | 2019-06-12 | KCI Licensing, Inc. | Foam wound inserts with regions of higher and lower densities, wound dressings, and methods |
EP2525841B1 (en) * | 2010-01-20 | 2019-07-17 | KCI Licensing, Inc. | Wound-connection pads for fluid instillation and negative pressure wound therapy |
EP3181162A3 (en) | 2010-01-22 | 2017-09-27 | KCI Licensing, Inc. | Devices, systems, and methods for instillation of foamed fluid with negative pressure wound therapy |
AU2011210896B2 (en) | 2010-01-29 | 2014-03-13 | Kci Licensing, Inc | Wound treatment apparatuses and methods for controlled delivery of fluids to a wound |
JP5805669B2 (ja) | 2010-01-29 | 2015-11-04 | ケーシーアイ ライセンシング インク | 流体供給システムを位置付けるためのシステムと方法 |
US8454567B2 (en) | 2010-02-01 | 2013-06-04 | Kci Licensing, Inc. | Multi-conduit connectors and methods for negative pressure wound therapy |
US8646479B2 (en) | 2010-02-03 | 2014-02-11 | Kci Licensing, Inc. | Singulation of valves |
US8721606B2 (en) | 2010-03-11 | 2014-05-13 | Kci Licensing, Inc. | Dressings, systems, and methods for treating a tissue site |
US9308024B2 (en) * | 2010-03-11 | 2016-04-12 | Kci Licensing, Inc. | Tissue debridement systems and methods |
US8469935B2 (en) | 2010-03-11 | 2013-06-25 | Kci Licensing, Inc. | Abdominal treatment systems, delivery devices, and methods |
US8430867B2 (en) | 2010-03-12 | 2013-04-30 | Kci Licensing, Inc. | Reduced-pressure dressing connection pads, systems, and methods |
US8882730B2 (en) * | 2010-03-12 | 2014-11-11 | Kci Licensing, Inc. | Radio opaque, reduced-pressure manifolds, systems, and methods |
US8454580B2 (en) | 2010-03-12 | 2013-06-04 | Kci Licensing, Inc. | Adjustable reduced-pressure wound coverings |
US9358158B2 (en) | 2010-03-16 | 2016-06-07 | Kci Licensing, Inc. | Patterned neo-epithelialization dressings, systems, and methods |
US8814842B2 (en) | 2010-03-16 | 2014-08-26 | Kci Licensing, Inc. | Delivery-and-fluid-storage bridges for use with reduced-pressure systems |
US9427506B2 (en) | 2010-03-31 | 2016-08-30 | Kci Licensing, Inc. | System and method for locating fluid leaks at a drape using sensing techniques |
US8632512B2 (en) | 2010-04-09 | 2014-01-21 | Kci Licensing, Inc. | Apparatuses, methods, and compositions for the treatment and prophylaxis of chronic wounds |
US9999702B2 (en) | 2010-04-09 | 2018-06-19 | Kci Licensing Inc. | Apparatuses, methods, and compositions for the treatment and prophylaxis of chronic wounds |
WO2011130246A2 (en) | 2010-04-13 | 2011-10-20 | Kci Licensing, Inc. | Compositions with reactive ingredients, and wound dressings, apparatuses, and methods |
GB201006323D0 (en) | 2010-04-15 | 2010-06-02 | Systagenix Wound Man Ip Co Bv | Leakage-reducing dressing |
US8604265B2 (en) | 2010-04-16 | 2013-12-10 | Kci Licensing, Inc. | Dressings and methods for treating a tissue site on a patient |
US9492325B2 (en) | 2010-04-16 | 2016-11-15 | Kci Licensing, Inc. | Dressings and methods for treating a tissue site on a patient |
US8905983B2 (en) | 2010-04-22 | 2014-12-09 | Kci Licensing, Inc. | System and method for utilizing exudate with a reduced pressure treatment system to generate electricity |
US8623047B2 (en) | 2010-04-30 | 2014-01-07 | Kci Licensing, Inc. | System and method for sealing an incisional wound |
US8403902B2 (en) | 2010-05-18 | 2013-03-26 | Kci Licensing, Inc. | Reduced-pressure medical systems and methods employing a moisture processing device |
US8409160B2 (en) | 2010-05-18 | 2013-04-02 | Kci Licensing, Inc. | Reduced-pressure treatment systems and methods employing a fluidly isolated pump control unit |
US20110288535A1 (en) | 2010-05-18 | 2011-11-24 | Christopher Brian Locke | Systems and methods for measuring reduced pressure employing an isolated fluid path |
US9198987B2 (en) | 2010-06-25 | 2015-12-01 | Kci Licensing, Inc. | Systems and methods for imaging sinuses |
WO2012009662A1 (en) | 2010-07-16 | 2012-01-19 | Kci Licensing, Inc. | System and method for interfacing with a reduced pressure dressing |
US8795257B2 (en) | 2010-07-19 | 2014-08-05 | Kci Licensing, Inc. | Systems and methods for electrically detecting the presence of exudate in dressings |
US8795246B2 (en) | 2010-08-10 | 2014-08-05 | Spiracur Inc. | Alarm system |
US11291760B2 (en) | 2010-08-10 | 2022-04-05 | Kci Licensing, Inc. | Controlled negative pressure apparatus and alarm mechanism |
US8753322B2 (en) | 2010-08-10 | 2014-06-17 | Spiracur Inc. | Controlled negative pressure apparatus and alarm mechanism |
EP3524283A1 (en) | 2010-08-18 | 2019-08-14 | KCI Licensing, Inc. | Reduced pressure, multi-orientation, liquid collection canister |
GB201014705D0 (en) | 2010-09-03 | 2010-10-20 | Systagenix Wound Man Ip Co Bv | Silicone gel-coated wound dressing |
US9408956B2 (en) | 2010-09-24 | 2016-08-09 | Kci Licensing, Inc. | Cellular control and tissue regeneration systems and methods |
US8758314B2 (en) | 2010-10-20 | 2014-06-24 | Kci Licensing, Inc. | Reduced-pressure systems, devices, and methods for treating a tissue site that includes a fistula |
US20120109034A1 (en) | 2010-10-27 | 2012-05-03 | Kci Licensing, Inc. | Interactive, wireless reduced-pressure dressings, methods, and systems |
AU2011329273B2 (en) | 2010-11-17 | 2016-04-28 | Solventum Intellectual Properties Company | Systems and methods for managing reduced pressure at a plurality of wound sites |
CN103189081B (zh) | 2010-11-17 | 2015-09-09 | 凯希特许有限公司 | 采用可重构内腔以对皮下实施减压的系统以及方法 |
US8591486B2 (en) | 2010-11-17 | 2013-11-26 | Kci Licensing, Inc. | Reduced-pressure systems and methods employing an ultraviolet light source for reducing bioburden |
US9440010B2 (en) | 2010-12-07 | 2016-09-13 | Kci Licensing, Inc. | Drape having microstrain inducing projections for treating a wound site |
US8944067B2 (en) | 2010-12-15 | 2015-02-03 | Kci Licensing, Inc. | Targeted delivery of magnetically tagged active agents in combination with negative pressure wound therapy |
US8613733B2 (en) | 2010-12-15 | 2013-12-24 | Kci Licensing, Inc. | Foam dressing with integral porous film |
GB2488749A (en) | 2011-01-31 | 2012-09-12 | Systagenix Wound Man Ip Co Bv | Laminated silicone coated wound dressing |
US9107990B2 (en) | 2011-02-14 | 2015-08-18 | Kci Licensing, Inc. | Reduced-pressure dressings, systems, and methods for use with linear wounds |
US8597264B2 (en) | 2011-03-24 | 2013-12-03 | Kci Licensing, Inc. | Apparatuses, methods, and compositions for the treatment and prophylaxis of chronic wounds |
WO2012142002A1 (en) | 2011-04-12 | 2012-10-18 | Kci Licensing, Inc. | Evaporative fluid pouch and systems for use with body fluids |
GB201106491D0 (en) | 2011-04-15 | 2011-06-01 | Systagenix Wound Man Ip Co Bv | Patterened silicone coating |
WO2012145504A1 (en) | 2011-04-20 | 2012-10-26 | Kci Licensing, Inc. | Skin graft devices and methods |
EP2699278B1 (en) | 2011-04-20 | 2015-03-18 | KCI Licensing, Inc. | Apparatus for managing reduced pressure delivered to a tissue site |
CN103379925B (zh) | 2011-04-20 | 2016-06-08 | 凯希特许有限公司 | 用于清理负压伤口治疗系统的系统 |
US9382290B2 (en) | 2011-04-29 | 2016-07-05 | Kci Licensing, Inc. | Aptamer-modified polymeric materials for the binding of factors in a wound environment |
JP2014516711A (ja) | 2011-05-25 | 2014-07-17 | ケーシーアイ ライセンシング インコーポレイテッド | 組織部位における肉芽形成を促すために正圧を使用する創傷治癒システム |
US8708981B2 (en) | 2011-05-26 | 2014-04-29 | Kci Licensing, Inc. | Systems and methods of stimulation and activation of fluids for use with instillation therapy |
CN106730060B (zh) | 2011-05-27 | 2020-12-04 | 凯希特许有限公司 | 用于向伤口治疗敷件递送流体的系统和方法 |
WO2012178161A1 (en) | 2011-06-24 | 2012-12-27 | Kci Licensing, Inc. | Medical drapes, devices, and systems employing a holographically-formed polymer dispersed liquid crystal (h-pdlc) device |
JP6224581B2 (ja) | 2011-06-24 | 2017-11-01 | ケーシーアイ ライセンシング インコーポレイテッド | 組織固定要素を採用する減圧ドレッシング |
WO2013016240A1 (en) | 2011-07-26 | 2013-01-31 | Kci Licensing, Inc. | Systems and methods for treating a tissue site with reduced pressure involving a reduced-pressure interface having a cutting element |
US10448876B2 (en) | 2011-07-26 | 2019-10-22 | Kci Licensing, Inc. | Hyperspectral imaging systems and related methods |
EP2739324B1 (en) | 2011-08-03 | 2015-07-15 | KCI Licensing, Inc. | Reduced-pressure wound dressings |
JP5967675B2 (ja) | 2011-08-31 | 2016-08-10 | ケーシーアイ ライセンシング インコーポレイテッド | 減圧治療および創面切除用のシステムおよび方法 |
CA2844924C (en) | 2011-08-31 | 2019-12-03 | Kci Licensing, Inc. | Inline storage pouches for use with body fluids |
CN106110411B (zh) | 2011-09-13 | 2018-11-06 | 凯希特许有限公司 | 具有疏水孔隙的减压罐 |
WO2013039622A2 (en) | 2011-09-14 | 2013-03-21 | Kci Licensing, Inc. | Reduced-pressure systems and methods employing a leak-detection member |
EP2758086B1 (en) | 2011-09-20 | 2018-05-23 | KCI Licensing, Inc. | Tissue treatment systems and methods having a non-tactile-stimulus-activated, macroscopically-deforming material |
JP6179993B2 (ja) | 2011-09-21 | 2017-08-16 | ケーシーアイ ライセンシング インコーポレイテッド | デュアルキャビティポンプ |
WO2013056158A1 (en) | 2011-10-13 | 2013-04-18 | Kci Licensing, Inc. | Stimulation of cartilage repair using reduced pressure treatment |
WO2013059277A1 (en) | 2011-10-17 | 2013-04-25 | Kci Licensing, Inc. | System and apparatus for treating a tissue site having an in-line canister |
CN103889377B (zh) | 2011-11-11 | 2016-08-17 | 凯希特许有限公司 | 采用液体控制用于治疗患者的肢体上的伤口的敷料和系统 |
EP2776084B1 (en) | 2011-11-11 | 2015-10-28 | KCI Licensing, Inc. | Reduced-pressure, tunnel-wound dressings, systems, and methods |
CN103889378B (zh) | 2011-11-15 | 2016-08-17 | 凯希特许有限公司 | 具有热增强的蒸汽传输的医用敷件、系统、以及方法 |
CA2855972C (en) | 2011-11-18 | 2019-08-27 | Kci Licensing, Inc. | Tissue treatment systems and methods having a porous substrate with a compressed region and an expanded region |
CN103917254B (zh) | 2011-11-21 | 2016-08-24 | 凯希特许有限公司 | 用于识别伤口填充物遗留在组织部位处的部分的系统、装置以及方法 |
AU2012340789B2 (en) | 2011-11-23 | 2017-05-04 | Solventum Intellectual Properties Company | Reduced-pressure systems, methods, and devices for simultaneously treating a plurality of tissue sites |
EP3219338A3 (en) | 2011-11-23 | 2017-12-27 | KCI Licensing, Inc. | Reduced pressure tissue treatment systems and methods having a reduced pressure dressing and associated valve |
WO2013086426A1 (en) | 2011-12-07 | 2013-06-13 | Kci Licensing, Inc. | Synthetic granulating gauze for use with reduced-pressure treatment systems |
US9569566B2 (en) | 2011-12-12 | 2017-02-14 | Zam Research Llc | Simulation and control system and method using contact, pressure waves and factor controls for cell regeneration, tissue closure and related applications |
US10940047B2 (en) | 2011-12-16 | 2021-03-09 | Kci Licensing, Inc. | Sealing systems and methods employing a hybrid switchable drape |
EP3005997B1 (en) | 2011-12-16 | 2024-06-26 | Solventum Intellectual Properties Company | Releasable medical drapes |
US9192444B2 (en) | 2011-12-16 | 2015-11-24 | Kci Licensing, Inc. | Sealing systems and methods employing a switchable drape |
WO2013096337A1 (en) | 2011-12-20 | 2013-06-27 | Kci Licensing, Inc. | Composition for enzymatic debridement |
WO2013096091A1 (en) | 2011-12-21 | 2013-06-27 | Kci Licensing, Inc. | A wound filler having dynamic motion |
AU2013208271B2 (en) | 2012-01-10 | 2017-04-13 | Kci Licensing, Inc. | Systems and methods for delivering fluid to a wound therapy dressing |
AU2013215380B2 (en) | 2012-02-02 | 2017-09-28 | Solventum Intellectual Properties Company | Systems and methods for delivering fluid to a wound therapy dressing |
AU2013215067A1 (en) | 2012-02-02 | 2014-06-12 | Kci Licensing, Inc. | Foam structure wound inserts for directional granulation |
AU2013216990A1 (en) | 2012-02-10 | 2014-07-24 | Kci Licensing, Inc. | Systems and methods for regulating the temperature of a disc pump system |
JP2015510072A (ja) | 2012-02-10 | 2015-04-02 | ケーシーアイ ライセンシング インコーポレイテッド | ディスクポンプシステムによって提供される減圧を監視するためのシステム及び方法 |
JP2015513027A (ja) | 2012-02-10 | 2015-04-30 | ケーシーアイ ライセンシング インコーポレイテッド | Rfidを使用してディスクポンプシステムを監視するためのシステムおよび方法 |
US9279421B2 (en) | 2012-02-10 | 2016-03-08 | Kci Licensing, Inc. | Systems and methods for electrochemical detection in a disc pump |
US8758315B2 (en) | 2012-02-21 | 2014-06-24 | Kci Licensing, Inc. | Multi-orientation canister for use with a reduced pressure treatment system |
EP2820385A1 (en) | 2012-02-29 | 2015-01-07 | KCI Licensing, Inc. | Systems and methods for supplying reduced pressure and measuring flow using a disc pump system |
CN104066990B (zh) | 2012-03-07 | 2017-02-22 | 凯希特许有限公司 | 带有高级致动器的盘泵 |
US9169319B2 (en) | 2012-03-20 | 2015-10-27 | Kci Licensing, Inc. | Targeted enzymatic degradation of quorum-sensing peptides |
JP6238417B2 (ja) | 2012-03-28 | 2017-11-29 | ケーシーアイ ライセンシング インコーポレイテッド | 電子構成部分と臨床構成部分の分離を促進する減圧システム、ドレッシング、および方法 |
EP2855937B1 (en) | 2012-04-19 | 2016-05-25 | KCI Licensing, Inc. | Disc pump with perimeter valve configuration |
WO2013158897A1 (en) | 2012-04-19 | 2013-10-24 | Kci Licensing, Inc. | Disc pump valve with performance enhancing valve flap |
CA2868854A1 (en) | 2012-06-28 | 2014-01-03 | Kci Licensing, Inc. | Wound connection pad with rfid and integrated strain gauge pressure sensor |
US9752565B2 (en) | 2012-07-05 | 2017-09-05 | Kci Licensing, Inc. | Systems and methods for supplying reduced pressure using a disc pump with electrostatic actuation |
CA2878279C (en) | 2012-07-05 | 2020-06-30 | Kci Licensing, Inc. | Systems and methods for regulating the resonant frequency of a disc pump cavity |
US10010454B2 (en) | 2012-07-09 | 2018-07-03 | Kci Licensing, Inc. | Systems, methods, and devices for treating a tissue site on a mammal having hair proximate the tissue site |
WO2014022400A1 (en) | 2012-07-30 | 2014-02-06 | Kci Licensing, Inc. | Reduced-pressure absorbent dressing, system for treating a tissue site, and method of manufacturing the dressing |
WO2014022548A1 (en) | 2012-08-03 | 2014-02-06 | Kci Licensing, Inc. | Interfaces, systems, and methods for use in reduced pressure tissue treatment |
WO2014028212A2 (en) | 2012-08-13 | 2014-02-20 | Kci Licensing, Inc. | Intelligent therapy system with evaporation management |
EP3260144B1 (en) | 2012-09-12 | 2020-01-29 | KCI Licensing, Inc. | Systems for collecting exudates in reduced-pressure therapy |
CN104717988B (zh) | 2012-09-14 | 2018-03-13 | 凯希特许有限公司 | 用于调节压力的系统、方法、和设备 |
EP2912087A1 (en) | 2012-10-24 | 2015-09-02 | KCI Licensing, Inc. | Amine-functionalized polymeric compositions for medical devices |
EP3611205A1 (en) | 2012-10-24 | 2020-02-19 | KCI Licensing, Inc. | Sulfhydryl-functionalized polymeric compositions for medical devices |
WO2014066057A1 (en) | 2012-10-25 | 2014-05-01 | Kci Licensing, Inc. | Wound connection pad with pneumatic connection confirmation ability |
EP3372208B1 (en) | 2012-11-12 | 2022-07-20 | 3M Innovative Properties Company | Externally-applied wound dressings and closures |
EP3669842B1 (en) | 2012-11-16 | 2023-09-27 | 3M Innovative Properties Company | Medical drape with pattern adhesive layers |
EP3566730B1 (en) | 2012-11-26 | 2022-01-19 | 3M Innovative Properties Company | Combined solution pump and storage system for use with a reduced-pressure treatment system |
EP4218846A3 (en) | 2012-12-06 | 2023-09-27 | IC Surgical, Inc. | Adaptable wound drainage system |
GB201222770D0 (en) | 2012-12-18 | 2013-01-30 | Systagenix Wound Man Ip Co Bv | Wound dressing with adhesive margin |
US9561135B2 (en) | 2013-01-02 | 2017-02-07 | Kci Licensing, Inc. | Flexible, adherent, and non-polyurethane film wound drape cover |
US9937079B2 (en) | 2013-01-02 | 2018-04-10 | Kci Licensing, Inc. | Medical drape having an ultra-thin drape film and a thick adhesive coating |
AU2013371549B2 (en) | 2013-01-03 | 2018-07-19 | Solventum Intellectual Properties Company | Recharging negative-pressure wound therapy |
JP6474731B2 (ja) | 2013-01-03 | 2019-02-27 | ケーシーアイ ライセンシング インコーポレイテッド | 吸湿性シール |
EP2945660B1 (en) | 2013-01-16 | 2020-08-19 | KCI Licensing, Inc. | Manually-actuated reduced pressure treatment system with audible leak indicator |
EP3607977A1 (en) | 2013-01-16 | 2020-02-12 | KCI Licensing, Inc. | Ion exchange enhanced absorbent systems |
CA2893670A1 (en) | 2013-01-16 | 2014-07-24 | Kci Licensing, Inc. | Dressing with asymmetric absorbent core for negative pressure wound therapy |
WO2014163719A1 (en) | 2013-03-12 | 2014-10-09 | Kci Licensing, Inc. | Apparatus and method for identifying alternative cell chemistries for batteries |
ES2817834T3 (es) | 2013-03-12 | 2021-04-08 | 3M Innovative Properties Co | Sistema que utiliza el vacío para favorecer la curación de esguinces |
EP2968700B1 (en) | 2013-03-13 | 2019-07-24 | KCI Licensing, Inc. | Collapsible canister for use with reduced pressure therapy device |
WO2014163733A2 (en) | 2013-03-13 | 2014-10-09 | Kci Licensing, Inc. | Expandable fluid collection canister |
WO2014163751A2 (en) | 2013-03-13 | 2014-10-09 | Kci Licensing, Inc. | System and method for bodily fluid collection |
EP2968019B1 (en) | 2013-03-14 | 2020-07-22 | KCI Licensing, Inc. | Compression therapy apparatus |
US9283118B2 (en) | 2013-03-14 | 2016-03-15 | Kci Licensing, Inc. | Absorbent dressing with hybrid drape |
CA2901890A1 (en) | 2013-03-14 | 2014-09-18 | Kci Licensing, Inc. | Absorbent dressing and method of making the same |
US9427430B2 (en) | 2013-03-14 | 2016-08-30 | Kci Licensing, Inc. | Compression bandage having an integrated strain gauge |
EP2968704B1 (en) | 2013-03-14 | 2020-07-15 | KCI Licensing, Inc. | Negative pressure therapy with dynamic profile capability |
WO2014158529A1 (en) | 2013-03-14 | 2014-10-02 | Kci Licensing, Inc. | A fluid collection canister with integrated moisture trap |
EP2968703B1 (en) | 2013-03-14 | 2019-04-10 | KCI Licensing, Inc. | Micro-porous conduit |
WO2014145993A2 (en) | 2013-03-15 | 2014-09-18 | Kci Licensing Inc. | Topical vacuum-press surgical incisional dressings, surgical adjuncts, hybrids and composites |
EP3804742A1 (en) | 2013-03-15 | 2021-04-14 | 3M Innovative Properties Company | Wound healing compositions |
US10492956B2 (en) | 2013-03-15 | 2019-12-03 | Kci Licensing, Inc. | Topical vacuum-press surgical incisional dressings, surgical adjuncts, hybrids and composites |
WO2014145014A1 (en) | 2013-03-15 | 2014-09-18 | Spiracur Inc. | Vacuum cartridge with integrated valve |
EP3241573B1 (en) | 2013-03-18 | 2021-04-28 | 3M Innovative Properties Company | System for multiple direction flexible inline canister |
WO2015006041A1 (en) | 2013-07-10 | 2015-01-15 | Kci Licensing, Inc. | Manually powered, regulated, negative pressure pump with adapter for external pressure source |
AU2014290685B2 (en) | 2013-07-18 | 2018-12-13 | Kci Licensing, Inc. | Fluid volume measurement using canister resonance for reduced pressure therapy systems |
EP3578209B1 (en) | 2013-08-26 | 2023-12-20 | 3M Innovative Properties Company | Dressing interface with moisture controlling feature and sealing function |
EP3536246A1 (en) | 2013-09-25 | 2019-09-11 | KCI Licensing, Inc. | Apparatuses & methods for inline collection of a fluid specimen |
US10517518B2 (en) | 2013-09-25 | 2019-12-31 | Kci Licensing, Inc. | Apparatuses and methods for inline collection of a fluid specimen |
EP3049147B1 (en) | 2013-09-25 | 2021-02-17 | 3M Innovative Properties Company | Apparatuses for inline collection of a fluid specimen |
US10016543B2 (en) | 2013-10-02 | 2018-07-10 | Kci Licensing, Inc. | Disposable reduced-pressure therapy system with electronic feedback |
WO2015051018A2 (en) | 2013-10-02 | 2015-04-09 | Kci Licensing, Inc. | Disposable reduced-pressure therapy system with mechanical feedback |
WO2015065742A1 (en) | 2013-10-28 | 2015-05-07 | Kci Licensing, Inc. | Hybrid sealing tape |
EP3821859A1 (en) | 2013-10-30 | 2021-05-19 | 3M Innovative Properties Co. | Dressing with differentially sized perforations |
EP3656362A1 (en) | 2013-10-30 | 2020-05-27 | KCI Licensing, Inc. | Condensate absorbing and dissipating system related application |
US9956120B2 (en) | 2013-10-30 | 2018-05-01 | Kci Licensing, Inc. | Dressing with sealing and retention interface |
EP3062833B1 (en) | 2013-10-30 | 2019-04-17 | KCI Licensing, Inc. | Absorbent conduit and system |
EP3082893B8 (en) | 2013-12-18 | 2017-09-13 | KCI Licensing, Inc. | Autonomous fluid instillation system with tissue site pressure monitoring |
EP3939554A1 (en) | 2014-02-11 | 2022-01-19 | 3M Innovative Properties Company | Devices for applying closed incision negative pressure wound therapy |
US10610623B2 (en) | 2014-02-14 | 2020-04-07 | Kci Licensing, Inc. | Systems and methods for increasing absorbent capacity of a dressing |
WO2015126702A1 (en) | 2014-02-20 | 2015-08-27 | Kci Licensing, Inc. | Method and system to evacuate one or more dressing using two or more vacuum pumps |
WO2015130471A1 (en) | 2014-02-28 | 2015-09-03 | Kci Licensing, Inc. | Hybrid drape having a gel-coated perforated mesh |
US11026844B2 (en) | 2014-03-03 | 2021-06-08 | Kci Licensing, Inc. | Low profile flexible pressure transmission conduit |
US10406266B2 (en) | 2014-05-02 | 2019-09-10 | Kci Licensing, Inc. | Fluid storage devices, systems, and methods |
WO2015172104A1 (en) | 2014-05-09 | 2015-11-12 | Kci Licensing, Inc. | Debriding dressing for use with negative pressure and fluid instillation |
WO2015172111A1 (en) | 2014-05-09 | 2015-11-12 | Kci Licensing, Inc. | Disruptive dressing for use with negative pressure and fluid instillation |
US10898217B2 (en) | 2014-05-09 | 2021-01-26 | Kci Licensing, Inc. | Dressing providing apertures with multiple orifice sizes for negative-pressure therapy |
CN111134959B (zh) | 2014-05-09 | 2022-08-16 | 3M创新知识产权公司 | 具有用于线性组织部位的收缩层的敷件 |
US10335184B2 (en) | 2014-06-04 | 2019-07-02 | Kci Licensing, Inc. | Negative pressure tissue debridement devices, systems, and methods |
CN106535842B (zh) | 2014-06-05 | 2020-07-17 | 凯希特许有限公司 | 具有流体获取和分配特征的敷料 |
EP3851134A1 (en) | 2014-07-18 | 2021-07-21 | 3M Innovative Properties Company | Disposable cartridge for vacuum actuated fluid delivery |
WO2016010792A1 (en) | 2014-07-18 | 2016-01-21 | Kci Licensing, Inc. | Instillation cartridge and therapy system for negative-pressure therapy and instillation therapy |
WO2016010793A1 (en) | 2014-07-18 | 2016-01-21 | Kci Licensing, Inc. | Instillation cartridge for vacuum actuated fluid delivery |
CA2955958A1 (en) | 2014-07-24 | 2016-01-28 | Kci Licensing, Inc. | Combination fluid instillation and negative pressure dressing |
CA2955060A1 (en) | 2014-08-11 | 2016-02-18 | Kci Licensing, Inc. | Protease modulating wound interface layer for use with negative pressure wound therapy |
EP3191150B1 (en) | 2014-09-10 | 2019-10-30 | KCI Licensing, Inc. | Therapy apparatus with integrated fluid conductors and noise attenuation |
EP3488881B1 (en) | 2014-09-10 | 2023-08-30 | 3M Innovative Properties Company | Dynamic negative-pressure therapy with instillation |
EP3446665B1 (en) | 2014-10-06 | 2021-12-15 | 3M Innovative Properties Company | Ion exchange absorbent systems, apparatuses |
CN114533974A (zh) | 2014-10-14 | 2022-05-27 | 3M创新知识产权公司 | 用于监测对负压伤口治疗的合规使用的系统 |
EP3536357B1 (en) | 2014-10-24 | 2021-02-24 | 3M Innovative Properties Company | Negative-pressure therapy with pneumatically-actuated instillation |
WO2016100098A1 (en) | 2014-12-17 | 2016-06-23 | Kci Licensing, Inc. | Dressing with offloading capability |
US10124093B1 (en) | 2015-01-16 | 2018-11-13 | Kci Licensing, Inc. | System and method for hybrid control of reduced pressures delivered to a tissue site |
WO2016126444A1 (en) | 2015-02-02 | 2016-08-11 | Kci Licensing, Inc. | Customizable closed tissue site dressing for improved postoperative removal |
US11207458B2 (en) | 2015-02-02 | 2021-12-28 | Kci Licensing, Inc. | Pressure-operated switch |
EP3597228B1 (en) | 2015-04-06 | 2023-05-03 | 3M Innovative Properties Company | Apparatus for controlling negative-pressure treatment |
WO2016179575A1 (en) | 2015-05-07 | 2016-11-10 | Kci Liensing, Inc. | A controlled release iodine structure for use with wound care |
US11246975B2 (en) | 2015-05-08 | 2022-02-15 | Kci Licensing, Inc. | Low acuity dressing with integral pump |
EP3294158B1 (en) | 2015-05-08 | 2020-05-06 | KCI Licensing, Inc. | Wound debridement by irrigation with ultrasonically activated microbubbles |
GB201509044D0 (en) | 2015-05-27 | 2015-07-08 | Systagenix Wound Man Ip Co Bv | Composition |
EP3313469B1 (en) | 2015-06-29 | 2019-01-02 | KCI Licensing, Inc. | Apparatus for negative-pressure therapy and irrigation |
EP3313468B1 (en) | 2015-06-29 | 2019-01-23 | KCI Licensing, Inc. | Apparatus for irrigation with negative pressure |
WO2017004423A1 (en) | 2015-06-30 | 2017-01-05 | Kci Licensing, Inc. | Apparatus and method for locating fluid leaks in a reduced pressure dressing utilizing a remote device |
EP3560529A1 (en) | 2015-07-07 | 2019-10-30 | KCI Licensing, Inc. | Multi-orientation fluid management |
WO2017011204A1 (en) | 2015-07-14 | 2017-01-19 | Kci Licensing, Inc. | Medical dressing interface devices, systems, and methods |
EP3741335B1 (en) | 2015-09-01 | 2023-05-24 | KCI Licensing, Inc. | Dressing with increased apposition force |
WO2017048866A1 (en) | 2015-09-17 | 2017-03-23 | Kci Licensing, Inc. | Hybrid silicone and acrylic adhesive cover for use with wound treatment |
GB201518348D0 (en) | 2015-10-16 | 2015-12-02 | Systagenix Wound Man Ip Co Bv | Composition |
US11241338B2 (en) | 2015-11-03 | 2022-02-08 | Kci Licensing, Inc. | Apparatus and methods for regulating negative pressure in a negative pressure wound therapy system |
WO2017087157A1 (en) | 2015-11-17 | 2017-05-26 | Kci Licensing, Inc. | Ambulatory therapy system incorporating activity and environmental sensing capability |
WO2017087173A1 (en) | 2015-11-18 | 2017-05-26 | Kci Licensing, Inc. | Medical drapes and methods for reducing trauma on removal |
US11253640B2 (en) | 2015-11-19 | 2022-02-22 | Kci Licensing, Inc. | Fluid management apparatus and method |
WO2017087163A1 (en) | 2015-11-20 | 2017-05-26 | Kci Licensing, Inc. | Medical system with flexible fluid storage bridge |
US11878106B2 (en) | 2015-12-29 | 2024-01-23 | 3M Innovative Properties Company | System and methods for the treatment of wounds with negative pressure and instillation of peroxide pyruvic acid |
CA3007003A1 (en) | 2015-12-29 | 2017-07-06 | Kci Licensing, Inc. | System and methods for treatment of wounds with negative pressure and peroxy pyruvic acid |
WO2017119996A1 (en) | 2016-01-06 | 2017-07-13 | Kci Liecensing, Inc. | System and methods for the treatment of wounds with dressing having closed cells |
US11395874B2 (en) | 2016-01-28 | 2022-07-26 | Kci Licensing, Inc. | Sequential collapse waveform dressing |
EP3407928B1 (en) | 2016-01-28 | 2020-04-01 | KCI Licensing, Inc. | Fluid container with pressure regulation |
US10973963B2 (en) | 2016-02-09 | 2021-04-13 | Kci Licensing, Inc. | Negative-pressure therapy apparatus with push-to-release actuator |
WO2017160412A1 (en) | 2016-03-17 | 2017-09-21 | Kci Licensing, Inc. | Systems and methods for treating a tissue site using one manifold and multiple therapy units |
EP3442613A1 (en) | 2016-04-12 | 2019-02-20 | KCI Licensing, Inc. | Wound drain with fluid management |
WO2017196927A1 (en) | 2016-05-10 | 2017-11-16 | Kci Licensing, Inc. | Flexible means for determining the extent of debridement required to remove non-viable tissue |
US11273078B2 (en) | 2016-05-20 | 2022-03-15 | Kci Licensing, Inc. | Replaceable dressing and method for viewing a tissue site |
WO2017209945A1 (en) | 2016-06-03 | 2017-12-07 | Kci Licensing, Inc. | Negative-pressure therapy with disposable instillation pump chamber |
WO2018013321A1 (en) | 2016-06-28 | 2018-01-18 | Kci Licensing, Inc. | Semi-automated mobile system for wound image segmentation |
EP3484425B1 (en) | 2016-07-14 | 2021-02-17 | 3M Innovative Properties Company | Medical dressing full indicator |
EP3500221B1 (en) | 2016-08-16 | 2020-12-30 | Systagenix Wound Management, Limited | Collagen/orc dressing encapsulated within a bioresorbable envelope |
US11730457B2 (en) | 2016-08-18 | 2023-08-22 | Kci Licensing, Inc. | In-line diagnostic tool for negative-pressure therapy |
USD871568S1 (en) | 2016-12-02 | 2019-12-31 | Kci Licensing, Inc. | Negative pressure apparatus module |
CN110267630B (zh) | 2017-01-09 | 2021-12-28 | 3M创新知识产权公司 | 用于改善流体移除的伤口敷料层 |
CN110198747A (zh) | 2017-01-27 | 2019-09-03 | 凯希特许有限公司 | 具有滴注能力的多层关腹敷料 |
CA3049463A1 (en) | 2017-02-14 | 2018-08-23 | Kci Licensing, Inc. | Dressing with variable contraction zones |
EP3592399A1 (en) | 2017-03-06 | 2020-01-15 | KCI Licensing, Inc. | System and method for improving battery life of portable negative-pressure therapy through hysteresis control |
US11452809B2 (en) | 2017-04-04 | 2022-09-27 | Kcl Licensing, Inc. | Apparatuses, systems, and methods for the treatment of a tissue site with negative pressure and oxygen |
US11850126B2 (en) | 2017-05-16 | 2023-12-26 | 3M Innovative Properties Company | Absorbent negative-pressure dressing system for use with post-surgical breast wounds |
WO2018226705A1 (en) | 2017-06-07 | 2018-12-13 | Kci Licensing, Inc. | Composite dressings for improved granulation and reduced maceration with negative-pressure treatment |
EP3634337B1 (en) | 2017-06-07 | 2023-05-24 | 3M Innovative Properties Company | Methods for manufacturing and assembling dual material tissue interface for negative-pressure therapy |
US11471584B2 (en) | 2017-06-07 | 2022-10-18 | Kci Licensing, Inc. | Composite dressings for improved granulation and reduced maceration with negative-pressure treatment |
CA3065521A1 (en) | 2017-06-07 | 2018-12-13 | Kci Licensing, Inc. | Multi-layer wound filler for extended wear time |
CN110944607A (zh) | 2017-06-07 | 2020-03-31 | 凯希特许有限公司 | 制造和组装用于负压疗法的双材料组织接口的方法 |
WO2018226624A1 (en) | 2017-06-07 | 2018-12-13 | Kci Licensing, Inc. | Composite dressings for improved granulation and reduced maceration with negative-pressure treatment |
CA3065529A1 (en) | 2017-06-07 | 2018-12-13 | Kci Licensing, Inc. | Composite dressings for improved granulation reduced maceration with negative-pressure treatment |
RU2019142320A (ru) | 2017-06-07 | 2021-07-09 | Кейсиай ЛАЙСЕНСИНГ, ИНК. | Отслаиваемый и размещаемый на месте перевязочный материал для терапии при отрицательном давлении |
CA3065379A1 (en) | 2017-06-07 | 2018-12-13 | Kci Licensing, Inc. | Systems, apparatuses, and methods for negative-pressure treatment with reduced tissue in-growth |
US10994062B2 (en) | 2017-07-18 | 2021-05-04 | Kci Licensing, Inc. | Negative-pressure therapy with adjustable instillation pump chamber |
US11737913B2 (en) | 2017-07-28 | 2023-08-29 | Kci Licensing, Inc. | Systems and methods for temperature-contrast therapy |
WO2019027933A1 (en) | 2017-07-31 | 2019-02-07 | Kci Usa, Inc. | BIOREABORBABLE DRESSING WITH STRUCTURAL SUPPORT |
WO2019027644A1 (en) | 2017-07-31 | 2019-02-07 | Kci Licensing, Inc. | WOUND CLEANING TOOL WITH FLUID DELIVERY AND REMOVAL CAPABILITIES |
WO2019027731A1 (en) | 2017-08-02 | 2019-02-07 | Kci Licensing, Inc. | MULTILAYER COMPARTMENT DRESSING AND NEGATIVE PRESSURE PROCESSING METHOD |
JP2020532378A (ja) | 2017-09-05 | 2020-11-12 | ケーシーアイ ライセンシング インコーポレイテッド | フィルタリング層を使用して光不活性化接着ドレープの早期の光不活性化を軽減するシステム及び方法 |
WO2019055176A1 (en) | 2017-09-14 | 2019-03-21 | Kci Licensing, Inc. | OXYGEN THERAPY WITH FLUID REMOVAL |
EP3687467B1 (en) | 2017-09-29 | 2022-02-23 | 3M Innovative Properties Company | Dressing exhibiting low tissue ingrowth and negative-pressure treatment method |
CA3082020A1 (en) | 2017-10-23 | 2019-05-02 | Kci Licensing, Inc. | Low profile distribution components for wound therapy |
US11432967B2 (en) | 2017-10-23 | 2022-09-06 | Kci Licensing, Inc. | Fluid bridge for simultaneous application of negative pressure to multiple tissue sites |
CN111447901A (zh) | 2017-10-24 | 2020-07-24 | 凯希特许有限公司 | 清创伤口敷料和使用清创伤口敷料的系统 |
US11969317B2 (en) | 2017-10-26 | 2024-04-30 | 3M Innovative Properties Company | Wound dressing with welded elastic structure |
WO2019083966A1 (en) | 2017-10-26 | 2019-05-02 | Kci Licensing, Inc. | NEGATIVE PRESSURE WELD THERAPY DEVICE WITH AUTOMATED FILTER BLEED |
CA3078733C (en) | 2017-10-27 | 2023-02-21 | Kci Licensing, Inc. | Contoured foam dressing shaped for providing negative pressure to incisions in the breast |
WO2019089118A1 (en) | 2017-10-30 | 2019-05-09 | Kci Licensing, Inc. | Systems, apparatuses, and methods for negative-pressure treatment with pressure delivery indication |
WO2019089522A1 (en) | 2017-11-02 | 2019-05-09 | Systagenix Wound Management, Limited | Wound dressing with humidity colorimeter sensor |
US11771599B2 (en) | 2017-11-03 | 2023-10-03 | Kci Licensing, Inc. | Extended wear-time dressing |
EP3703636A1 (en) | 2017-11-03 | 2020-09-09 | Systagenix Wound Management, Limited | Nutrient-enriched dressing |
WO2019094466A1 (en) | 2017-11-09 | 2019-05-16 | Kci Usa, Inc. | Multilayered primary contact wound dressing |
CN111565769B (zh) | 2017-12-20 | 2022-10-11 | 3M创新知识产权公司 | 用于伤口治疗装置的组合吊架臂延伸部及泵盖 |
US11754063B2 (en) | 2018-01-02 | 2023-09-12 | Kci Licensing, Inc. | Negative pressure wound therapy device with silent piezoelectric pump |
WO2019140448A1 (en) | 2018-01-15 | 2019-07-18 | Kci Licensing, Inc. | Systems and methods for controlling negative pressure therapy using properties of fluids from a tissue site |
WO2019140449A1 (en) | 2018-01-15 | 2019-07-18 | Kci Licensing, Inc. | Systems and methods for controlling negative pressure therapy with fluid instillation therapy |
US11944738B2 (en) | 2018-01-15 | 2024-04-02 | Solventum Intellectual Properties Company | Systems and methods for sensing properties of wound exudates |
US11554206B2 (en) | 2018-02-01 | 2023-01-17 | Kci Licensing, Inc. | Negative pressure wound therapy device using a vacuum generating pump providing audible therapy feedback |
US11452640B2 (en) | 2018-02-23 | 2022-09-27 | Kci Licensing, Inc. | Dressing with bolster for linear tissue sites |
JP2021517021A (ja) | 2018-03-12 | 2021-07-15 | スリーエム イノベイティブ プロパティズ カンパニー | 区画空間で用いられる異なる表面特徴部を用いたドレッシング |
US20210077671A1 (en) | 2018-03-29 | 2021-03-18 | Kci Licensing, Inc. | Wound therapy system with wound volume estimation |
US11040127B2 (en) | 2018-04-09 | 2021-06-22 | Kci Licensing, Inc. | Abdominal dressing with mechanism for fascial closure |
USD878609S1 (en) | 2018-04-09 | 2020-03-17 | Kci Licensing, Inc. | Compressive layer for abdominal wound dressing |
USD867907S1 (en) | 2018-04-12 | 2019-11-26 | Kci Licensing, Inc. | Cutting template |
WO2019199596A1 (en) | 2018-04-12 | 2019-10-17 | Kci Licensing, Inc. | Cutting template for a negative pressure wound therapy drape |
USD886648S1 (en) | 2018-04-12 | 2020-06-09 | Kci Licensing, Inc. | Cutting template |
WO2019199798A1 (en) | 2018-04-13 | 2019-10-17 | Kci Licensing, Inc. | Compression strain and negative pressure delivery indicator for a wound dressing |
JP7346443B2 (ja) | 2018-04-13 | 2023-09-19 | ケーシーアイ ライセンシング インコーポレイテッド | 陰圧閉鎖された切開部ドレッシングにおける付加及び患者の四肢運動を動的に測定する方法 |
WO2019200035A1 (en) | 2018-04-13 | 2019-10-17 | Kci Licensing, Inc. | Npwt system with selectively controllable airflow |
EP3787705B1 (en) | 2018-05-03 | 2023-07-19 | KCI Licensing, Inc. | Negative pressure wound therapy system with detection of full absorbant dressing |
US11446429B2 (en) | 2018-05-22 | 2022-09-20 | Kci Licensing, Inc. | Systems and methods for managing pneumatic pathways in integrated multilayer wound dressings |
US12053205B2 (en) | 2018-05-25 | 2024-08-06 | Solventum Intellectual Properties Company | Method and system for providing active tissue site debridement |
WO2019226900A1 (en) | 2018-05-25 | 2019-11-28 | Kci Licensing, Inc. | Method and system for providing active tissue site debridement |
US11701264B2 (en) | 2018-06-27 | 2023-07-18 | Kci Licensing, Inc. | Wound therapy system with wound volume estimation using geometric approximation |
WO2020005536A1 (en) | 2018-06-27 | 2020-01-02 | Kci Licensing, Inc. | Wound dressing for wound volume estimation |
WO2020005577A1 (en) | 2018-06-28 | 2020-01-02 | Kci Licensing, Inc. | Distributed negative pressure wound therapy system incorporating an absorbent dressing and piezo-electric pump |
US11896462B2 (en) | 2018-06-28 | 2024-02-13 | 3M Innovative Properties Company | Highly conformable wound dressing |
US12070545B2 (en) | 2018-07-16 | 2024-08-27 | Solventum Intellectual Properties Company | Wound therapy system with conduit blockage detection |
WO2020018300A1 (en) | 2018-07-16 | 2020-01-23 | Kci Licensing, Inc. | Fluid instillation apparatus for use with negative-pressure system incorporating wireless therapy monitoring |
EP3823573B1 (en) | 2018-07-18 | 2022-03-30 | KCI Licensing, Inc. | Systems for light deactivation and removal of light deactivated adhesive drapes |
US11383019B2 (en) | 2018-07-18 | 2022-07-12 | Kci Licensing, Inc. | Wound view dressing and customization kit |
US11534343B2 (en) | 2018-07-31 | 2022-12-27 | Kci Licensing, Inc. | Devices and methods for preventing localized pressure points in distribution components for tissue therapy |
US11253401B2 (en) | 2018-08-03 | 2022-02-22 | Kci Licensing, Inc. | Wound therapy system with wound volume estimation |
EP3840794B1 (en) | 2018-08-21 | 2023-10-11 | 3M Innovative Properties Company | System for utilizing pressure decay to determine available fluid capacity in a negative pressure dressing |
US11278454B2 (en) | 2018-08-24 | 2022-03-22 | Kci Licensing, Inc. | Methods of managing moisture when using a low profile wound connection conduit |
US11878135B2 (en) | 2018-08-27 | 2024-01-23 | Systagenix Wound Management, Limited | Material application system for tunneling wounds that allows co-delivery of solutions |
US11752039B2 (en) | 2018-08-28 | 2023-09-12 | Systagenix Wound Management, Limited | Dressings for reduced tissue ingrowth |
WO2020046589A1 (en) | 2018-08-30 | 2020-03-05 | Kci Licensing, Inc. | Electro-mechanical pump for negative-pressure treatment |
CN112584802B (zh) | 2018-09-04 | 2023-03-17 | 凯希特许有限公司 | 伤口治疗装置和套件 |
CN112912117A (zh) | 2018-09-12 | 2021-06-04 | 凯希特许有限公司 | 采用滴注治疗和动态压力控制的伤口治疗系统 |
EP3852828B1 (en) | 2018-09-17 | 2024-04-10 | Solventum Intellectual Properties Company | Fluid ingress protection for npwt device |
USD961782S1 (en) | 2018-10-23 | 2022-08-23 | Kci Licensing, Inc. | Low-profile fluid conductor for tissue therapy |
USD884195S1 (en) | 2018-10-25 | 2020-05-12 | Kci Licensing, Inc. | Therapy device |
USD888255S1 (en) | 2018-10-25 | 2020-06-23 | Kci Licensing, Inc. | Therapy device |
EP3874904B1 (en) | 2018-10-31 | 2024-06-26 | Solventum Intellectual Properties Company | Short range peer to peer network for negative pressure wound therapy devices |
WO2020091831A1 (en) | 2018-11-02 | 2020-05-07 | Kci Licensing, Inc. | Wound therapy tubeset system for wound volume estimation |
CN113507907B (zh) | 2018-11-13 | 2023-04-21 | 3M创新知识产权公司 | 用于伤口治疗的薄型分配部件 |
EP3880267A1 (en) | 2018-11-14 | 2021-09-22 | KCI Licensing, Inc. | Apparatus, system, and method for mechanical indication of pressure |
USD895127S1 (en) | 2018-11-15 | 2020-09-01 | Kci Licensing, Inc. | Wound therapy training device |
US11238756B2 (en) | 2018-11-15 | 2022-02-01 | Kci Licensing, Inc. | Anatomical training and demonstration model for negative pressure and instillation therapy |
US20220001095A1 (en) | 2018-11-19 | 2022-01-06 | Kci Licensing, Inc. | System And Apparatus For Preventing Therapy Unit Contamination |
US12036096B2 (en) | 2018-11-20 | 2024-07-16 | Solventum Intellectual Properties Company | Super-absorbent advanced wound dressing with dressing full indication |
WO2020139541A1 (en) | 2018-12-26 | 2020-07-02 | Kci Licensing, Inc. | Wound based sensor system with ambient atmosphere monitoring |
US11771817B2 (en) | 2019-01-25 | 2023-10-03 | Kci Licensing, Inc. | Systems and methods for instillation purging |
WO2020159823A1 (en) | 2019-01-29 | 2020-08-06 | Kci Licensing, Inc. | Removable and replaceable dressing interface for a negative-pressure therapy system |
WO2020162953A1 (en) | 2019-02-06 | 2020-08-13 | Kci Licensing, Inc. | Wound therapy system with internal alternating orifice |
USD907216S1 (en) | 2019-02-07 | 2021-01-05 | Kci Licensing, Inc. | Therapy device |
US12005179B2 (en) | 2019-02-08 | 2024-06-11 | Solventum Intellectual Properties Company | Printed absorbent for use in wound fluid collection canisters |
WO2020176331A1 (en) | 2019-02-28 | 2020-09-03 | Kci Licensing, Inc. | Negative pressure wound therapy leak alarm system |
USD903093S1 (en) | 2019-03-08 | 2020-11-24 | Kci Licensing, Inc. | Negative-pressure therapy device module |
EP3938003B1 (en) | 2019-03-11 | 2024-09-25 | Solventum Intellectual Properties Company | Wound therapy system with fluid canister volume detection |
US11471573B2 (en) | 2019-03-27 | 2022-10-18 | Kci Licensing, Inc. | Wound therapy system with wound volume estimation |
US11426506B2 (en) | 2019-03-27 | 2022-08-30 | Kci Licensing, Inc. | Wound therapy system with wound volume estimation |
US11344666B2 (en) | 2019-03-29 | 2022-05-31 | Kci Licensing, Inc. | Negative-pressure treatment with area stabilization |
CN113660918A (zh) | 2019-03-29 | 2021-11-16 | 凯希特许有限公司 | 具有区域稳定性的负压治疗 |
US12042360B2 (en) | 2019-04-22 | 2024-07-23 | Solventum Intellectual Properties Company | Transparent peel and place dressing for negative-pressure therapy |
US11925746B2 (en) | 2019-05-07 | 2024-03-12 | 3M Innovative Properties Company | Negative pressure wound therapy system with dynamic fluid delivery |
USD895787S1 (en) | 2019-05-10 | 2020-09-08 | Kci Licensing, Inc. | Negative pressure therapy device |
WO2020231936A1 (en) | 2019-05-14 | 2020-11-19 | Kci Licensing, Inc. | Wound therapy system with humidifier |
WO2020232239A1 (en) | 2019-05-16 | 2020-11-19 | Kci Licensing, Inc. | Connection assembly with perforated film layer for absorbent negative pressure dressing |
CN114144209A (zh) | 2019-06-20 | 2022-03-04 | 凯希特许有限公司 | 具有减少的组织向内生长和延长的磨损时间的用于负压治疗的系统、装置和方法 |
EP4021525A1 (en) | 2019-08-30 | 2022-07-06 | KCI Licensing, Inc. | Dressing interface with micro-needles for negative-pressure treatment |
US11938263B2 (en) | 2019-09-24 | 2024-03-26 | Solventum Intellectual Properties Company | Apparatuses, systems, and methods for pump control in therapy devices |
US11833290B2 (en) | 2019-11-01 | 2023-12-05 | Kci Licensing, Inc. | Dressing design incorporating formed 3D textile for the delivery of therapeutic negative pressure and compressive forces to a treatment site |
USD884906S1 (en) | 2019-12-23 | 2020-05-19 | Kci Licensing, Inc. | Wound dressing |
EP4125751B1 (en) | 2020-03-24 | 2023-12-20 | KCI Manufacturing Unlimited Company | Negative-pressure wound therapy dressing with zone of ambient pressure |
US11286556B2 (en) * | 2020-04-14 | 2022-03-29 | Applied Materials, Inc. | Selective deposition of titanium films |
USD945629S1 (en) | 2020-09-08 | 2022-03-08 | Kci Manufacturing Unlimited Company | Therapy device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4804636A (en) * | 1985-05-01 | 1989-02-14 | Texas Instruments Incorporated | Process for making integrated circuits having titanium nitride triple interconnect |
US4668530A (en) * | 1985-07-23 | 1987-05-26 | Massachusetts Institute Of Technology | Low pressure chemical vapor deposition of refractory metal silicides |
US5084417A (en) * | 1989-01-06 | 1992-01-28 | International Business Machines Corporation | Method for selective deposition of refractory metals on silicon substrates and device formed thereby |
JPH0364473A (ja) * | 1989-04-25 | 1991-03-19 | Varian Assoc Inc | コールドウォールcvd反応器における窒化チタンの蒸着 |
EP0450106A1 (de) * | 1990-03-30 | 1991-10-09 | Siemens Aktiengesellschaft | Verfahren und Vorrichtung zur Herstellung einer Titannitrid-Schicht für höchstintegrierte Schaltungen mittels chemischer Dampfphasenabscheidung |
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