JPH0521007B2 - - Google Patents
Info
- Publication number
- JPH0521007B2 JPH0521007B2 JP59183637A JP18363784A JPH0521007B2 JP H0521007 B2 JPH0521007 B2 JP H0521007B2 JP 59183637 A JP59183637 A JP 59183637A JP 18363784 A JP18363784 A JP 18363784A JP H0521007 B2 JPH0521007 B2 JP H0521007B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- vacuum pump
- exhaust gas
- chlorine
- magnesium oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000460 chlorine Substances 0.000 claims description 11
- 229910052801 chlorine Inorganic materials 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 8
- 239000011737 fluorine Substances 0.000 claims description 8
- 229910052731 fluorine Inorganic materials 0.000 claims description 8
- 239000000395 magnesium oxide Substances 0.000 claims description 7
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 7
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 7
- 238000001312 dry etching Methods 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 description 36
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000002912 waste gas Substances 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000000945 filler Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8659—Removing halogens or halogen compounds
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59183637A JPS6161619A (ja) | 1984-09-04 | 1984-09-04 | 排ガスの処理方法 |
| US06/772,431 US4673558A (en) | 1984-09-04 | 1985-09-04 | Method for treating a waste gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59183637A JPS6161619A (ja) | 1984-09-04 | 1984-09-04 | 排ガスの処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161619A JPS6161619A (ja) | 1986-03-29 |
| JPH0521007B2 true JPH0521007B2 (ru) | 1993-03-23 |
Family
ID=16139263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59183637A Granted JPS6161619A (ja) | 1984-09-04 | 1984-09-04 | 排ガスの処理方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4673558A (ru) |
| JP (1) | JPS6161619A (ru) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6430626A (en) * | 1987-07-28 | 1989-02-01 | Ebara Res Co Ltd | Treatment of exhaust gas |
| US5244144A (en) * | 1989-08-23 | 1993-09-14 | Showa Aluminum Kabushiki Kaisha | Method for brazing aluminum materials |
| JPH0340549U (ru) * | 1989-08-30 | 1991-04-18 | ||
| JPH082598Y2 (ja) * | 1989-08-30 | 1996-01-29 | 株式会社島津製作所 | 温度サイクル試験装置 |
| JPH0743639Y2 (ja) * | 1989-11-30 | 1995-10-09 | 株式会社島津製作所 | 温度サイクル試験装置 |
| JPH03202128A (ja) * | 1989-12-28 | 1991-09-03 | Ebara Res Co Ltd | Ｎｆ↓３の除害方法 |
| JPH06177B2 (ja) * | 1990-02-05 | 1994-01-05 | 株式会社荏原総合研究所 | Ｃ１ｆ▲下３▼を含有する排ガスの処理方法 |
| US5401473A (en) * | 1990-07-09 | 1995-03-28 | Daidousanso Co., Ltd. | Method and apparatus for treatment of NF3 gas |
| US5176889A (en) * | 1990-07-09 | 1993-01-05 | Daidousanso Co., Ltd. | Method and apparatus for treatment of NF3 gas |
| JPH04156919A (ja) * | 1990-10-19 | 1992-05-29 | Ebara Res Co Ltd | ハロゲン系化合物を含有する排ガスの処理方法 |
| JPH05277341A (ja) * | 1991-03-04 | 1993-10-26 | Iwatani Internatl Corp | フッ化窒素排ガスの除害装置 |
| US5688479A (en) * | 1994-12-22 | 1997-11-18 | Uop | Process for removing HCl from hydrocarbon streams |
| RU2159666C1 (ru) | 1999-11-24 | 2000-11-27 | Дыкман Аркадий Самуилович | Способ очистки промышленных газовых выбросов |
| JP4755364B2 (ja) * | 2001-06-29 | 2011-08-24 | サンワケミカル株式会社 | ハロゲン単体とハロゲン化物との除去方法 |
| JP5008801B2 (ja) * | 2001-04-23 | 2012-08-22 | サンワケミカル株式会社 | ハロゲン系ガスの除去方法 |
| CN100344345C (zh) | 2001-10-12 | 2007-10-24 | 旭硝子株式会社 | 卤素类气体的除去方法 |
| JP2011062697A (ja) * | 2010-11-26 | 2011-03-31 | Sanwa Chemical Kk | ハロゲン系ガスの除去方法 |
| KR101726299B1 (ko) | 2016-05-25 | 2017-04-12 | (주)중앙플랜트 | 수평형 습식 스크러버용 클린 필터를 포함하는 조립체 및 그의 구성방법 |
| KR102204092B1 (ko) | 2019-01-14 | 2021-01-18 | (주)중앙플랜트 | 수평형 습식 스크러버용 클린 필터의 자동세척장치 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50139076A (ru) * | 1974-04-25 | 1975-11-06 | ||
| JPS5495972A (en) * | 1977-12-12 | 1979-07-28 | Babcock & Wilcox Ag | Method and apparatus for removing by adsorbing sulfer dioxide chlorine and fluorine from waste gas |
| JPS5667524A (en) * | 1979-11-09 | 1981-06-06 | Sumitomo Metal Mining Co Ltd | Dry type treatment of gas |
| JPS56126425A (en) * | 1980-03-11 | 1981-10-03 | Kurabo Ind Ltd | Purification method for acidic waste gas |
| JPS56163740A (en) * | 1980-05-20 | 1981-12-16 | Mitsubishi Heavy Ind Ltd | Method for removing halogen substance in desorbed gas of dry desulfurization |
| JPS571422A (en) * | 1980-06-05 | 1982-01-06 | Hitachi Plant Eng & Constr Co Ltd | Dry-type purifying method for pyrolysis gas |
| JPS58166933A (ja) * | 1982-03-26 | 1983-10-03 | Onoda Cement Co Ltd | 排ガス中の酸性物質除去剤 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE560740A (ru) * | 1956-09-12 | 1958-03-11 |
-
1984
- 1984-09-04 JP JP59183637A patent/JPS6161619A/ja active Granted
-
1985
- 1985-09-04 US US06/772,431 patent/US4673558A/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50139076A (ru) * | 1974-04-25 | 1975-11-06 | ||
| JPS5495972A (en) * | 1977-12-12 | 1979-07-28 | Babcock & Wilcox Ag | Method and apparatus for removing by adsorbing sulfer dioxide chlorine and fluorine from waste gas |
| JPS5667524A (en) * | 1979-11-09 | 1981-06-06 | Sumitomo Metal Mining Co Ltd | Dry type treatment of gas |
| JPS56126425A (en) * | 1980-03-11 | 1981-10-03 | Kurabo Ind Ltd | Purification method for acidic waste gas |
| JPS56163740A (en) * | 1980-05-20 | 1981-12-16 | Mitsubishi Heavy Ind Ltd | Method for removing halogen substance in desorbed gas of dry desulfurization |
| JPS571422A (en) * | 1980-06-05 | 1982-01-06 | Hitachi Plant Eng & Constr Co Ltd | Dry-type purifying method for pyrolysis gas |
| JPS58166933A (ja) * | 1982-03-26 | 1983-10-03 | Onoda Cement Co Ltd | 排ガス中の酸性物質除去剤 |
Also Published As
| Publication number | Publication date |
|---|---|
| US4673558A (en) | 1987-06-16 |
| JPS6161619A (ja) | 1986-03-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |