JPH05171B2 - - Google Patents
Info
- Publication number
- JPH05171B2 JPH05171B2 JP62062592A JP6259287A JPH05171B2 JP H05171 B2 JPH05171 B2 JP H05171B2 JP 62062592 A JP62062592 A JP 62062592A JP 6259287 A JP6259287 A JP 6259287A JP H05171 B2 JPH05171 B2 JP H05171B2
- Authority
- JP
- Japan
- Prior art keywords
- polished
- polishing
- polishing tool
- tool
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005498 polishing Methods 0.000 claims description 107
- 230000033001 locomotion Effects 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 14
- 238000012937 correction Methods 0.000 claims description 3
- 238000012986 modification Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6259287A JPS63232932A (ja) | 1987-03-19 | 1987-03-19 | 修正研磨方法およびその装置 |
| US07/401,477 US4956944A (en) | 1987-03-19 | 1989-08-29 | Polishing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6259287A JPS63232932A (ja) | 1987-03-19 | 1987-03-19 | 修正研磨方法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63232932A JPS63232932A (ja) | 1988-09-28 |
| JPH05171B2 true JPH05171B2 (ru) | 1993-01-05 |
Family
ID=13204748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6259287A Granted JPS63232932A (ja) | 1987-03-19 | 1987-03-19 | 修正研磨方法およびその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63232932A (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101866438B1 (ko) * | 2012-06-29 | 2018-06-11 | 동우 화인켐 주식회사 | 점착제 조성물 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2513426B2 (ja) * | 1993-09-20 | 1996-07-03 | 日本電気株式会社 | ウェ―ハ研磨装置 |
| JPH10329012A (ja) * | 1997-03-21 | 1998-12-15 | Canon Inc | 研磨装置および研磨方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS618269A (ja) * | 1984-06-22 | 1986-01-14 | Canon Inc | 曲面研摩機 |
| JPS6133665A (ja) * | 1984-07-27 | 1986-02-17 | 新技術開発事業団 | 人工心肺装置におけるコラプス解消装置 |
-
1987
- 1987-03-19 JP JP6259287A patent/JPS63232932A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS618269A (ja) * | 1984-06-22 | 1986-01-14 | Canon Inc | 曲面研摩機 |
| JPS6133665A (ja) * | 1984-07-27 | 1986-02-17 | 新技術開発事業団 | 人工心肺装置におけるコラプス解消装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101866438B1 (ko) * | 2012-06-29 | 2018-06-11 | 동우 화인켐 주식회사 | 점착제 조성물 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63232932A (ja) | 1988-09-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |