JPH0517172B2 - - Google Patents

Info

Publication number
JPH0517172B2
JPH0517172B2 JP61312770A JP31277086A JPH0517172B2 JP H0517172 B2 JPH0517172 B2 JP H0517172B2 JP 61312770 A JP61312770 A JP 61312770A JP 31277086 A JP31277086 A JP 31277086A JP H0517172 B2 JPH0517172 B2 JP H0517172B2
Authority
JP
Japan
Prior art keywords
cristobalite
quartz glass
powder
meshes
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61312770A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63166730A (ja
Inventor
Kyoichi Inagi
Fujio Iwatani
Ryohei Nakamura
Toshuki Kato
Katsuhiko Kenmochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP31277086A priority Critical patent/JPS63166730A/ja
Publication of JPS63166730A publication Critical patent/JPS63166730A/ja
Publication of JPH0517172B2 publication Critical patent/JPH0517172B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/10—Melting processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/20—Wet processes, e.g. sol-gel process
    • C03C2203/24—Wet processes, e.g. sol-gel process using alkali silicate solutions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/20—Wet processes, e.g. sol-gel process
    • C03C2203/26—Wet processes, e.g. sol-gel process using alkoxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
JP31277086A 1986-12-27 1986-12-27 石英ガラスの製造方法 Granted JPS63166730A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31277086A JPS63166730A (ja) 1986-12-27 1986-12-27 石英ガラスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31277086A JPS63166730A (ja) 1986-12-27 1986-12-27 石英ガラスの製造方法

Publications (2)

Publication Number Publication Date
JPS63166730A JPS63166730A (ja) 1988-07-09
JPH0517172B2 true JPH0517172B2 (enrdf_load_stackoverflow) 1993-03-08

Family

ID=18033206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31277086A Granted JPS63166730A (ja) 1986-12-27 1986-12-27 石英ガラスの製造方法

Country Status (1)

Country Link
JP (1) JPS63166730A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02229735A (ja) * 1989-02-28 1990-09-12 Shin Etsu Chem Co Ltd 石英ガラス部材
JPH0751452B2 (ja) * 1989-07-25 1995-06-05 信越石英株式会社 シリカガラス粉粒体の製造装置
JP3751326B2 (ja) * 1994-10-14 2006-03-01 三菱レイヨン株式会社 高純度透明石英ガラスの製造方法
CN1043637C (zh) * 1996-10-03 1999-06-16 李勇彪 不透明石英玻璃管生产用的硅石粉料坨的生产方法
JP4985553B2 (ja) * 2008-06-16 2012-07-25 三菱マテリアル株式会社 シリコン溶融用ルツボ及びシリコン単結晶引上装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54120614A (en) * 1978-03-11 1979-09-19 Toshiba Ceramics Co Purification of silica glass raw powder
JPS57156342A (en) * 1981-03-20 1982-09-27 Hoya Corp Purification of raw material powder for quartz glass
JPS60186412A (ja) * 1984-03-05 1985-09-21 Onoda Cement Co Ltd クリストバライトの製造方法
JPS60131834A (ja) * 1984-07-09 1985-07-13 Seiko Epson Corp 石英ガラスの製造方法
JPS6158823A (ja) * 1984-08-30 1986-03-26 Nippon Sanso Kk 透明石英ガラスの製造法

Also Published As

Publication number Publication date
JPS63166730A (ja) 1988-07-09

Similar Documents

Publication Publication Date Title
JP3751326B2 (ja) 高純度透明石英ガラスの製造方法
KR101378748B1 (ko) 용융 석영 유리 및 그 제조 방법
CN108658451A (zh) 用于石英玻璃应用的高纯度二氧化硅颗粒及制备所述颗粒的方法
JP3040315B2 (ja) 高粘度合成石英ガラス部材およびその製造方法
JP4038137B2 (ja) ケイ素−チタン−混合酸化物粉末を含有する分散液、その製造方法、それにより製造された成形体、その製造方法、ガラス成形品、その製造方法及びその使用
JP3128451B2 (ja) 合成石英ガラスの製造方法
JPH0761852B2 (ja) 非焼結クリストバライト化シリカの製造方法
JP2617822B2 (ja) 非焼結状クリストバライト粒子の製造方法
JP2001089168A (ja) 高純度合成石英ガラス粉の製造方法
JPH0940434A (ja) 高純度石英ガラス及びその製造方法
US6796143B2 (en) Process for producing SiO2-TiO2 glasses having a low coefficient of thermal expansion
JPH054834A (ja) オキシナイトライドガラス及びその製造方法
JPH0517172B2 (enrdf_load_stackoverflow)
JP2839725B2 (ja) 高純度結晶質シリカの製造方法
JP2003292337A (ja) プラズマ耐食性石英ガラス、その製造方法及びこれを用いた装置
JPH0912322A (ja) 高純度透明石英ガラス及びその製造方法
JP3121733B2 (ja) 高純度合成クリストバライト粉、その製造方法及びシリカガラス
JPH0624993B2 (ja) 石英ガラスの製造方法
JP3661026B2 (ja) クリストバライト粒子の製造方法
JPH0264027A (ja) 石英ガラスの製造方法
JPH0717389B2 (ja) 合成石英ガラスの製造方法
JP2586973B2 (ja) クリストバライトの製造方法
JP3114936B2 (ja) 高耐熱性合成石英ガラス
JP2878916B2 (ja) 半導体熱処理用シリカガラス部材およびその製造方法
JPH07115881B2 (ja) 熱処理用石英ガラス材料

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees