JPH0510131B2 - - Google Patents

Info

Publication number
JPH0510131B2
JPH0510131B2 JP57178764A JP17876482A JPH0510131B2 JP H0510131 B2 JPH0510131 B2 JP H0510131B2 JP 57178764 A JP57178764 A JP 57178764A JP 17876482 A JP17876482 A JP 17876482A JP H0510131 B2 JPH0510131 B2 JP H0510131B2
Authority
JP
Japan
Prior art keywords
valve
sub
pressure
main
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57178764A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5967619A (ja
Inventor
Makoto Ozawa
Fumio Muramatsu
Ryoji Tsunoda
Genichi Kanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP57178764A priority Critical patent/JPS5967619A/ja
Publication of JPS5967619A publication Critical patent/JPS5967619A/ja
Publication of JPH0510131B2 publication Critical patent/JPH0510131B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Control Of Fluid Pressure (AREA)
JP57178764A 1982-10-12 1982-10-12 減圧容器を有する半導体製造装置の圧力制御装置 Granted JPS5967619A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57178764A JPS5967619A (ja) 1982-10-12 1982-10-12 減圧容器を有する半導体製造装置の圧力制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57178764A JPS5967619A (ja) 1982-10-12 1982-10-12 減圧容器を有する半導体製造装置の圧力制御装置

Publications (2)

Publication Number Publication Date
JPS5967619A JPS5967619A (ja) 1984-04-17
JPH0510131B2 true JPH0510131B2 (enExample) 1993-02-08

Family

ID=16054196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57178764A Granted JPS5967619A (ja) 1982-10-12 1982-10-12 減圧容器を有する半導体製造装置の圧力制御装置

Country Status (1)

Country Link
JP (1) JPS5967619A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029437A (ja) * 1988-06-28 1990-01-12 Ishikawajima Harima Heavy Ind Co Ltd 真空排気方法
JPH0719554Y2 (ja) * 1988-09-24 1995-05-10 株式会社島津製作所 真空排気装置
JPWO2009028632A1 (ja) 2007-08-28 2010-12-02 東芝キヤリア株式会社 ロータリ式圧縮機及び冷凍サイクル装置
CN101688535B (zh) 2007-08-28 2013-03-13 东芝开利株式会社 多汽缸旋转式压缩机及制冷循环装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55161067A (en) * 1979-06-04 1980-12-15 Hitachi Ltd Manufacturing apparatus of thin film

Also Published As

Publication number Publication date
JPS5967619A (ja) 1984-04-17

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