JPH0481329B2 - - Google Patents
Info
- Publication number
- JPH0481329B2 JPH0481329B2 JP57122105A JP12210582A JPH0481329B2 JP H0481329 B2 JPH0481329 B2 JP H0481329B2 JP 57122105 A JP57122105 A JP 57122105A JP 12210582 A JP12210582 A JP 12210582A JP H0481329 B2 JPH0481329 B2 JP H0481329B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulating film
- substrate
- etching
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 17
- 238000002955 isolation Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 claims 6
- 239000010409 thin film Substances 0.000 claims 3
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 20
- 239000010410 layer Substances 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 229910017855 NH 4 F Inorganic materials 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Drying Of Semiconductors (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12210582A JPS5913342A (ja) | 1982-07-15 | 1982-07-15 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12210582A JPS5913342A (ja) | 1982-07-15 | 1982-07-15 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5913342A JPS5913342A (ja) | 1984-01-24 |
| JPH0481329B2 true JPH0481329B2 (ko) | 1992-12-22 |
Family
ID=14827761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12210582A Granted JPS5913342A (ja) | 1982-07-15 | 1982-07-15 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5913342A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS618945A (ja) * | 1984-06-25 | 1986-01-16 | Nec Corp | 半導体集積回路装置 |
| US5173439A (en) * | 1989-10-25 | 1992-12-22 | International Business Machines Corporation | Forming wide dielectric-filled isolation trenches in semi-conductors |
| KR100444311B1 (ko) * | 1997-06-28 | 2004-11-08 | 주식회사 하이닉스반도체 | 반도체소자의소자분리막제조방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5363871A (en) * | 1976-11-18 | 1978-06-07 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
-
1982
- 1982-07-15 JP JP12210582A patent/JPS5913342A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5363871A (en) * | 1976-11-18 | 1978-06-07 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5913342A (ja) | 1984-01-24 |
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