JPH0481329B2 - - Google Patents

Info

Publication number
JPH0481329B2
JPH0481329B2 JP57122105A JP12210582A JPH0481329B2 JP H0481329 B2 JPH0481329 B2 JP H0481329B2 JP 57122105 A JP57122105 A JP 57122105A JP 12210582 A JP12210582 A JP 12210582A JP H0481329 B2 JPH0481329 B2 JP H0481329B2
Authority
JP
Japan
Prior art keywords
film
insulating film
substrate
etching
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57122105A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5913342A (ja
Inventor
Ryozo Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP12210582A priority Critical patent/JPS5913342A/ja
Publication of JPS5913342A publication Critical patent/JPS5913342A/ja
Publication of JPH0481329B2 publication Critical patent/JPH0481329B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
JP12210582A 1982-07-15 1982-07-15 半導体装置の製造方法 Granted JPS5913342A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12210582A JPS5913342A (ja) 1982-07-15 1982-07-15 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12210582A JPS5913342A (ja) 1982-07-15 1982-07-15 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5913342A JPS5913342A (ja) 1984-01-24
JPH0481329B2 true JPH0481329B2 (en:Method) 1992-12-22

Family

ID=14827761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12210582A Granted JPS5913342A (ja) 1982-07-15 1982-07-15 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5913342A (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618945A (ja) * 1984-06-25 1986-01-16 Nec Corp 半導体集積回路装置
US5173439A (en) * 1989-10-25 1992-12-22 International Business Machines Corporation Forming wide dielectric-filled isolation trenches in semi-conductors
KR100444311B1 (ko) * 1997-06-28 2004-11-08 주식회사 하이닉스반도체 반도체소자의소자분리막제조방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363871A (en) * 1976-11-18 1978-06-07 Matsushita Electric Ind Co Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS5913342A (ja) 1984-01-24

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