JPH0480849B2 - - Google Patents

Info

Publication number
JPH0480849B2
JPH0480849B2 JP17566384A JP17566384A JPH0480849B2 JP H0480849 B2 JPH0480849 B2 JP H0480849B2 JP 17566384 A JP17566384 A JP 17566384A JP 17566384 A JP17566384 A JP 17566384A JP H0480849 B2 JPH0480849 B2 JP H0480849B2
Authority
JP
Japan
Prior art keywords
formula
silicon
sih
diethyl ether
positive integer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17566384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153110A (ja
Inventor
Masayoshi Ito
Hiroji Myagawa
Toshihiro Abe
Hiroshige Amita
Kyogo Koizumi
Masami Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP17566384A priority Critical patent/JPS6153110A/ja
Publication of JPS6153110A publication Critical patent/JPS6153110A/ja
Publication of JPH0480849B2 publication Critical patent/JPH0480849B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP17566384A 1984-08-23 1984-08-23 水素化ケイ素の製造方法 Granted JPS6153110A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17566384A JPS6153110A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17566384A JPS6153110A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS6153110A JPS6153110A (ja) 1986-03-17
JPH0480849B2 true JPH0480849B2 (enrdf_load_stackoverflow) 1992-12-21

Family

ID=16000043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17566384A Granted JPS6153110A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS6153110A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6153825B2 (ja) * 2013-09-04 2017-06-28 株式会社日本触媒 水素化シラン化合物の保管方法

Also Published As

Publication number Publication date
JPS6153110A (ja) 1986-03-17

Similar Documents

Publication Publication Date Title
US4276424A (en) Methods for the production of organic polysilanes
KR102562290B1 (ko) 게르마늄-규소 층의 제조를 위한 트리페닐게르밀실란 및 트리클로로실릴-트리클로로게르만, 및 트리클로로실릴-트리페닐게르만으로부터 그를 제조하는 방법
TW200412348A (en) Process for the production and purification of Bis (tertiary-butylamino) silane
KR20120074237A (ko) 정제 아미노실란의 제조 방법
JP2017523134A (ja) モノアミノシラン化合物
US2900225A (en) Process for the production of sih2cl2
CN112456500A (zh) 一种三氯氢硅的制备方法
JPH0480849B2 (enrdf_load_stackoverflow)
TWI791547B (zh) 製備五氯二矽烷之方法及包含五氯二矽烷之經純化的反應產物
CN112645976B (zh) 一种利用氯基CVD晶体薄膜生长制程尾气FTrPSA制备甲基氯硅烷类有机硅方法
CN102286016A (zh) 一种甲基氯硅烷的制备方法
CN112110948B (zh) 一种液态双氨基取代的乙硅烷制备方法及其产物的应用
TWI726508B (zh) 用於降低含鹵矽烷的組合物中之硼化合物含量的方法
CN114409692A (zh) 一种制备六甲基二硅烷胺的方法
JP2508798B2 (ja) ヘキサクロルジシランおよびオクタクロルトリシランの製造方法
CN109305985B (zh) 二甲基乙烯基氯硅烷的合成方法
JPH0480844B2 (enrdf_load_stackoverflow)
US20070293649A1 (en) Process for preparing functionalised silanes and siloxanes
RU2160706C1 (ru) Способ получения моносилана и дисилана
CN223069100U (zh) 一种降低多晶硅中施、受主杂质的氯硅烷原料提纯系统
JPH0480847B2 (enrdf_load_stackoverflow)
JPS6172614A (ja) 水素化ケイ素化合物の製造方法
JP2010528992A (ja) イソシアネートアルキルシランの製造方法
JPS60141614A (ja) 水素化ケイ素の製造方法
CN116751224A (zh) 一种含氢硅氧烷及其制备方法