JPH0479137B2 - - Google Patents
Info
- Publication number
- JPH0479137B2 JPH0479137B2 JP57178858A JP17885882A JPH0479137B2 JP H0479137 B2 JPH0479137 B2 JP H0479137B2 JP 57178858 A JP57178858 A JP 57178858A JP 17885882 A JP17885882 A JP 17885882A JP H0479137 B2 JPH0479137 B2 JP H0479137B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- fuse
- region
- wiring
- fuse wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57178858A JPS5968946A (ja) | 1982-10-12 | 1982-10-12 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57178858A JPS5968946A (ja) | 1982-10-12 | 1982-10-12 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5968946A JPS5968946A (ja) | 1984-04-19 |
JPH0479137B2 true JPH0479137B2 (enrdf_load_stackoverflow) | 1992-12-15 |
Family
ID=16055911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57178858A Granted JPS5968946A (ja) | 1982-10-12 | 1982-10-12 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5968946A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59146969U (ja) * | 1983-03-23 | 1984-10-01 | 日本電気株式会社 | 半導体装置 |
JPS6334952A (ja) * | 1986-07-29 | 1988-02-15 | Nec Corp | 半導体装置内の回路選択用ヒユ−ズ |
-
1982
- 1982-10-12 JP JP57178858A patent/JPS5968946A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5968946A (ja) | 1984-04-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7786549B2 (en) | Antifuse structure and system for closing thereof | |
US4628590A (en) | Method of manufacture of a semiconductor device | |
EP0128675A1 (en) | A method of fabricating an integrated circuit having multi-layer wiring with a fuse and a fuse opening | |
KR0157348B1 (ko) | 프로그램가능한 퓨즈 구조물 및 퓨즈 프로그래밍 방법 | |
JPH07335761A (ja) | 電気的にプログラミング可能な自己冷却ヒューズ | |
US4968643A (en) | Method for fabricating an activatable conducting link for metallic conductive wiring in a semiconductor device | |
EP0112693B1 (en) | Method of blowing fuses in an ic, for example for writing information into a fuse-type rom | |
US5827759A (en) | Method of manufacturing a fuse structure | |
US5936297A (en) | Programmable semiconductor element having an antifuse structure | |
JPH0479137B2 (enrdf_load_stackoverflow) | ||
TW567603B (en) | Fuse structure for a semiconductor device and manufacturing method thereof | |
JPS6351382B2 (enrdf_load_stackoverflow) | ||
JPH0332230B2 (enrdf_load_stackoverflow) | ||
JPH0760853B2 (ja) | レ−ザ・ビ−ムでプログラムし得る半導体装置と半導体装置の製法 | |
US3967309A (en) | Semiconductor device with a semiconductor substrate having dielectrically isolated functional regions | |
JPH0256815B2 (enrdf_load_stackoverflow) | ||
JPH065707A (ja) | 半導体集積回路用ヒューズ | |
JPS5984574A (ja) | 半導体装置 | |
JPS63260149A (ja) | 半導体装置 | |
JPH0573058B2 (enrdf_load_stackoverflow) | ||
JPH0738413B2 (ja) | 半導体装置 | |
JPS60134437A (ja) | ヒユ−ズ装置およびその製造方法 | |
JPH10144894A (ja) | 半導体装置およびその製造方法 | |
JPH0783055B2 (ja) | 半導体装置の製造方法 | |
JPH0319255A (ja) | 半導体装置 |