JPH0476492B2 - - Google Patents

Info

Publication number
JPH0476492B2
JPH0476492B2 JP60036321A JP3632185A JPH0476492B2 JP H0476492 B2 JPH0476492 B2 JP H0476492B2 JP 60036321 A JP60036321 A JP 60036321A JP 3632185 A JP3632185 A JP 3632185A JP H0476492 B2 JPH0476492 B2 JP H0476492B2
Authority
JP
Japan
Prior art keywords
processing chamber
processing
gas
inert gas
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60036321A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61196538A (ja
Inventor
Hitoaki Sato
Kazuo Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60036321A priority Critical patent/JPS61196538A/ja
Publication of JPS61196538A publication Critical patent/JPS61196538A/ja
Publication of JPH0476492B2 publication Critical patent/JPH0476492B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP60036321A 1985-02-27 1985-02-27 真空処理方法及び装置 Granted JPS61196538A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60036321A JPS61196538A (ja) 1985-02-27 1985-02-27 真空処理方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60036321A JPS61196538A (ja) 1985-02-27 1985-02-27 真空処理方法及び装置

Publications (2)

Publication Number Publication Date
JPS61196538A JPS61196538A (ja) 1986-08-30
JPH0476492B2 true JPH0476492B2 (show.php) 1992-12-03

Family

ID=12466569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60036321A Granted JPS61196538A (ja) 1985-02-27 1985-02-27 真空処理方法及び装置

Country Status (1)

Country Link
JP (1) JPS61196538A (show.php)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648039U (show.php) * 1987-06-29 1989-01-17
JPH0246726A (ja) * 1988-08-09 1990-02-16 Nec Corp 真空装置の真空度改善方法
JPH0370130A (ja) * 1989-08-09 1991-03-26 Tokyo Electron Ltd エッチング方法
JP2634019B2 (ja) * 1992-06-16 1997-07-23 アプライド マテリアルズ インコーポレイテッド 半導体デバイス処理における微粒子汚染の低減
US5622595A (en) * 1992-06-16 1997-04-22 Applied Materials, Inc Reducing particulate contamination during semiconductor device processing
US5902494A (en) * 1996-02-09 1999-05-11 Applied Materials, Inc. Method and apparatus for reducing particle generation by limiting DC bias spike
US6465043B1 (en) * 1996-02-09 2002-10-15 Applied Materials, Inc. Method and apparatus for reducing particle contamination in a substrate processing chamber
US6121163A (en) 1996-02-09 2000-09-19 Applied Materials, Inc. Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4226897A (en) * 1977-12-05 1980-10-07 Plasma Physics Corporation Method of forming semiconducting materials and barriers
JPS5524424A (en) * 1978-08-09 1980-02-21 Kokusai Electric Co Ltd Forming device of pressure-reduced epitaxial layer
EP0032788B2 (en) * 1980-01-16 1989-12-06 National Research Development Corporation Method for depositing coatings in a glow discharge
JPS6042831A (ja) * 1983-08-19 1985-03-07 Toshiba Corp 半導体製造装置
JPS60234324A (ja) * 1984-05-07 1985-11-21 Nec Corp ドライエツチング装置

Also Published As

Publication number Publication date
JPS61196538A (ja) 1986-08-30

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