JPH0469309B2 - - Google Patents
Info
- Publication number
- JPH0469309B2 JPH0469309B2 JP58113008A JP11300883A JPH0469309B2 JP H0469309 B2 JPH0469309 B2 JP H0469309B2 JP 58113008 A JP58113008 A JP 58113008A JP 11300883 A JP11300883 A JP 11300883A JP H0469309 B2 JPH0469309 B2 JP H0469309B2
- Authority
- JP
- Japan
- Prior art keywords
- sealing
- gas
- shaft
- spiral groove
- sealing ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 73
- 239000007789 gas Substances 0.000 description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3404—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal
- F16J15/3408—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface
- F16J15/3412—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities
- F16J15/342—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities with means for feeding fluid directly to the face
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Sealing (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3223703A DE3223703C2 (de) | 1982-06-25 | 1982-06-25 | Gasgesperrte Wellendichtung mit radialem Dichtspalt |
DE3223703.0 | 1982-06-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS599370A JPS599370A (ja) | 1984-01-18 |
JPH0469309B2 true JPH0469309B2 (US07321065-20080122-C00020.png) | 1992-11-05 |
Family
ID=6166807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58113008A Granted JPS599370A (ja) | 1982-06-25 | 1983-06-24 | ガスで密封される軸封装置 |
Country Status (5)
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103016743A (zh) * | 2012-12-13 | 2013-04-03 | 江苏大学 | 一种可实现零磨损和零泄漏且防固体颗粒的机械密封 |
WO2018092742A1 (ja) * | 2016-11-16 | 2018-05-24 | イーグル工業株式会社 | しゅう動部品 |
Families Citing this family (80)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3223703C2 (de) * | 1982-06-25 | 1984-05-30 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen | Gasgesperrte Wellendichtung mit radialem Dichtspalt |
GB8330256D0 (en) * | 1983-11-12 | 1983-12-21 | Crane Packing Ltd | Mechanical face seals |
US4586830A (en) * | 1984-04-16 | 1986-05-06 | International Business Machines Corporation | Combination rotary gas bearing and seal apparatus |
US4544317A (en) * | 1984-04-16 | 1985-10-01 | International Business Machines Corporation | Vacuum-to-vacuum entry system apparatus |
DE3441351C2 (de) * | 1984-11-13 | 1986-10-02 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen | Fliehkraft-Gleitringdichtung |
US4645414A (en) * | 1985-06-07 | 1987-02-24 | General Motors Corporation | Combined vacuum pump, bearing and seal assembly |
GB2198488B (en) * | 1986-07-08 | 1991-03-13 | Sealol | Hydrostatic face seal and bearing |
US5052694A (en) * | 1986-07-08 | 1991-10-01 | Eg&G Sealol, Inc. | Hydrostatic face seal and bearing |
US5221360A (en) * | 1987-04-27 | 1993-06-22 | Semitool, Inc. | Semiconductor processor methods |
US5095927A (en) * | 1987-04-27 | 1992-03-17 | Semitool, Inc. | Semiconductor processor gas-liquid separation |
US5022419A (en) * | 1987-04-27 | 1991-06-11 | Semitool, Inc. | Rinser dryer system |
US4776261A (en) * | 1987-05-08 | 1988-10-11 | Larson John W | Reciprocating engine piston seal |
DE3722303A1 (de) * | 1987-07-06 | 1989-01-19 | Burgmann Dichtungswerk Feodor | Gleitringdichtung zur abdichtung eines gasfoermigen mediums |
DE3819566A1 (de) * | 1988-06-09 | 1989-12-14 | Kernforschungsz Karlsruhe | Spaltdichtung |
US5143384A (en) * | 1989-04-14 | 1992-09-01 | Eg&G Sealol, Inc. | Bi-directional, non-contact face seal |
GB2231105B (en) * | 1989-04-24 | 1993-04-14 | Sealol | Drained face seal |
DE3919208C1 (US07321065-20080122-C00020.png) * | 1989-06-13 | 1990-10-31 | Eduard Kuesters Maschinenfabrik Gmbh & Co Kg, 4150 Krefeld, De | |
GB9018548D0 (en) * | 1990-08-23 | 1990-10-10 | Crane John Uk Ltd | Mechanical face seals |
US5161943A (en) * | 1991-03-11 | 1992-11-10 | Dresser-Rand Company, A General Partnership | Swirl control labyrinth seal |
US5516118A (en) * | 1993-07-19 | 1996-05-14 | Stein Seal Company | Circumferential hydrodynamic seals for sealing a bidirectionally rotatable member |
AU685502B2 (en) * | 1993-09-01 | 1998-01-22 | Durametallic Corporation | Face seal with angled and annular grooves |
US5769604A (en) * | 1995-05-04 | 1998-06-23 | Eg&G Sealol, Inc. | Face seal device having high angular compliance |
DE19525343C2 (de) * | 1995-07-12 | 2000-11-09 | Gat Gmbh | Vorrichtung zum Überführen von Fluid zwischen relativ zueinander drehbaren Maschinenteilen |
JP3781463B2 (ja) * | 1995-11-10 | 2006-05-31 | 株式会社ニクニ | メカニカルシール |
JP3008013B2 (ja) * | 1996-01-24 | 2000-02-14 | 日本ピラー工業株式会社 | 流体機器用軸封装置 |
BR9714210A (pt) * | 1997-11-21 | 2000-03-28 | Nippon Pillar Packing | Vedaçào por gás sem-contato tipo pressão estática |
US6120034A (en) * | 1997-12-17 | 2000-09-19 | A.W. Chesterston Company | Secondary sealing assembly for mechanical face seal |
MXPA00009286A (es) * | 1998-03-23 | 2002-05-08 | Utex Ind Inc | Sello de gas doble con caras de cojin coplanares. |
US6325378B1 (en) * | 1998-04-01 | 2001-12-04 | Nippon Pillar Packing Co., Ltd. | Shaft seal apparatus |
US6125863A (en) * | 1998-06-30 | 2000-10-03 | Semitool, Inc. | Offset rotor flat media processor |
US6062239A (en) * | 1998-06-30 | 2000-05-16 | Semitool, Inc. | Cross flow centrifugal processor |
US6213473B1 (en) | 1999-03-06 | 2001-04-10 | Utex Industries, Inc. | Double gas seal with coplanar pad faces |
JP4465668B2 (ja) * | 1999-07-05 | 2010-05-19 | エム・テクニック株式会社 | メカニカルシール及びこれを用いた攪拌装置並びに攪拌方法 |
JP3354524B2 (ja) * | 1999-08-16 | 2002-12-09 | 日本ピラー工業株式会社 | 非接触形メカニカルシール |
NL1013938C2 (nl) * | 1999-12-23 | 2001-06-26 | Asm Int | Inrichting voor het behandelen van een wafer. |
US6341782B1 (en) * | 2000-03-03 | 2002-01-29 | Surface Technologies Ltd | Lubricated seals having micropores |
US6494458B2 (en) | 2000-12-19 | 2002-12-17 | Karl E. Uth | Rotary sealing assembly |
US6600547B2 (en) * | 2001-09-24 | 2003-07-29 | Nikon Corporation | Sliding seal |
DE20211805U1 (de) | 2002-07-31 | 2002-10-02 | CHETRA GmbH Dichtungstechnik, 85748 Garching | Flüssigkeitsgeschmierte Gleitringdichtung |
GB2413603A (en) * | 2004-04-30 | 2005-11-02 | Corac Group Plc | A dry gas seal assembly |
JP4336286B2 (ja) * | 2004-10-08 | 2009-09-30 | 日本ピラー工業株式会社 | 静圧形ノンコンタクトガスシール |
CN1312702C (zh) * | 2005-01-21 | 2007-04-25 | 清华大学 | 用于高温气冷堆直接循环的气体动密封装置 |
WO2008013147A1 (fr) * | 2006-07-25 | 2008-01-31 | Eagle Industry Co., Ltd. | Dispositif d'etanchéité mécanique |
JP4673807B2 (ja) * | 2006-08-02 | 2011-04-20 | 日本ピラー工業株式会社 | 静圧形ノンコンタクトガスシール |
JP5402002B2 (ja) * | 2009-01-13 | 2014-01-29 | 株式会社ジェイテクト | 回転軸のシール装置およびシール方法 |
JP2011038579A (ja) * | 2009-08-10 | 2011-02-24 | Jgc Corp | メカニカルシール装置及び処理装置 |
JP5960145B2 (ja) * | 2011-09-10 | 2016-08-02 | イーグル工業株式会社 | 摺動部品及びその製造方法 |
RU2482363C1 (ru) * | 2012-03-28 | 2013-05-20 | Закрытое акционерное общество "Научно-исследовательский и конструкторский институт центробежных и роторных компрессоров им. В.Б. Шнеппа" | Стояночное уплотнение центробежного компрессора |
US9482158B2 (en) * | 2012-09-21 | 2016-11-01 | United Technologies Corporation | Turbomachine hybrid lift-off face seal |
CN102927287A (zh) * | 2012-11-12 | 2013-02-13 | 南京林业大学 | 具有组合流体型槽结构的机械端面密封 |
US9599228B2 (en) * | 2013-05-06 | 2017-03-21 | Louisiana State University and Agricultural & Mechanical College | Cooled seal |
EP2975306B1 (en) * | 2014-07-18 | 2017-06-14 | LEONARDO S.p.A. | Sealing ring |
WO2016054077A1 (en) * | 2014-09-29 | 2016-04-07 | New Way Machine Components, Inc. | Porous media ventless seal |
US9732621B1 (en) * | 2014-11-20 | 2017-08-15 | Florida Turbine Technologies, Inc. | Air riding seal with purge cavity |
US9732622B1 (en) * | 2015-06-16 | 2017-08-15 | Florida Turbine Technologies, Inc. | Self-balancing air riding seal for a turbine |
US10495228B2 (en) * | 2015-06-30 | 2019-12-03 | Eagle Industry Co., Ltd. | Sealing device |
US9909438B2 (en) * | 2016-04-12 | 2018-03-06 | United Technologies Corporation | Hydrodynamic carbon face seal pressure booster |
US10415707B2 (en) | 2016-06-30 | 2019-09-17 | General Electric Company | Face seal assembly and an associated method thereof |
US10626743B2 (en) | 2016-06-30 | 2020-04-21 | General Electric Company | Segmented face seal assembly and an associated method thereof |
EP3499098B1 (en) | 2016-08-15 | 2024-04-24 | Eagle Industry Co., Ltd. | Sliding component |
JP7179430B2 (ja) * | 2018-01-12 | 2022-11-29 | イーグル工業株式会社 | 摺動部品 |
EP3748205A4 (en) | 2018-02-01 | 2021-11-10 | Eagle Industry Co., Ltd. | SLIDING PARTS |
US11078807B2 (en) | 2018-09-19 | 2021-08-03 | Borgwarner Inc. | Turbocharger and mating ring included therein |
US11920605B2 (en) | 2018-09-19 | 2024-03-05 | Borgwarner Inc. | Rotating machine and mating ring included therein |
US11384772B2 (en) | 2018-09-19 | 2022-07-12 | Borgwarner Inc. | Rotating machine and mating ring included therein |
US11293551B2 (en) | 2018-09-30 | 2022-04-05 | ColdQuanta, Inc. | Break-seal system with breakable-membrane bridging rings |
US11852244B2 (en) | 2019-02-04 | 2023-12-26 | Eagle Industry Co., Ltd. | Sliding component and method of manufacturing sliding member |
US11852241B2 (en) | 2019-02-04 | 2023-12-26 | Eagle Industry Co., Ltd. | Sliding component |
KR102610647B1 (ko) | 2019-02-04 | 2023-12-07 | 이구루코교 가부시기가이샤 | 슬라이딩 부품 |
CN113490796A (zh) | 2019-02-14 | 2021-10-08 | 伊格尔工业股份有限公司 | 滑动部件 |
WO2020171102A1 (ja) * | 2019-02-21 | 2020-08-27 | イーグル工業株式会社 | 摺動部品 |
US11187093B2 (en) * | 2019-03-29 | 2021-11-30 | General Electric Company | Face seal assembly with thermal management circuit and an associated method thereof |
US11371441B2 (en) | 2019-06-07 | 2022-06-28 | Raytheon Technologies Corporation | Translating fluid delivery device |
DE102020203767B4 (de) | 2020-03-24 | 2022-05-05 | Eagleburgmann Germany Gmbh & Co. Kg | Selbstansaugende Gleitringdichtungsanordnung |
US11466778B2 (en) | 2020-04-27 | 2022-10-11 | Raytheon Technologies Corporation | Rotational equipment seal element with internal fluid passage |
US11339719B2 (en) | 2020-04-27 | 2022-05-24 | Raytheon Technologies Corporation | Fluid delivery system for rotational equipment |
US11454320B2 (en) * | 2020-04-27 | 2022-09-27 | Raytheon Technologies Corporation | Porous seal element with internal fluid passage |
US11624439B2 (en) | 2020-04-27 | 2023-04-11 | Raytheon Technologies Corporation | Retainer for securing a seal element to a seal carrier |
EP4177488A4 (en) | 2020-07-06 | 2024-07-31 | Eagle Ind Co Ltd | SLIDING COMPONENT |
US11933303B2 (en) | 2020-07-06 | 2024-03-19 | Eagle Industry Co., Ltd. | Sliding component |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50149862A (US07321065-20080122-C00020.png) * | 1974-05-27 | 1975-12-01 | ||
JPS562461B2 (US07321065-20080122-C00020.png) * | 1977-05-31 | 1981-01-20 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB817396A (en) * | 1956-02-23 | 1959-07-29 | Napier & Son Ltd | Seals for sealing rotatable members passing through partitions |
DE524515C (de) * | 1930-01-04 | 1931-05-08 | Georg Stauber Dr Ing | Spaltdichtung fuer Kreiselmaschinen, insbesondere fuer Gasturbinen, mit Hilfsfluessigkeit |
GB827015A (en) * | 1957-02-04 | 1960-01-27 | Atomic Energy Authority Uk | Improvements in or relating to shaft seals |
US2895751A (en) * | 1957-07-05 | 1959-07-21 | Allis Chalmers Mfg Co | Hydrogen seal for dynamoelectric machines |
GB830059A (en) * | 1957-10-15 | 1960-03-09 | Napier & Son Ltd | Annular face shaft seals |
GB831168A (en) * | 1957-10-28 | 1960-03-23 | Gen Electric Co Ltd | Improvements in or relating to seals for gas filled machines |
GB1032864A (en) * | 1962-05-08 | 1966-06-15 | Atomic Energy Authority Uk | Glands |
FR1418240A (fr) * | 1964-10-08 | 1965-11-19 | Rateau Soc | Garniture d'étanchéité à barrage par fluide auxiliaire |
FR1505487A (fr) * | 1966-10-28 | 1967-12-15 | Guinard Pompes | Perfectionnement aux joints tournants à régulation de fuite |
FR2098520A5 (US07321065-20080122-C00020.png) * | 1970-07-15 | 1972-03-10 | Snecma | |
US3804424A (en) * | 1972-04-24 | 1974-04-16 | Crane Packing Co | Gap seal with thermal and pressure distortion compensation |
US3919854A (en) * | 1973-03-14 | 1975-11-18 | Technip Cie | Gas sealing assembly |
DE2444544C2 (de) * | 1974-09-18 | 1982-08-05 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen | Gasgesperrte Wellendichtung |
DE2558651C3 (de) * | 1975-12-24 | 1982-01-28 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen | Wellendichtung mit einem mit der Welle umlaufenden Dichtring |
DE2610045C2 (de) * | 1976-03-11 | 1982-06-16 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen | Gasgesperrte Wellendichtung |
FR2385013A1 (fr) * | 1977-03-25 | 1978-10-20 | Gutehoffnungshuette Sterkrade | Joint d'arbre a etancheite assuree par un gaz |
DE3223703C2 (de) * | 1982-06-25 | 1984-05-30 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen | Gasgesperrte Wellendichtung mit radialem Dichtspalt |
-
1982
- 1982-06-25 DE DE3223703A patent/DE3223703C2/de not_active Expired
-
1983
- 1983-05-13 DE DE8383104725T patent/DE3372652D1/de not_active Expired
- 1983-05-13 EP EP83104725A patent/EP0097802B1/de not_active Expired
- 1983-06-21 US US06/506,345 patent/US4523764A/en not_active Expired - Fee Related
- 1983-06-24 BR BR8303385A patent/BR8303385A/pt not_active IP Right Cessation
- 1983-06-24 JP JP58113008A patent/JPS599370A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50149862A (US07321065-20080122-C00020.png) * | 1974-05-27 | 1975-12-01 | ||
JPS562461B2 (US07321065-20080122-C00020.png) * | 1977-05-31 | 1981-01-20 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103016743A (zh) * | 2012-12-13 | 2013-04-03 | 江苏大学 | 一种可实现零磨损和零泄漏且防固体颗粒的机械密封 |
CN103016743B (zh) * | 2012-12-13 | 2015-07-08 | 江苏大学 | 一种可实现零磨损和零泄漏且防固体颗粒的机械密封 |
WO2018092742A1 (ja) * | 2016-11-16 | 2018-05-24 | イーグル工業株式会社 | しゅう動部品 |
CN109923340A (zh) * | 2016-11-16 | 2019-06-21 | 伊格尔工业股份有限公司 | 滑动组件 |
JPWO2018092742A1 (ja) * | 2016-11-16 | 2019-10-17 | イーグル工業株式会社 | しゅう動部品 |
US11143232B2 (en) | 2016-11-16 | 2021-10-12 | Eagle Industry Co., Ltd. | Sliding component |
Also Published As
Publication number | Publication date |
---|---|
DE3372652D1 (en) | 1987-08-27 |
BR8303385A (pt) | 1984-02-07 |
JPS599370A (ja) | 1984-01-18 |
DE3223703C2 (de) | 1984-05-30 |
EP0097802B1 (de) | 1987-07-22 |
DE3223703A1 (de) | 1984-01-05 |
EP0097802A1 (de) | 1984-01-11 |
US4523764A (en) | 1985-06-18 |
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