JPH046790B2 - - Google Patents

Info

Publication number
JPH046790B2
JPH046790B2 JP58203487A JP20348783A JPH046790B2 JP H046790 B2 JPH046790 B2 JP H046790B2 JP 58203487 A JP58203487 A JP 58203487A JP 20348783 A JP20348783 A JP 20348783A JP H046790 B2 JPH046790 B2 JP H046790B2
Authority
JP
Japan
Prior art keywords
titanium carbide
film
coating
base material
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58203487A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6096754A (ja
Inventor
Yoshio Murakami
Tetsuya Abe
Tadanori Mizoguchi
Junki Sagawa
Yutaka Ito
Kazuhiro Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Ulvac Inc
Hitachi Industry and Control Solutions Co Ltd
Original Assignee
Hitachi Engineering Co Ltd
Hitachi Ltd
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Engineering Co Ltd, Hitachi Ltd, Nihon Shinku Gijutsu KK filed Critical Hitachi Engineering Co Ltd
Priority to JP58203487A priority Critical patent/JPS6096754A/ja
Publication of JPS6096754A publication Critical patent/JPS6096754A/ja
Publication of JPH046790B2 publication Critical patent/JPH046790B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
JP58203487A 1983-10-28 1983-10-28 チタンカ−バイド厚膜の被覆方法 Granted JPS6096754A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58203487A JPS6096754A (ja) 1983-10-28 1983-10-28 チタンカ−バイド厚膜の被覆方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58203487A JPS6096754A (ja) 1983-10-28 1983-10-28 チタンカ−バイド厚膜の被覆方法

Publications (2)

Publication Number Publication Date
JPS6096754A JPS6096754A (ja) 1985-05-30
JPH046790B2 true JPH046790B2 (enrdf_load_stackoverflow) 1992-02-06

Family

ID=16474966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58203487A Granted JPS6096754A (ja) 1983-10-28 1983-10-28 チタンカ−バイド厚膜の被覆方法

Country Status (1)

Country Link
JP (1) JPS6096754A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63105960A (ja) * 1986-06-07 1988-05-11 Kawasaki Steel Corp 密着性に優れたイオンプレ−テイング被膜をそなえる金属ストリツプの製造方法およびイオンプレ−テイング装置
JPS63145766A (ja) * 1986-07-17 1988-06-17 Kawasaki Steel Corp 密着性、耐食性および均質性に富む表面被膜をそなえる大表面積鋼板の製造方法
JPS6324055A (ja) * 1986-07-17 1988-02-01 Kawasaki Steel Corp 密着性および均質性に富む装飾品被膜のコ−テイング方法
DE102004019169A1 (de) * 2004-04-20 2005-11-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Abscheiden von Karbidschichten hochschmelzender Metalle

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197544A (en) * 1975-02-26 1976-08-27 Kuroomuhimakuno keiseihoho
JPS6053113B2 (ja) * 1977-07-30 1985-11-22 シチズン時計株式会社 被膜の形成方法

Also Published As

Publication number Publication date
JPS6096754A (ja) 1985-05-30

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