JPH0467346B2 - - Google Patents

Info

Publication number
JPH0467346B2
JPH0467346B2 JP57118400A JP11840082A JPH0467346B2 JP H0467346 B2 JPH0467346 B2 JP H0467346B2 JP 57118400 A JP57118400 A JP 57118400A JP 11840082 A JP11840082 A JP 11840082A JP H0467346 B2 JPH0467346 B2 JP H0467346B2
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
substrate
layer
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57118400A
Other languages
English (en)
Japanese (ja)
Other versions
JPS599976A (ja
Inventor
Shunji Shiromizu
Shozo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57118400A priority Critical patent/JPS599976A/ja
Publication of JPS599976A publication Critical patent/JPS599976A/ja
Publication of JPH0467346B2 publication Critical patent/JPH0467346B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP57118400A 1982-07-09 1982-07-09 絶対圧形半導体圧力センサーの製造方法 Granted JPS599976A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57118400A JPS599976A (ja) 1982-07-09 1982-07-09 絶対圧形半導体圧力センサーの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57118400A JPS599976A (ja) 1982-07-09 1982-07-09 絶対圧形半導体圧力センサーの製造方法

Publications (2)

Publication Number Publication Date
JPS599976A JPS599976A (ja) 1984-01-19
JPH0467346B2 true JPH0467346B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-28

Family

ID=14735718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57118400A Granted JPS599976A (ja) 1982-07-09 1982-07-09 絶対圧形半導体圧力センサーの製造方法

Country Status (1)

Country Link
JP (1) JPS599976A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8800901A (nl) * 1988-04-08 1989-11-01 Philips Nv Combinatie van een drager en een halfgeleiderlichaam en werkwijze voor het vervaardigen van een dergelijke combinatie.
JPH0376131A (ja) * 1989-08-18 1991-04-02 Toshiba Components Co Ltd 半導体圧力センサー装置
KR102134621B1 (ko) 2018-11-26 2020-07-16 한국항공우주연구원 접이식 매커니즘 전개 시험을 위한 0g 시험 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
JPS603459B2 (ja) * 1977-09-06 1985-01-28 エビオス薬品工業株式会社 調味料の製造方法

Also Published As

Publication number Publication date
JPS599976A (ja) 1984-01-19

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