JPH0466107B2 - - Google Patents
Info
- Publication number
- JPH0466107B2 JPH0466107B2 JP59193313A JP19331384A JPH0466107B2 JP H0466107 B2 JPH0466107 B2 JP H0466107B2 JP 59193313 A JP59193313 A JP 59193313A JP 19331384 A JP19331384 A JP 19331384A JP H0466107 B2 JPH0466107 B2 JP H0466107B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- contact resistance
- type gaas
- alloying
- ohmic electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/62—Electrodes ohmically coupled to a semiconductor
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59193313A JPS6171667A (ja) | 1984-09-14 | 1984-09-14 | n型GaAs用オ−ミツク電極 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59193313A JPS6171667A (ja) | 1984-09-14 | 1984-09-14 | n型GaAs用オ−ミツク電極 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6171667A JPS6171667A (ja) | 1986-04-12 |
JPH0466107B2 true JPH0466107B2 (enrdf_load_stackoverflow) | 1992-10-22 |
Family
ID=16305824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59193313A Granted JPS6171667A (ja) | 1984-09-14 | 1984-09-14 | n型GaAs用オ−ミツク電極 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6171667A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0754849B2 (ja) * | 1987-08-19 | 1995-06-07 | 三菱電機株式会社 | 半導体装置 |
US5156998A (en) * | 1991-09-30 | 1992-10-20 | Hughes Aircraft Company | Bonding of integrated circuit chip to carrier using gold/tin eutectic alloy and refractory metal barrier layer to block migration of tin through via holes |
-
1984
- 1984-09-14 JP JP59193313A patent/JPS6171667A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6171667A (ja) | 1986-04-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS60196937A (ja) | 半導体素子およびその製造法 | |
JPH0466107B2 (enrdf_load_stackoverflow) | ||
US4613890A (en) | Alloyed contact for n-conducting GaAlAs-semi-conductor material | |
JPS61187364A (ja) | オ−ム性電極 | |
JP2569032B2 (ja) | 半導体装置 | |
JPS63177553A (ja) | 半導体装置 | |
JPS61272968A (ja) | 化合物半導体素子 | |
JPS5932890B2 (ja) | シヨツトダイオ−ドの電極形成方法 | |
JPS6038823A (ja) | 半導体装置 | |
JPS60210885A (ja) | 半導体素子 | |
JPS558036A (en) | Electrode formation | |
JPS6220338A (ja) | 半導体装置の製造方法 | |
JPH06267886A (ja) | 化合物半導体素子 | |
JPS60165763A (ja) | 光−電子素子集積回路装置の製造方法 | |
JPS61156823A (ja) | 半導体装置 | |
JPS6421943A (en) | Semiconductor device | |
JPS5934135Y2 (ja) | 蒸着用基板の支持構造 | |
JPS62185330A (ja) | 半導体装置 | |
JPS61156824A (ja) | 半導体装置 | |
JPS5629377A (en) | Manufacture of si schottky type semiconductor device | |
KR960002774B1 (ko) | 강유전체를 갖는 박막 소자의 구조 | |
JP2697162B2 (ja) | 半導体装置 | |
JPS62296428A (ja) | シヨツトキ−バリアダイオ−ドの製造方法 | |
JPS58197749A (ja) | 半導体装置 | |
JPH10209520A (ja) | 半導体薄膜磁気抵抗素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |