JPH0465032B2 - - Google Patents

Info

Publication number

JPH0465032B2

JPH0465032B2 JP16372784A JP16372784A JPH0465032B2 JP H0465032 B2 JPH0465032 B2 JP H0465032B2 JP 16372784 A JP16372784 A JP 16372784A JP 16372784 A JP16372784 A JP 16372784A JP H0465032 B2 JPH0465032 B2 JP H0465032B2

Authority

JP

Japan

Prior art keywords

crucible

solidified

single crystal

layer

composition

Prior art date

1984-08-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000000203 mixture Substances 0.000 claims description 33
• 239000013078 crystal Substances 0.000 claims description 24
• XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 14
• 239000011701 zinc Substances 0.000 claims description 14
• 238000000034 method Methods 0.000 claims description 13
• 239000011572 manganese Substances 0.000 claims description 10
• 229910000859 α-Fe Inorganic materials 0.000 claims description 10
• 239000002994 raw material Substances 0.000 claims description 9
• 230000008018 melting Effects 0.000 claims description 8
• 238000002844 melting Methods 0.000 claims description 8
• HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 5
• 229910052742 iron Inorganic materials 0.000 claims description 5
• 238000004519 manufacturing process Methods 0.000 claims description 5
• 229910052725 zinc Inorganic materials 0.000 claims description 5
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 4
• 238000010304 firing Methods 0.000 claims description 2
• 230000015271 coagulation Effects 0.000 claims 1
• 238000005345 coagulation Methods 0.000 claims 1
• 238000005204 segregation Methods 0.000 description 11
• 239000007789 gas Substances 0.000 description 10
• AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 10
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
• XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 5
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
• UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
• 238000007711 solidification Methods 0.000 description 4
• 230000008023 solidification Effects 0.000 description 4
• 239000000463 material Substances 0.000 description 3
• 229910052697 platinum Inorganic materials 0.000 description 3
• KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
• 229910001873 dinitrogen Inorganic materials 0.000 description 2
• 239000000155 melt Substances 0.000 description 2
• 238000002156 mixing Methods 0.000 description 2
• 230000003647 oxidation Effects 0.000 description 2
• 238000007254 oxidation reaction Methods 0.000 description 2
• 235000012431 wafers Nutrition 0.000 description 2
• 235000014692 zinc oxide Nutrition 0.000 description 2
• 239000011787 zinc oxide Substances 0.000 description 2
• PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 238000002425 crystallisation Methods 0.000 description 1
• 230000008025 crystallization Effects 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 238000000151 deposition Methods 0.000 description 1
• 229910003460 diamond Inorganic materials 0.000 description 1
• 239000010432 diamond Substances 0.000 description 1
• WMVRXDZNYVJBAH-UHFFFAOYSA-N dioxoiron Chemical compound O=[Fe]=O WMVRXDZNYVJBAH-UHFFFAOYSA-N 0.000 description 1
• 238000009826 distribution Methods 0.000 description 1
• 238000005530 etching Methods 0.000 description 1
• 230000008020 evaporation Effects 0.000 description 1
• 238000001704 evaporation Methods 0.000 description 1
• 238000004880 explosion Methods 0.000 description 1
• 229910052748 manganese Inorganic materials 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 238000002360 preparation method Methods 0.000 description 1
• 230000001603 reducing effect Effects 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical class [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 1