JPH0464460B2 - - Google Patents

Info

Publication number
JPH0464460B2
JPH0464460B2 JP24553885A JP24553885A JPH0464460B2 JP H0464460 B2 JPH0464460 B2 JP H0464460B2 JP 24553885 A JP24553885 A JP 24553885A JP 24553885 A JP24553885 A JP 24553885A JP H0464460 B2 JPH0464460 B2 JP H0464460B2
Authority
JP
Japan
Prior art keywords
metal plate
semi
substrate
lead frame
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP24553885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62104041A (ja
Inventor
Mitsuhiro Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP24553885A priority Critical patent/JPS62104041A/ja
Publication of JPS62104041A publication Critical patent/JPS62104041A/ja
Publication of JPH0464460B2 publication Critical patent/JPH0464460B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP24553885A 1985-10-30 1985-10-30 ガラス封止形半導体装置の製造装置 Granted JPS62104041A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24553885A JPS62104041A (ja) 1985-10-30 1985-10-30 ガラス封止形半導体装置の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24553885A JPS62104041A (ja) 1985-10-30 1985-10-30 ガラス封止形半導体装置の製造装置

Publications (2)

Publication Number Publication Date
JPS62104041A JPS62104041A (ja) 1987-05-14
JPH0464460B2 true JPH0464460B2 (ko) 1992-10-15

Family

ID=17135185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24553885A Granted JPS62104041A (ja) 1985-10-30 1985-10-30 ガラス封止形半導体装置の製造装置

Country Status (1)

Country Link
JP (1) JPS62104041A (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102432018B1 (ko) * 2020-03-13 2022-08-16 주식회사 파워로직스 보호회로모듈 제조장치

Also Published As

Publication number Publication date
JPS62104041A (ja) 1987-05-14

Similar Documents

Publication Publication Date Title
KR101838456B1 (ko) 다이 본더, 본딩 방법 및 반도체 장치의 제조 방법
CN111916375B (zh) 转塔式芯片无胶固晶机
JP3531586B2 (ja) 表示パネルの組立装置および組立方法
JP2924760B2 (ja) ダイボンディング装置
KR20200119971A (ko) 반도체 본딩 장치 및 그 방법
JP2001068487A (ja) チップボンディング方法及びその装置
JP2000068296A (ja) ダイボンダ
JPH0464460B2 (ko)
JPH0675199A (ja) 液晶パネル製造装置、位置決め装置および加工装置
JP2619123B2 (ja) 半導体製造装置
WO2022004171A1 (ja) 物品の製造装置、物品の製造方法、プログラム、記録媒体
TWI753584B (zh) 半導體封裝多重夾片黏合裝置及同裝置製造的半導體封裝
KR100740594B1 (ko) 범프 형성 장치
KR100914986B1 (ko) 칩 본딩 장비
JP2754115B2 (ja) ボンディング装置
JP2971180B2 (ja) アウタリードボンディング装置
JP3287265B2 (ja) チップのボンディング装置およびボンディング方法
KR100312744B1 (ko) 씨에스피용 박막필름의 이송 및 클램프 장치
JP2754118B2 (ja) ボンディング装置
JP2754117B2 (ja) ボンディング装置
JP2005311013A (ja) ダイボンディング装置
JPH09330957A (ja) ボンデイング装置およびその方法
JPS60262433A (ja) ボンデイング装置
JPH0726727Y2 (ja) 第1部材と第2部材との高精度結合装置
JP2754116B2 (ja) ボンディング装置