JPH0453098B2 - - Google Patents

Info

Publication number
JPH0453098B2
JPH0453098B2 JP17734785A JP17734785A JPH0453098B2 JP H0453098 B2 JPH0453098 B2 JP H0453098B2 JP 17734785 A JP17734785 A JP 17734785A JP 17734785 A JP17734785 A JP 17734785A JP H0453098 B2 JPH0453098 B2 JP H0453098B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
substrate storage
storage box
long groove
feeding mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17734785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237941A (ja
Inventor
Hiroshi Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP17734785A priority Critical patent/JPS6237941A/ja
Publication of JPS6237941A publication Critical patent/JPS6237941A/ja
Publication of JPH0453098B2 publication Critical patent/JPH0453098B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Conveyors (AREA)
JP17734785A 1985-08-12 1985-08-12 半導体基板収納箱の搬送方法 Granted JPS6237941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17734785A JPS6237941A (ja) 1985-08-12 1985-08-12 半導体基板収納箱の搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17734785A JPS6237941A (ja) 1985-08-12 1985-08-12 半導体基板収納箱の搬送方法

Publications (2)

Publication Number Publication Date
JPS6237941A JPS6237941A (ja) 1987-02-18
JPH0453098B2 true JPH0453098B2 (enrdf_load_stackoverflow) 1992-08-25

Family

ID=16029378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17734785A Granted JPS6237941A (ja) 1985-08-12 1985-08-12 半導体基板収納箱の搬送方法

Country Status (1)

Country Link
JP (1) JPS6237941A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2656359C (en) 2006-06-30 2016-11-22 Smith & Nephew, Inc. Anatomical motion hinged prosthesis
JP7376349B2 (ja) * 2019-12-26 2023-11-08 株式会社安川電機 ワーク処理システム

Also Published As

Publication number Publication date
JPS6237941A (ja) 1987-02-18

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Legal Events

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