JPH0445046B2 - - Google Patents

Info

Publication number
JPH0445046B2
JPH0445046B2 JP59201552A JP20155284A JPH0445046B2 JP H0445046 B2 JPH0445046 B2 JP H0445046B2 JP 59201552 A JP59201552 A JP 59201552A JP 20155284 A JP20155284 A JP 20155284A JP H0445046 B2 JPH0445046 B2 JP H0445046B2
Authority
JP
Japan
Prior art keywords
display
pattern
section
image
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59201552A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6180011A (ja
Inventor
Masaaki Kano
Hisashi Furukawa
Hiroshi Yamaji
Motosuke Myoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59201552A priority Critical patent/JPS6180011A/ja
Publication of JPS6180011A publication Critical patent/JPS6180011A/ja
Publication of JPH0445046B2 publication Critical patent/JPH0445046B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59201552A 1984-09-28 1984-09-28 寸法測定装置 Granted JPS6180011A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59201552A JPS6180011A (ja) 1984-09-28 1984-09-28 寸法測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59201552A JPS6180011A (ja) 1984-09-28 1984-09-28 寸法測定装置

Publications (2)

Publication Number Publication Date
JPS6180011A JPS6180011A (ja) 1986-04-23
JPH0445046B2 true JPH0445046B2 (en, 2012) 1992-07-23

Family

ID=16442937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59201552A Granted JPS6180011A (ja) 1984-09-28 1984-09-28 寸法測定装置

Country Status (1)

Country Link
JP (1) JPS6180011A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2521964B2 (ja) * 1987-07-08 1996-08-07 株式会社ニコン 電子顕微鏡の測長方法
JP2802571B2 (ja) * 1993-03-23 1998-09-24 株式会社日立製作所 電子線測長装置
KR100383258B1 (ko) * 2000-11-09 2003-05-09 삼성전자주식회사 주사 전자 현미경을 이용한 측정 장치의 측정 에러 검출방법
JP4976681B2 (ja) 2005-10-31 2012-07-18 株式会社東芝 パターン形状評価方法およびパターン形状評価プログラム

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004057072A1 (de) * 2004-11-25 2006-06-01 Basf Ag Verwendung von Übergangsmetall-Carbenkomplexen in organischen Licht-emittierenden Dioden (OLEDs)
EP2338593B1 (de) * 2006-01-31 2013-06-19 Basf Se Verfahren zur Herstellung von Übergangsmetall-Carbenkomplexen
WO2009086209A2 (en) * 2007-12-21 2009-07-09 Arizona Board Of Regents For And On Behalf Of Arizona State University Platinum(ii) di(2-pyrazolyl)benzene chloride analogs and uses
EP3216797B1 (de) * 2009-10-14 2021-03-03 UDC Ireland Limited Dinukleare platin-carben-komplexe und deren verwendung in oleds
WO2011050003A2 (en) * 2009-10-19 2011-04-28 University Of Mississippi Air-stable, blue light emitting chemical compounds
US8673458B2 (en) * 2010-06-11 2014-03-18 Universal Display Corporation Delayed fluorescence OLED

Also Published As

Publication number Publication date
JPS6180011A (ja) 1986-04-23

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