JPH0443435B2 - - Google Patents

Info

Publication number
JPH0443435B2
JPH0443435B2 JP11237082A JP11237082A JPH0443435B2 JP H0443435 B2 JPH0443435 B2 JP H0443435B2 JP 11237082 A JP11237082 A JP 11237082A JP 11237082 A JP11237082 A JP 11237082A JP H0443435 B2 JPH0443435 B2 JP H0443435B2
Authority
JP
Japan
Prior art keywords
thin film
film
platinum
electrode
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11237082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS592386A (ja
Inventor
Katsuhiro Kinoshita
Masaki Teshigahara
Mitsutaka Kato
Seisuke Hinota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP57112370A priority Critical patent/JPS592386A/ja
Publication of JPS592386A publication Critical patent/JPS592386A/ja
Publication of JPH0443435B2 publication Critical patent/JPH0443435B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
JP57112370A 1982-06-28 1982-06-28 圧電性薄膜用の電極形成方法 Granted JPS592386A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57112370A JPS592386A (ja) 1982-06-28 1982-06-28 圧電性薄膜用の電極形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57112370A JPS592386A (ja) 1982-06-28 1982-06-28 圧電性薄膜用の電極形成方法

Publications (2)

Publication Number Publication Date
JPS592386A JPS592386A (ja) 1984-01-07
JPH0443435B2 true JPH0443435B2 (enrdf_load_stackoverflow) 1992-07-16

Family

ID=14584985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57112370A Granted JPS592386A (ja) 1982-06-28 1982-06-28 圧電性薄膜用の電極形成方法

Country Status (1)

Country Link
JP (1) JPS592386A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS592386A (ja) 1984-01-07

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