JPH0132746Y2 - - Google Patents

Info

Publication number
JPH0132746Y2
JPH0132746Y2 JP1981126892U JP12689281U JPH0132746Y2 JP H0132746 Y2 JPH0132746 Y2 JP H0132746Y2 JP 1981126892 U JP1981126892 U JP 1981126892U JP 12689281 U JP12689281 U JP 12689281U JP H0132746 Y2 JPH0132746 Y2 JP H0132746Y2
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric thin
layer
film layer
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981126892U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5832665U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981126892U priority Critical patent/JPS5832665U/ja
Publication of JPS5832665U publication Critical patent/JPS5832665U/ja
Application granted granted Critical
Publication of JPH0132746Y2 publication Critical patent/JPH0132746Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP1981126892U 1981-08-26 1981-08-26 圧電薄膜形電気−機械的変位変換素子 Granted JPS5832665U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981126892U JPS5832665U (ja) 1981-08-26 1981-08-26 圧電薄膜形電気−機械的変位変換素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981126892U JPS5832665U (ja) 1981-08-26 1981-08-26 圧電薄膜形電気−機械的変位変換素子

Publications (2)

Publication Number Publication Date
JPS5832665U JPS5832665U (ja) 1983-03-03
JPH0132746Y2 true JPH0132746Y2 (enrdf_load_stackoverflow) 1989-10-05

Family

ID=29920653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981126892U Granted JPS5832665U (ja) 1981-08-26 1981-08-26 圧電薄膜形電気−機械的変位変換素子

Country Status (1)

Country Link
JP (1) JPS5832665U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5909858B2 (ja) * 2011-03-30 2016-04-27 セイコーエプソン株式会社 圧電型発電機及びセンサーノード

Also Published As

Publication number Publication date
JPS5832665U (ja) 1983-03-03

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