JPH043638B2 - - Google Patents
Info
- Publication number
- JPH043638B2 JPH043638B2 JP2417085A JP2417085A JPH043638B2 JP H043638 B2 JPH043638 B2 JP H043638B2 JP 2417085 A JP2417085 A JP 2417085A JP 2417085 A JP2417085 A JP 2417085A JP H043638 B2 JPH043638 B2 JP H043638B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- metal
- film
- sic
- silicide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 50
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 229910021332 silicide Inorganic materials 0.000 claims description 18
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- 229910052750 molybdenum Inorganic materials 0.000 description 10
- 229910052721 tungsten Inorganic materials 0.000 description 10
- 239000007789 gas Substances 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2417085A JPS61183888A (ja) | 1985-02-09 | 1985-02-09 | 耐熱電気絶縁被膜を有する金属発熱体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2417085A JPS61183888A (ja) | 1985-02-09 | 1985-02-09 | 耐熱電気絶縁被膜を有する金属発熱体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61183888A JPS61183888A (ja) | 1986-08-16 |
| JPH043638B2 true JPH043638B2 (enExample) | 1992-01-23 |
Family
ID=12130868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2417085A Granted JPS61183888A (ja) | 1985-02-09 | 1985-02-09 | 耐熱電気絶縁被膜を有する金属発熱体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61183888A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63116385A (ja) * | 1986-11-04 | 1988-05-20 | 日本タングステン株式会社 | ＳｉＣ被覆ヒ−タ |
| JP4592926B2 (ja) * | 2000-11-14 | 2010-12-08 | 株式会社イノアックコーポレーション | セラミックス層を有するヒータ |
-
1985
- 1985-02-09 JP JP2417085A patent/JPS61183888A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61183888A (ja) | 1986-08-16 |
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