JPH0435907B2 - - Google Patents

Info

Publication number
JPH0435907B2
JPH0435907B2 JP61069922A JP6992286A JPH0435907B2 JP H0435907 B2 JPH0435907 B2 JP H0435907B2 JP 61069922 A JP61069922 A JP 61069922A JP 6992286 A JP6992286 A JP 6992286A JP H0435907 B2 JPH0435907 B2 JP H0435907B2
Authority
JP
Japan
Prior art keywords
branch
conductive layer
misalignment
contact hole
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61069922A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62226639A (ja
Inventor
Michihiro Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP61069922A priority Critical patent/JPS62226639A/ja
Publication of JPS62226639A publication Critical patent/JPS62226639A/ja
Publication of JPH0435907B2 publication Critical patent/JPH0435907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
JP61069922A 1986-03-28 1986-03-28 半導体装置の合せずれ検出方法 Granted JPS62226639A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61069922A JPS62226639A (ja) 1986-03-28 1986-03-28 半導体装置の合せずれ検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61069922A JPS62226639A (ja) 1986-03-28 1986-03-28 半導体装置の合せずれ検出方法

Publications (2)

Publication Number Publication Date
JPS62226639A JPS62226639A (ja) 1987-10-05
JPH0435907B2 true JPH0435907B2 (enExample) 1992-06-12

Family

ID=13416665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61069922A Granted JPS62226639A (ja) 1986-03-28 1986-03-28 半導体装置の合せずれ検出方法

Country Status (1)

Country Link
JP (1) JPS62226639A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3552077B2 (ja) * 1996-07-26 2004-08-11 ソニー株式会社 合わせずれ測定方法及び合わせずれ測定パターン
JP6015898B2 (ja) * 2012-03-30 2016-10-26 株式会社ソシオネクスト 半導体装置用試験素子

Also Published As

Publication number Publication date
JPS62226639A (ja) 1987-10-05

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