JPH0425663B2 - - Google Patents

Info

Publication number
JPH0425663B2
JPH0425663B2 JP57097197A JP9719782A JPH0425663B2 JP H0425663 B2 JPH0425663 B2 JP H0425663B2 JP 57097197 A JP57097197 A JP 57097197A JP 9719782 A JP9719782 A JP 9719782A JP H0425663 B2 JPH0425663 B2 JP H0425663B2
Authority
JP
Japan
Prior art keywords
voltage
analysis
output
sample
level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57097197A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58214259A (ja
Inventor
Akio Ito
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57097197A priority Critical patent/JPS58214259A/ja
Publication of JPS58214259A publication Critical patent/JPS58214259A/ja
Publication of JPH0425663B2 publication Critical patent/JPH0425663B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Tubes For Measurement (AREA)
JP57097197A 1982-06-07 1982-06-07 試料内部電圧パターンの表示方法 Granted JPS58214259A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57097197A JPS58214259A (ja) 1982-06-07 1982-06-07 試料内部電圧パターンの表示方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57097197A JPS58214259A (ja) 1982-06-07 1982-06-07 試料内部電圧パターンの表示方法

Publications (2)

Publication Number Publication Date
JPS58214259A JPS58214259A (ja) 1983-12-13
JPH0425663B2 true JPH0425663B2 (enrdf_load_stackoverflow) 1992-05-01

Family

ID=14185865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57097197A Granted JPS58214259A (ja) 1982-06-07 1982-06-07 試料内部電圧パターンの表示方法

Country Status (1)

Country Link
JP (1) JPS58214259A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3621045A1 (de) * 1985-06-24 1987-01-02 Nippon Telegraph & Telephone Strahlerzeugende vorrichtung

Also Published As

Publication number Publication date
JPS58214259A (ja) 1983-12-13

Similar Documents

Publication Publication Date Title
US4989082A (en) Image processing system for comparing a test article with a master article to determine that an object is correctly located on the test article
US4531060A (en) Positioning method
JPS6240146A (ja) 荷電ビ−ムパタ−ン欠陥検査装置
US4486777A (en) Defect detecting apparatus and method
JPH0526136B2 (enrdf_load_stackoverflow)
JP4062527B2 (ja) Ｔｆｔアレイ検査装置
JPH0425663B2 (enrdf_load_stackoverflow)
JPS5853504B2 (ja) 集積回路装置の試験方法
JPH0582606A (ja) 半導体集積回路試験装置
JP2571110B2 (ja) 荷電ビームを用いたパタン寸法測定方法およびその装置
US4642566A (en) Method for the registration and representation of signals in the interior of integrated circuits by considering edge steepness and apparatus for implementing the method
JPS5960579A (ja) パタ−ン検査装置
JPH0820237B2 (ja) 電子顕微鏡用画像計測・検査装置
JPH0329867A (ja) 電子ビーム装置による電圧分布像の観測法
JPS59177846A (ja) 電子ビ−ム装置
JPH0356877A (ja) 電子ビーム装置
JP2594194B2 (ja) 元素マッピング装置
JPS60142527A (ja) 回路パタ−ン検査装置
JPS62191Y2 (enrdf_load_stackoverflow)
JPS54130891A (en) Tomograph using analogue picture memory
JPS58206978A (ja) ２値化出力発生方式
JPH041458B2 (enrdf_load_stackoverflow)
JPS60117637A (ja) 集積回路テスタ
JPH03108349A (ja) Ｌｓｉ評価装置
JPS629218B2 (enrdf_load_stackoverflow)