JPH0424872B2 - - Google Patents
Info
- Publication number
- JPH0424872B2 JPH0424872B2 JP57008449A JP844982A JPH0424872B2 JP H0424872 B2 JPH0424872 B2 JP H0424872B2 JP 57008449 A JP57008449 A JP 57008449A JP 844982 A JP844982 A JP 844982A JP H0424872 B2 JPH0424872 B2 JP H0424872B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- semiconductor layer
- type
- solid
- photodiode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 31
- 238000003384 imaging method Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000012535 impurity Substances 0.000 description 12
- 238000001444 catalytic combustion detection Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57008449A JPS58125976A (ja) | 1982-01-22 | 1982-01-22 | 固体撮像素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57008449A JPS58125976A (ja) | 1982-01-22 | 1982-01-22 | 固体撮像素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58125976A JPS58125976A (ja) | 1983-07-27 |
JPH0424872B2 true JPH0424872B2 (ko) | 1992-04-28 |
Family
ID=11693429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57008449A Granted JPS58125976A (ja) | 1982-01-22 | 1982-01-22 | 固体撮像素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58125976A (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH073867B2 (ja) * | 1985-12-03 | 1995-01-18 | 松下電子工業株式会社 | 固体撮像装置 |
JPH0715981B2 (ja) * | 1985-12-03 | 1995-02-22 | 松下電子工業株式会社 | 固体撮像装置 |
JP2822393B2 (ja) * | 1988-07-30 | 1998-11-11 | ソニー株式会社 | 固体撮像装置及びその駆動方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5481094A (en) * | 1977-11-25 | 1979-06-28 | Hewlett Packard Yokogawa | Semiconductor photodetector |
JPS5495116A (en) * | 1978-01-13 | 1979-07-27 | Toshiba Corp | Solid image pickup unit |
-
1982
- 1982-01-22 JP JP57008449A patent/JPS58125976A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5481094A (en) * | 1977-11-25 | 1979-06-28 | Hewlett Packard Yokogawa | Semiconductor photodetector |
JPS5495116A (en) * | 1978-01-13 | 1979-07-27 | Toshiba Corp | Solid image pickup unit |
Also Published As
Publication number | Publication date |
---|---|
JPS58125976A (ja) | 1983-07-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2805353B1 (en) | Solid-state image sensor and camera | |
US4672455A (en) | Solid-state image-sensor having reverse-biased substrate and transfer registers | |
JPS62124771A (ja) | 固体撮像装置 | |
JPS58138187A (ja) | 固体イメ−ジセンサ | |
JPH0766961B2 (ja) | 固体撮像素子 | |
JP2917361B2 (ja) | 固体撮像素子 | |
JPH0424870B2 (ko) | ||
JP2964571B2 (ja) | 固体撮像素子 | |
JPH0424872B2 (ko) | ||
EP0499275B1 (en) | Solid state imager | |
JPH0424871B2 (ko) | ||
JPH02278874A (ja) | 固体撮像素子及びその製造方法 | |
JPH0425714B2 (ko) | ||
JP3247163B2 (ja) | 固体撮像装置及びその製造方法 | |
JPS63312669A (ja) | 固体撮像素子 | |
JP3047965B2 (ja) | 固体撮像装置 | |
JPH06275809A (ja) | 固体撮像素子 | |
JPH0415666B2 (ko) | ||
JPS6321869A (ja) | 固体撮像装置 | |
JPH05145056A (ja) | 固体撮像素子 | |
JPH0774336A (ja) | 固体撮像素子 | |
JPH0391263A (ja) | 固体撮像素子 | |
JPH03109743A (ja) | 電荷結合素子および該素子を備えた固体撮像素子 | |
JPH04332166A (ja) | 固体撮像素子 | |
JPS6273663A (ja) | 固体撮像装置およびその駆動方法 |