JPH0424870B2 - - Google Patents
Info
- Publication number
- JPH0424870B2 JPH0424870B2 JP57008443A JP844382A JPH0424870B2 JP H0424870 B2 JPH0424870 B2 JP H0424870B2 JP 57008443 A JP57008443 A JP 57008443A JP 844382 A JP844382 A JP 844382A JP H0424870 B2 JPH0424870 B2 JP H0424870B2
- Authority
- JP
- Japan
- Prior art keywords
- imaging device
- solid
- state imaging
- semiconductor layer
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 50
- 238000003384 imaging method Methods 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000003860 storage Methods 0.000 description 19
- 239000012535 impurity Substances 0.000 description 16
- 238000009825 accumulation Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 3
- 238000005036 potential barrier Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 108091006146 Channels Proteins 0.000 description 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57008443A JPS58125970A (ja) | 1982-01-22 | 1982-01-22 | 固体撮像装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57008443A JPS58125970A (ja) | 1982-01-22 | 1982-01-22 | 固体撮像装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58125970A JPS58125970A (ja) | 1983-07-27 |
JPH0424870B2 true JPH0424870B2 (ko) | 1992-04-28 |
Family
ID=11693263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57008443A Granted JPS58125970A (ja) | 1982-01-22 | 1982-01-22 | 固体撮像装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58125970A (ko) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2610010B2 (ja) * | 1984-02-29 | 1997-05-14 | ソニー株式会社 | 縦形オーバーフローイメージセンサー |
JPH07120771B2 (ja) * | 1984-06-19 | 1995-12-20 | 日本電気株式会社 | 固体撮像装置 |
JPS61142765A (ja) * | 1984-12-17 | 1986-06-30 | Matsushita Electronics Corp | 固体撮像装置 |
JPH07112057B2 (ja) * | 1988-09-13 | 1995-11-29 | 株式会社東芝 | 固体撮像装置 |
JP2833256B2 (ja) * | 1991-04-15 | 1998-12-09 | 日本電気株式会社 | 固体撮像装置の製造方法 |
JPH0846165A (ja) * | 1995-03-16 | 1996-02-16 | Sony Corp | 縦形オーバーフローイメージセンサー |
JP2576813B2 (ja) * | 1995-04-22 | 1997-01-29 | ソニー株式会社 | 縦形オーバーフローイメージセンサーの製造方法 |
JP4742661B2 (ja) * | 2005-04-25 | 2011-08-10 | ソニー株式会社 | 固体撮像素子の製造方法 |
JP2016201400A (ja) * | 2015-04-07 | 2016-12-01 | リコーイメージング株式会社 | 撮像素子および撮像装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5495116A (en) * | 1978-01-13 | 1979-07-27 | Toshiba Corp | Solid image pickup unit |
JPS5644576A (en) * | 1979-09-18 | 1981-04-23 | Sanyo Electric Co | Refrigerated commercial display case and air circulating method thereof |
JPS57207383A (en) * | 1981-06-15 | 1982-12-20 | Nippon Telegr & Teleph Corp <Ntt> | Phototransistor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54124480U (ko) * | 1978-02-20 | 1979-08-31 |
-
1982
- 1982-01-22 JP JP57008443A patent/JPS58125970A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5495116A (en) * | 1978-01-13 | 1979-07-27 | Toshiba Corp | Solid image pickup unit |
JPS5644576A (en) * | 1979-09-18 | 1981-04-23 | Sanyo Electric Co | Refrigerated commercial display case and air circulating method thereof |
JPS57207383A (en) * | 1981-06-15 | 1982-12-20 | Nippon Telegr & Teleph Corp <Ntt> | Phototransistor |
Also Published As
Publication number | Publication date |
---|---|
JPS58125970A (ja) | 1983-07-27 |
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